Methods for using remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition to grow layers in light emitting devices

1. A method for growing a light emitting device, the method comprising:

growing a device structure on a growth substrate using a non-RP-CVD and non-sputtering deposition process, the device structure including a n-type region and a p-type region stacked together; and

growing at least a portion of a layer of a tunnel junction on the device structure by using at least one of remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition in a gaseous environment comprising one or more of a nitrogen-containing gas and a hydrogen-containing gas.

2. The method of claim 1 , wherein growing the tunnel junction further comprises:

directly contacting a p++ layer with the p-type region, wherein the p++ layer is more heavily doped than the p-type region; and

contacting a n++ layer with the p++ layer, wherein the portion of the layer of the tunnel junction is the p++ layer; the device structure and tunnel junction comprising a III-nitride material.

3. The method of claim 2 , wherein at least a portion of the n++ layer is grown by at least one of RP-CVD and sputtering deposition in an environment that does not cause inoperability of at least the p++ layer.

4. The method of claim 2 , wherein

growing the device structure further comprises:

growing the n-type region, the layer of the tunnel junction, and the p-type region by metal organic chemical vapor deposition;

annealing the n-type region, the III-nitride layer, and the p-type region; and

growing at least a portion of the layer of the tunnel junction further comprises:

after said annealing, growing the p++ layer on the p-type region, wherein the layer of the tunnel junction is the p++ layer.

5. The method of claim 2 , wherein the tunnel junction further comprises an additional layer disposed between the p++ layer and the n++ layer, the additional layer having a different composition from the p++ layer and the n++ layer.

6. The method of claim 1 , wherein growing the device structure further comprises:

growing the n-type region, and a first portion of the p-type region by metal organic chemical vapor deposition (MOCVD);

annealing the n-type region, and the first portion of the p-type region; and

after said annealing, growing a second portion of the p-type region by at least one of RP-CVD and sputtering deposition in at least a reduced hydrogen environment that does not cause inoperability of at least the first portion of the p-type region and the second portion of the p-type region.

7. The method of claim 1 , further comprising:

forming a first metal contact in direct contact with the n-type region and a second metal contact in direct contact with the n-type contact layer.

8. The method of claim 7 , further comprising:

growing a second device structure on the tunnel junction.

9. The method of claim 1 , wherein growing the tunnel junction further comprises:

directly contacting a p++ layer with the p-type region, wherein the layer of the tunnel junction is the p++ layer and the p++ layer is more heavily doped than the p-type region, at least a portion of the p++ layer grown by metal organic chemical vapor deposition (MOCVD);

annealing at least the portion of the p++ layer; and

directly contacting a n++ layer with the p++ layer, the n++ layer grown by at least one of RP-CVD and sputtering deposition in an environment that does not cause inoperability of at least the p++ layer.

10. The method of claim 1 , further comprising a light emitting region between the n-type region and the p-type region.

11. A method for growing a light emitting device, the method comprising:

growing a device structure on a growth substrate using a MOCVD process, the device structure including a n-type region, and a p-type region stacked together; and

growing at least a portion of a layer of a tunnel junction on the device structure by using at least one of remote plasma chemical vapor deposition (RP-CVD) and sputtering deposition in a gaseous environment comprising one or more of a nitrogen-containing gas and a hydrogen-containing gas that does not cause inoperability of at least the p-type region.

12. The method of claim 11 , wherein growing the tunnel junction further comprises:

directly contacting a p++ layer with the p-type region, wherein the p++ layer is more heavily doped than the p-type region; and

contacting a n++ layer with the p++ layer, wherein the portion of the layer of the tunnel junction is the p++ layer, the device structure and tunnel junction comprising a III-nitride material.

13. The method of claim 12 , wherein:

growing the device structure further comprises:

annealing the n-type region, the III-nitride layer, and the p-type region; and

growing at least a portion of the layer of the tunnel junction further comprises:

after said annealing, growing the p++ layer on the p-type region, wherein the layer is the p++ layer.

14. The method of claim 12 , wherein the tunnel junction further comprises an additional layer disposed between the p++ layer and the n++ layer, the additional layer having a different composition from the p++ layer and the n++ layer.

15. The method of claim 11 , wherein growing the device structure further comprising:

annealing the n-type region, the region, and the first portion of the p-type region; and

after said annealing, growing a second portion of the p-type region by at least one of RP-CVD and sputtering deposition in an environment that does not cause inoperability of at least the first portion of the p-type region and the second portion of the p-type region.

16. The method of claim 11 , wherein the device is a light emitting device and the device structure includes a light emitting region between the n-type region and the p-type region.