Semiconductor device and method for fabricating the same
A semiconductor layer stack includes a first conductive layer, a dielectric layer including a high-k material, which is formed on the first conductive layer, a second conductive layer formed on the dielectric layer, and an interface control layer formed between the dielectric layer and the second conductive layer and including a leakage blocking material, a dopant material, a high bandgap material and a high work function material.
1. A capacitor comprising:
a bottom electrode;
a dielectric layer formed on the bottom electrode, and including a high-k material;
a top electrode formed on the dielectric layer; and
an interface control layer formed between the dielectric layer and the top electrode, wherein the interface control layer includes a dopant-containing layer, a high bandgap layer and a high work function layer that are sequentially stacked on top of one another,
wherein the dopant-containing layer is formed between the dielectric layer and the top electrode,
wherein the high bandgap layer is formed between the dopant-containing layer and the top electrode, and
wherein the high work function layer is formed between the high bandgap layer and the top electrode.
2. The capacitor of claim 1 , wherein the high bandgap layer is thinner than the dopant-containing layer.
3. The capacitor of claim 1 , wherein the dopant-containing layer includes a material having a higher dielectric constant than the high bandgap layer and the high-k material.
4. The capacitor of claim 1 , wherein the high bandgap layer includes a material having a higher bandgap than the dopant-containing layer.
5. The capacitor of claim 1 , wherein the high work function layer includes a conductive material having a higher work function than the top electrode.
6. The capacitor of claim 1 , wherein the high bandgap layer includes an aluminum oxide or a silicon oxide.
7. The capacitor of claim 1 , wherein the high work function layer includes a titanium aluminum nitride or a titanium silicon nitride.
8. The capacitor of claim 1 , wherein the dopant-containing layer includes a titanium oxide.
9. The capacitor of claim 1 , wherein the high-k material of the dielectric layer includes a zirconium oxide-based layer or a hafnium oxide-based layer.