IP Library Granted Patent US 11,542,157
Granted Patent B2
US 11,542,157 · App. 16/758,362 · Granted Jan 3, 2023

Microchip

Inventors: Kenichi Hirose (Tokyo, JP); Makoto Yamanaka (Tokyo, JP); Shinji Suzuki (Tokyo, JP); Kenji Hatakeyama (Tokyo, JP)
Assignee: Ushio Denki Kabushiki Kaisha
B81C3/001B81C1/00071B81C2201/019
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Quick Facts
Patent No.
US 11,542,157
App. No.
16/758,362
Granted
Jan 3, 2023
Kind
B2
Abstract

Provided is a microchip that can achieve a favorable bonding state in the bonding portion between first and second substrates even if the microchip is large in size. A microchip includes a first substrate made of a resin and a second substrate made of a resin, the first substrate and the second substrates being bonded to each other, and a channel surrounded by a bonding portion between the first substrate and the second substrate is formed by a channel forming step formed at least in the first substrate. Further, a noncontact portion is formed to surround the bonding portion, and an angle θ 1 formed between a side wall surface of the channel forming step and a bonding surface continuous therewith satisfies θ 1 >90°.

Claims (12)

1. A microchip comprising a first substrate made of a resin and a second substrate made of a resin, the first substrate and the second substrates being bonded to each other, a channel surrounded by a bonding portion between the first substrate and the second substrate being formed by a channel forming step formed at least in the first substrate, wherein:

a noncontact portion is formed to surround the bonding portion around an entire circumference of the bonding portion and the channel;

an angle θ 1 formed between a side wall surface of the channel forming step and a bonding surface continuous therewith satisfies θ 1 >90°;

a bonding surface and the front surface of the second substrate on the side being in contact with the first substrate is configured as a flat surface; and

the bonding surface has a width of not less than 500 μm.

2. The microchip according to claim 1 , wherein an angle θ 2 formed between a side wall surface of the noncontact portion and a bonding surface continuous therewith satisfies θ 2 >90°.

3. A microchip comprising a first substrate made of a resin and a second substrate made of a resin, the first substrate and the second substrate being bonded to each other, a channel surrounded by a bonding portion between the first substrate and the second substrate being formed by a channel forming step formed at least in the first substrate, wherein:

a noncontact portion is formed to surround the bonding portion around an entire circumference of the bonding portion and the channel;

at least either a side wall surface of the channel forming step or a side wall surface of the noncontact portion is chamfered or rounded in an area near a bonding surface continuous with the side wall surface;

a bonding surface and the front surface of the second substrate on the side being in contact with the first substrate is configured as a flat surface; and

the bonding surface has a width of not less than 500 μm.

4. The microchip according to claim 1 , wherein a bonding portion between the first substrate and the second substrate is formed at least on part of a periphery of the first substrate and the second substrate.

Assignments (2)
NUNC PRO TUNC ASSIGNMENT Recorded May 22, 2026
From: USHIO DENKI KABUSHIKI KAISHA
To: ZEON CORPORATION
Reel/Frame 074736/0684 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 22, 2020
From: HIROSE, KENICHI; YAMANAKA, MAKOTO; SUZUKI, SHINJI; HATAKEYAMA, KENJI
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 052470/0358 →
Priority Claims (1)
JP JP2017-207839 · Oct 27, 2017 · national
Continuity (1)
Related Publication 20200255288A1 · Aug 13, 2020