Probe device of floating structure
Disclosed is a probe device of a floating structure including a probe unit having a groove formed at one end thereof into which a needle for transmitting an electrical signal is inserted, and a guide portion formed at the other end thereof and a plate unit having an inner space which is inserted with the guide portion and formed to support a part of the guide portion, wherein the guide portion is spaced apart from the inner space at a predetermined interval by an external force applied to the needle.
1. A probe device of a floating structure comprising:
a probe unit having a groove formed at one end thereof into which a needle for transmitting an electrical signal is inserted, and a guide portion formed at the other end thereof;
a plate unit installed at one end into which a part of the guide portion is inserted; and
an elastic unit formed to connect the other end of the probe unit and one end of the plate unit and to be contracted and relaxed according to an external force applied to the needle,
wherein the guide portion includes
a single guide member having one end formed in a spherical shape and the other end formed in a cylindrical shape which is fixed to the plate unit; and
an accommodation space formed to accommodate the single guide member.
2. The probe device of the floating structure of claim 1 , wherein the elastic unit is provided in plural and an axis of the probe unit is inclined with respect to an axis of the guide portion according to the external force.
3. The probe device of the floating structure of claim 1 , wherein the plate unit includes
a plate member installed to be inserted with the guide portion; and
a spring member providing a restoring force to the plate member when the external force is removed.