Force attenuator for force sensor

1. A force sensing device comprising:

a force attenuator comprising a deformable slab and a solid-nondeformable slab, wherein:

the force attenuator defines a first surface area for receiving an applied force;

the deformable slab defines a first surface and a second surface, wherein the first surface opposes the second surface;

the non-deformable slab defines a third surface and a fourth surface, wherein the third surface opposes the fourth surface;

the third surface provides the first surface area and the fourth surface of the non-deformable slab is disposed on the first surface of the deformable slab; and

areas of the first surface, the second surface, and the third surface are an identical size and an identical shape such that a relationship between sensitivity attenuation and an area ratio is linear, the areas include the first surface area and the area ratio is a ratio of the areas of the first surface, the second surface, and the third surface;

a cavity formed by the deformable slab such that an opening of the cavity is exposed at the second surface of the deformable slab so that the applied force is transferred to a force sensor within the cavity;

the force sensor provided in the cavity so as to be exposed from the second surface;

a package substrate arranged in the cavity; and

one or more electrical connectors arranged in the cavity and electrically connecting the package substrate to the force sensor, wherein:

the force sensor defines a second surface area for receiving the applied force through the force attenuator;

the force sensor comprises one or more piezoelectric sensing elements, each piezoelectric sensing element comprising a piezoelectric material arranged between a first electrode and a second electrode; and

the second electrode of at least one piezoelectric sensing element is arranged over a respective electrical connector and electrically connected to the respective electrical connector.

2. The force sensing device of claim 1 , wherein the deformable slab and the force sensor are configured for mounting on a solid surface.

3. The force sensing device of claim 1 , wherein the deformable slab is made of a rubber material.

4. The force sensing device of claim 1 , wherein the force sensor is a microelectromechanical system (MEMS) force sensor.

5. The force sensing device of claim 4 , wherein the MEMS force sensor is a chip scale packaged MEMS force sensor comprising the one or more piezoresistive sensing elements.

6. The force sensing device of claim 1 , wherein the force sensor comprises the one or more piezoresistive sensing elements.

7. The force sensing device of claim 1 , wherein the force sensor comprises a sealed cavity between a cap substrate of the force sensor and a sensor substrate of the force sensor.

8. The force sensing device of claim 1 , wherein:

the sensitivity of the force sensing device increases as the first surface area decreases; or

the sensitivity of the force sensing device decreases as the first surface area increases.

9. The force sensing device of claim 1 , wherein the deformable slab defines a cylindrical shape.

10. The force sensing device of claim 1 , wherein the first surface, the second surface, the third surface, and the fourth surface are parallel surfaces.

11. A force attenuator comprising:

a deformable slab;

a non-deformable slab, wherein:

the deformable slab defines a first surface and a second surface, wherein the first surface opposes the second surface;

the non-deformable slab defines a third surface and a fourth surface, wherein the third surface opposes the fourth surface;

the third surface provides a first surface area and the fourth surface of the non-deformable slab is disposed on the first surface of the deformable slab; and

the third surface defines the first surface area for receiving an applied force;

areas of the first surface, the second surface, and the third surface, are an identical size and an identical shape such that a relationship between sensitivity attenuation and an area ratio is linear, the areas include the first surface area and the area ratio is a ratio of the areas of the first surface, the second surface, and the third surface;

a cavity formed by the deformable slab such that an opening of the cavity is exposed at the second surface of the deformable slab so that the applied force is transferred to a force sensor within the cavity;

the force sensor provided in the cavity so as to be exposed from the second surface, wherein the force sensor comprises one or more piezoresistive sensing elements and one or more piezoelectric sensing elements, each piezoelectric sensing element comprising piezoelectric material between a first electrode and a second electrode;

a package substrate; and

one or more electrical connectors, wherein:

the force sensor is disposed on a surface of the cavity;

the package substrate is disposed opposite the force sensor in the cavity;

the one or more electrical connectors are disposed in the cavity and electrically connect the package substrate to the force sensor; and

the second electrode of at least one piezoelectric sensing element is disposed over a respective electrical connector and electrically connected to the respective electrical connector.

12. The force attenuator of claim 11 , wherein the force sensor is a microelectromechanical system (MEMS) force sensor.

13. The force attenuator of claim 11 , wherein the deformable slab is made of a rubber material.

14. The force attenuator of claim 11 , wherein two opposing surfaces of the deformable slab are parallel surfaces.