Freeze cleaning apparatus
A freeze cleaning apparatus includes a table for supporting a processing target substrate having a first surface and a second surface opposite to the first surface, a liquid supply unit positioned to supply a cleaning liquid onto the second surface of the processing target substrate that is placed such that the first surface faces the table, and a cooling gas discharge unit in the table to supply a cooling gas to the first surface side of the processing target substrate. A gap between the table and the processing target substrate is set such that the cooling gas flows as a laminar flow between the table and the processing target substrate.
1. A freeze cleaning apparatus, comprising:
a table that faces a first surface of a processing target substrate, the processing target substrate having a second surface opposite the first surface;
a liquid supply unit configured to supply a cleaning liquid onto the second surface of the processing target substrate placed such that the first surface faces the table;
a side wall that surrounds a space between the processing target substrate and the table;
a cooling gas discharge unit that is provided in the table to discharge a cooling gas into the space;
a drain that discharges the cooling gas from the space to the outside; and
a valve located on the drain, wherein
the space between the processing target substrate and the table is a closed space.
2. The freeze cleaning apparatus according to claim 1 , wherein a top surface of the table is sloped downward from a center thereof toward the drain.
3. The freeze cleaning apparatus according to claim 1 , further comprising:
a sensor that detects a temperature of the cleaning liquid on the processing target substrate;
a flow rate adjusting unit that adjusts a flow rate of the cooling gas; and
a controller that controls the flow rate adjusting unit based on the temperature detected by the sensor.
4. The freeze cleaning apparatus according to claim 3 , wherein the controller stops supply of the cooling gas and starts thawing the cleaning liquid based on the temperature detected by the sensor.