Image sensor including grooves
The present technology relates to techniques of preventing intrusion of moisture into a chip. Various illustrative embodiments include image sensors that include: a substrate; a plurality of layers stacked on the substrate; the plurality of layers including a photodiode layer having a plurality of photodiodes formed on a surface of the photodiode layer; the plurality of layers including at least one layer having a groove formed such that a portion of the at least one layer is excavated; and a transparent resin layer formed above the photodiode layer and formed in the groove. The present technology can be applied to, for example, an image sensor.
1. An image sensor, comprising:
a substrate;
a plurality of layers stacked on the substrate, the plurality of layers including:
a photodiode layer including a plurality of photodiodes formed therein; and
at least one layer having a groove formed therein such that a portion of the at least one layer is excavated, wherein the groove forms a pad opening portion;
an adhesive layer formed above the photodiode layer;
a cover glass above the plurality of photodiodes and on the adhesive layer; and
a hydrophobic film formed in the pad opening portion.
2. The image sensor according to claim 1 , wherein the adhesive layer is formed above the groove in a planar view.
3. The image sensor according to claim 1 , wherein the plurality of layers further includes an interconnection layer disposed below the photodiode layer.
4. The image sensor according to claim 1 , further comprising a passivation film formed in the groove.
5. The image sensor according to claim 1 , wherein a passivation film covers an inner wall of the pad opening portion.
6. The image sensor according to claim 1 , wherein the groove includes a portion of the photodiode layer such that the portion of the photodiode layer is excavated.
7. The image sensor according to claim 1 , wherein the adhesive layer is further formed in the groove.
8. The image sensor according to claim 1 , wherein
the plurality of layers further includes a planarization film formed above the photodiode layer; and
the groove is formed such that a portion of the planarization film is excavated.
9. The image sensor according to claim 8 , wherein
the plurality of layers further includes a color filter layer formed above the planarization film; and
the groove is formed such that a portion of the color filter layer is excavated.
10. An image sensor, comprising:
a substrate;
a plurality of layers stacked on the substrate, the plurality of layers including:
a photodiode layer including a plurality of photodiodes formed therein; and
at least one layer having a groove formed therein such that a portion of the at least one layer is excavated;
an adhesive layer formed above the photodiode layer; and
a cover glass above the plurality of photodiodes and on the adhesive layer,
wherein the groove forms a pad opening portion, and
wherein a passivation film comes into contact with a top surface of an electrode pad formed at a bottom of the pad opening portion.
11. The image sensor according to claim 10 , wherein the plurality of layers further includes an interconnection layer disposed below the photodiode layer.
12. The image sensor according to claim 10 , wherein the groove includes a portion of the photodiode layer such that the portion of the photodiode layer is excavated.
13. An image sensor, comprising:
a substrate;
a plurality of layers stacked on the substrate, the plurality of layers including:
a photodiode layer including a plurality of photodiodes formed therein; and
at least one layer having a groove formed therein such that a portion of the at least one layer is excavated;
an adhesive layer formed above the photodiode layer; and
a cover glass above the plurality of photodiodes and on the adhesive layer,
wherein the plurality of layers further includes an interconnection layer disposed below the photodiode layer, and
wherein the groove is formed such that a portion of the interconnection layer is excavated.
14. The image sensor according to claim 13 , wherein the adhesive layer is formed above the groove in a planar view.
15. The image sensor according to claim 13 , further comprising a passivation film formed in the groove.
16. The image sensor according to claim 13 , wherein the groove forms a pad opening portion, and wherein a passivation film covers an inner wall of the pad opening portion.
17. The image sensor according to claim 13 , wherein the groove includes a portion of the photodiode layer such that the portion of the photodiode layer is excavated.
18. The image sensor according to claim 13 , wherein the adhesive layer is further formed in the groove.
19. The image sensor according to claim 13 , wherein
the plurality of layers further includes a planarization film formed above the photodiode layer; and
the groove is formed such that a portion of the planarization film is excavated.
20. The image sensor according to claim 19 , wherein
the plurality of layers further includes a color filter layer formed above the planarization film; and
the groove is formed such that a portion of the color filter layer is excavated.