Ultrasonic probe and ultrasonic measurement apparatus using the same
An ultrasonic probe includes a semiconductor chip in which an ultrasonic transducer is formed and an electrode pad electrically connected to an upper electrode or a lower electrode of the ultrasonic transducer is provided and a flexible substrate in which a bump electrically connected to the electrode pad is provided and the bump is disposed in a portion overlapping with a stepped portion of the semiconductor chip. Further, a height of a connection surface of the electrode pad of the semiconductor chip connected to the bump is lower than a height of a lower surface of the lower electrode.
1. An ultrasonic probe comprising:
a semiconductor chip in which an ultrasonic transducer is formed and an electrode pad electrically connected to an upper electrode or a lower electrode of the ultrasonic transducer is provided; and
a flexible substrate in which a connection conductor portion electrically connected to the electrode pad is provided and the connection conductor portion is disposed in a portion overlapping with a part of the semiconductor chip in a plan view,
wherein the electrode pad comprises a stepped portion disposed below the flexible substrate and a convex portion in which the ultrasonic transducer is formed,
wherein a height of a connection surface of the stepped portion of the electrode pad connected to the connection conductor portion is lower than a height of a lower surface of the lower electrode at the convex portion of the electrode pad, and
wherein a lower surface of the flexible substrate at the stepped portion of the electrode pad is located at a height between an upper surface of the upper electrode at the convex portion of the electrode pad in which the ultrasonic transducer is formed and an upper surface of the electrode pad at the stepped portion in the semiconductor chip, in a thickness direction of the semiconductor chip.
2. The ultrasonic probe according to claim 1 ,
wherein an upper surface of the stepped portion of the electrode pad is disposed at a position lower than an upper surface of the upper electrode at the convex portion of the electrode pad, and
wherein the flexible substrate is disposed above the stepped portion.
3. The ultrasonic probe according to claim 2 ,
wherein the flexible substrate extends in a plurality of directions along two or more sides of a main surface of the semiconductor chip.
4. The ultrasonic probe according to claim 1 ,
wherein the flexible substrate has an opening, and
wherein the convex portion in which the ultrasonic transducer of the semiconductor chip is formed is disposed in the opening.
5. The ultrasonic probe according to claim 4 ,
wherein an acoustic lens is disposed on the convex portion.
6. An ultrasonic probe comprising:
a semiconductor chip in which an ultrasonic transducer including a lower electrode, a first insulating film covering the lower electrode, a cavity portion disposed so as to overlap with the lower electrode in a plan view, a second insulating film covering the cavity portion, and an upper electrode disposed so as to overlap with the cavity portion in a plan view is formed and an electrode pad electrically connected to the lower electrode or the upper electrode is formed; and
a flexible substrate provided with a connection conductor portion electrically connected to the electrode pad,
wherein the electrode pad comprises a stepped portion disposed below the flexible substrate and a convex portion in which the ultrasonic transducer is formed,
wherein a height of a connection surface of the stepped portion of the electrode pad connected to the connection conductor portion is lower than a height of a lower surface of the lower electrode at the convex portion of the electrode pad,
wherein an outer peripheral insulating film is formed outside the electrode pad of the semiconductor chip, and
wherein an upper surface of the outer peripheral insulating film has a same height as an upper surface of the electrode pad or has a height lower than the upper surface of the electrode pad.
7. The ultrasonic probe according to claim 6 ,
wherein the electrode pad is provided in a peripheral portion along at least one side of an upper surface of the semiconductor chip.
8. The ultrasonic probe according to claim 6 ,
wherein a plurality of through holes are formed in the flexible substrate,
wherein a plurality of projecting portions are formed on the outer peripheral insulating film, and
wherein each of the plurality of projecting portions are is fit into each of the plurality of through holes.
9. An ultrasonic measurement apparatus comprising:
an ultrasonic probe including a semiconductor chip in which an ultrasonic transducer is formed and an electrode pad electrically connected to an upper electrode or a lower electrode of the ultrasonic transducer is provided and a flexible substrate in which a connection conductor portion electrically connected to the electrode pad is provided and the connection conductor portion is disposed in a portion overlapping with a part of the semiconductor chip in a plan view; and
a control unit configured to control transmission and reception of ultrasonic waves of the ultrasonic probe,
wherein the electrode pad of the semiconductor chip comprises a stepped portion disposed below the flexible substrate and a convex portion in which the ultrasonic transducer is formed,
wherein a height of a connection surface of the stepped portion of the electrode pad of the semiconductor chip connected to the connection conductor portion of the flexible substrate is lower than a height of a lower surface of the lower electrode of the semiconductor chip at the convex portion of the electrode pad, and
wherein a lower surface of the flexible substrate at the stepped portion of the electrode pad is located at a height between an upper surface of the upper electrode at the convex portion of the electrode pad in which the ultrasonic transducer is formed and an upper surface of the electrode pad at the stepped portion in the semiconductor chip, in a thickness direction of the semiconductor chip.
10. The ultrasonic measurement apparatus according to claim 9 ,
wherein an upper surface of the stepped portion of the electrode pad is disposed at a position lower than an upper surface of the upper electrode at the convex portion of the electrode pad, and
wherein the flexible substrate is disposed above the stepped portion.
11. The ultrasonic measurement apparatus according to claim 10 ,
wherein the flexible substrate extends in a plurality of directions along two or more sides of a main surface of the semiconductor chip.
12. The ultrasonic measurement apparatus according to claim 9 ,
wherein the flexible substrate has an opening, and
wherein the convex portion in which the ultrasonic transducer of the semiconductor chip is formed is disposed in the opening.