Intraluminal ultrasound imaging device and method of fabricating the same
Intraluminal ultrasound imaging device, systems and methods (e.g., method of fabricating the device) are provided. In some embodiments, the intraluminal ultrasound imaging device includes a flexible elongate member configured to be positioned within a body lumen of a patient, and an ultrasound scanner assembly disposed at a distal portion of the flexible elongate member and configured to obtain imaging data of the body lumen. The ultrasound scanner assembly includes a flexible substrate, a first under-bump metallization (UBM) layer over the flexible substrate, a first solder feature over the first UBM layer, and a first electronic component electrically connected to the first solder feature.
1. An intraluminal ultrasound imaging device, comprising:
a flexible elongate member configured to be positioned within a body lumen of a patient; and
an ultrasound scanner assembly disposed at a distal portion of the flexible elongate member and configured to obtain imaging data of the body lumen, the ultrasound scanner assembly comprising:
a flexible substrate,
a conductive layer over the flexible substrate,
a first polymer insulation portion and a second polymer insulation portion over the conductive layer, wherein a space between the first polymer insulation portion and the second polymer insulation portion exposes a first contact area of the conductive layer,
a first under-bump metallization (UBM) layer over the first contact area,
a first solder feature over the first UBM layer, wherein the first UBM layer and the first solder feature are disposed between the first polymer insulation and the second polymer insulation portion, and
a first electronic component electrically connected to the first solder feature.
2. The intraluminal ultrasound imaging device of claim 1 , wherein the ultrasound scanner assembly further comprising:
a second UBM layer over a second contact area of the conductive layer;
a second solder feature over the second UBM layer; and
a second electronic component electrically connected to the second solder feature.
3. The intraluminal ultrasound imaging device of claim 2 ,
wherein each of the first and second contact areas comprises a gold top layer and at least one of the first UBM layer or the second UBM layer comprises a titanium-tungsten bottom layer in direct contact with the gold top layer.
4. The intraluminal ultrasound imaging device of claim 2 ,
where the first contact area has a first width and the first solder feature has a second width greater than the first width; and
where the second contact area has a third width and the second solder feature has a fourth width greater than the third width.
5. The intraluminal ultrasound imaging device of claim 2 , wherein the second electronic component comprises an ultrasound transducer, an application specific integrated circuit (ASIC) or a capacitor.
6. The intraluminal ultrasound imaging device of claim 1 , wherein the first electronic component comprises an ultrasound transducer, an application specific integrated circuit (ASIC) or a capacitor.
7. The intraluminal ultrasound imaging device of claim 1 ,
wherein the first electronic component is an ultrasound transducer,
wherein the ultrasound scanner assembly further comprises an underfill material layer between the first electronic component and the flexible substrate.
8. A method for fabricating an intraluminal ultrasound scanner assembly, comprising:
providing a flexible circuit structure, the flexible circuit structure comprising:
a flexible substrate,
a conductive layer over the flexible substrate,
a first polymer insulation portion and a second polymer insulation portion over the conductive layer, wherein a space between the first polymer insulation portion and the second polymer insulation portion exposes a contact area of the conductive layer,
an under-bump metallization (UBM) layer over the contact area, and
a solder feature over the UBM layer, wherein the UBM layer and the solder feature are disposed between the first polymer insulation and the second polymer insulation portion;
applying a solder flux over the solder feature;
placing an ultrasound transducer over the flexible circuit structure such that a contact pad of the ultrasound transducer is aligned and in contact with the solder feature; and
performing a first reflow soldering process to the flexible circuit structure to bond the contact pad and the solder feature.
9. The method of claim 8 , further comprising:
after performing the first reflow soldering process, removing the solder flux from the flexible circuit structure.
10. The method of claim 9 , wherein removing the solder flux from the flexible circuit structure comprises:
rinsing the flexible circuit structure with deionized water; and
baking the flexible circuit structure to remove the deionized water.
11. The method of claim 8 , further comprising:
forming an underfill material layer between the ultrasound transducer and the flexible circuit structure.
12. The method of claim 11 , wherein forming the underfill material layer between the ultrasound transducer and the flexible circuit structure comprises:
dispensing an underfill material between the ultrasound transducer and the flexible circuit structure; and
curing the underfill material between the ultrasound transducer and the flexible circuit structure.
13. The method of claim 12 , wherein curing the underfill material comprises performing a second reflow soldering process to the flexible circuit structure.
14. The method of claim 8 ,
wherein providing the flexible circuit structure comprises fabricating the flexible circuit structure,
wherein fabricating the flexible circuit structure comprises:
providing the flexible substrate and the conductive layer over the flexible substrate, and
patterning a polymer insulation layer over the conductive layer, thereby exposing a plurality of contact areas of the conductive layer, wherein patterning the polymer insulation portion defines the first polymer insulation portion and the second insulation portion;
depositing the UBM layer over the polymer insulation layer and the plurality of contact areas of the conductive layer;
forming a dry photoresist layer over the UBM layer;
selectively removing portions of the dry photoresist layer over a plurality of bump landing areas, each of the plurality of bump landing areas positioned within one of the plurality of contact areas;
electroplating a solder material over the plurality of bump landing areas, wherein the solder material defines the solder feature;
removing residual portions of the dry photoresist layer; and
removing portions of the UBM layer outside of the plurality of bump landing areas.
15. The method of claim 14 , wherein forming the dry photoresist layer over the UBM layer comprises:
attaching a dry photoresist film to the flexible substrate; and
pressing the dry photoresist film against the flexible substrate.
16. The method of claim 14 , wherein selectively removing portions of the dry photoresist layer over the plurality of bump landing areas comprises:
exposing the portions of the dry photoresist layer over the plurality of bump landing areas to a light source; and
developing the portions of the dry photoresist layer over the plurality of bump landing areas with a developer solution.
17. The method of claim 14 , wherein selectively removing the portions of the dry photoresist layer over the plurality of bump landing areas comprises:
exposing portions of the dry photoresist layer other than the portions over the plurality of bump landing areas to a light source; and
developing the portions of the dry photoresist layer over the plurality of bump landing areas with a developer solution.
18. The method of claim 14 , wherein removing portions of the UBM layer outside of the plurality of bump landing areas comprises etching the portions of the UBM layer outside of the plurality of the bump landing areas with an acidic solution.