Non-volatile memory devices and program methods thereof

1. A program method of a non-volatile memory device, the non-volatile memory device including a cell string in which a plurality of memory cells are stacked in a direction perpendicular to a surface of a substrate, the method comprising:

performing a first program phase including programming a first memory cell among the plurality of memory cells, the first memory cell being connected to a first word line among a plurality of word lines of the cell string, the first program phase including applying a first pass voltage to other word lines among the plurality of word lines above or below the first word line with respect to the substrate; and

performing a second program phase including programming a second memory cell among the plurality of memory cells after the first memory cell is completely programmed, the second memory cell being connected to a second word line among the plurality of word lines closer to the substrate than the first word line, the second program phase including applying a second pass voltage to a first word line group among the plurality of word lines below the second word line with respect to the substrate and applying a third pass voltage to a second word line group among the plurality of word lines above the second word line with respect to the substrate, the second pass voltage being lower than the third pass voltage, and

the method further comprises one of

increasing the third pass voltage based on a first offset depending on a driving temperature of the non-volatile memory device, or

decreasing the second pass voltage based on a second offset depending on the driving temperature.

2. The method of claim 1 , wherein the second word line is closer to the substrate than a reference word line among the plurality of word lines.

3. The method of claim 1 , wherein the second program phase includes applying a fourth pass voltage to a third word line group among the plurality of word lines above the second word line group with respect to the substrate, the fourth pass voltage being higher than the second pass voltage and lower than the third pass voltage.

4. The method of claim 1 , further comprising:

sensing the driving temperature of the non-volatile memory device.

5. The method of claim 4 , wherein

the method further comprises the increasing the third pass voltage; and

the increasing the third pass voltage increases the third pass voltage based on the first offset in response to the driving temperature being higher than a reference temperature.

6. The method of claim 4 , wherein

the method further comprises the decreasing the second pass voltage; and

the decreasing the second pass voltage decreases the second pass voltage based on the second offset in response to the driving temperature being higher than a reference temperature.

7. The method of claim 1 , wherein a channel hole of the first memory cell is larger than a channel hole of the second memory cell.

8. A non-volatile memory device comprising:

a memory cell array including a cell string in which a plurality of memory cells are stacked in a direction perpendicular to a surface of a substrate;

an address decoder configured to select a word line among a plurality of word lines included in the cell string for programming the plurality of memory cells;

a page buffer configured to control a bit line of the cell string; and

a control logic circuit configured to,

control the address decoder and the page buffer such that a word line among the plurality of word lines furthest from the substrate is first programmed in a program operation, and

perform a recovery phase after a program verify operation, the recovery phase including applying a recovery voltage to a selected word line among the plurality of word lines and unselected word lines among the plurality of word lines, and the recovery phase including applying a precharge voltage to a common source line of the cell string.

9. The non-volatile memory device of claim 8 , wherein the control logic circuit is configured to:

perform a first program operation including programming a first memory cell among the plurality of memory cells connected to a first word line among the plurality of word lines, and the first program operation including applying a first pass voltage to other word lines among the plurality of word lines above or below the first word line with respect to the substrate; and

perform a second program operation including programming a second memory cell among the plurality of memory cells connected to a second word line among the plurality of word lines, and the second program operation including applying a second pass voltage a first word line group among the plurality of word lines below the second word line with respect to the substrate and applying a third pass voltage to a second word line group among the plurality of word lines above the second word line with respect to the substrate, the second word line being closer to the substrate than the first word line, the second pass voltage being less than the third pass voltage.

10. The non-volatile memory device of claim 8 , further comprising:

a temperature sensor configured to measure a driving temperature and provide the measured driving temperature to the control logic circuit.

11. A program method of a non-volatile memory device, the non-volatile memory device including a cell string in which a plurality of memory cells are stacked in a direction perpendicular to a surface of a substrate, the method comprising:

performing a first program phase including programming a first memory cell among the plurality of memory cells, the first memory cell being connected to a first word line among a plurality of word lines of the cell string, the first program phase including applying a first pass voltage to other word lines among the plurality of word lines above or below the first word line with respect to the substrate; and

performing a second program phase including programming a second memory cell among the plurality of memory cells after the first memory cell is completely programmed, the second memory cell being connected to a second word line among the plurality of word lines closer to the substrate than the first word line, the second program phase including applying a second pass voltage to a first word line group among the plurality of word lines below the second word line with respect to the substrate and applying a third pass voltage to a second word line group among the plurality of word lines above the second word line with respect to the substrate, the second pass voltage being lower than the third pass voltage, the second pass voltage and the third pass voltage being determined based on whether the second word line is closer to the substrate than a reference word line, and

the method further comprises one of

increasing the third pass voltage based on a first offset depending on a driving temperature of the non-volatile memory device, or

decreasing the second pass voltage based on a second offset depending on the driving temperature.