Resistive memory cell having a low forming voltage
Various embodiments of the present disclosure are directed towards a memory cell including a co-doped data storage structure. A bottom electrode overlies a substrate and a top electrode overlies the bottom electrode. The data storage structure is disposed between the top and bottom electrodes. The data storage structure comprises a dielectric material doped with a first dopant and a second dopant.
1. A memory device comprising:
a substrate;
a bottom electrode overlying the substrate;
a top electrode overlying the bottom electrode; and
a data storage structure disposed between the top and bottom electrodes, wherein the data storage structure comprises a dielectric material doped with a first dopant and a second dopant, wherein the dielectric material comprises a first atomic percentage of the first dopant and a second atomic percentage of the second dopant that is different than the first atomic percentage, and wherein the first atomic percentage is within a range of about 1 to 15 percent and the second atomic percentage is within a range of about 2 to 20 percent.
2. The memory device of claim 1 , further comprising:
a capping layer overlying the top electrode, wherein sidewalls of the capping layer are aligned with sidewalls of the top electrode.
3. The memory device of claim 1 , wherein the dielectric material is a high κ dielectric material.
4. The memory device of claim 1 , wherein the dielectric material is aluminum oxide, the first dopant is nitrogen, and the second dopant is tantalum.
5. The memory device of claim 1 , wherein the second atomic percentage is greater than the first atomic percentage.
6. The memory device of claim 1 , further comprising:
a sidewall spacer structure overlying the substrate, wherein the sidewall spacer structure laterally encloses sidewalls of the data storage structure and sidewalls of the top electrode.
7. The memory device of claim 6 , wherein the sidewall spacer structure comprises the first dopant.
8. The memory device of claim 1 , wherein the top electrode and/or the bottom electrode comprise the second dopant.
9. An integrated chip comprising:
a substrate;
a bottom electrode via overlying the substrate;
a top electrode via overlying the bottom electrode via;
a resistive random access memory (RRAM) cell disposed between the bottom electrode via and the top electrode via, wherein the RRAM cell comprises a top electrode, a bottom electrode, and a data storage structure disposed between the top and bottom electrodes, wherein the data storage structure comprises a co-doped high κ dielectric material;
a sidewall spacer structure overlying the bottom electrode via, wherein the sidewall spacer structure laterally encloses sidewalls of the data storage structure; and
a capping layer disposed between the top electrode and the top electrode via, wherein the sidewall spacer structure extends along a top surface of the capping layer.
10. The integrated chip of claim 9 , wherein a width of the data storage structure discretely decreases from a bottom surface of the data storage structure in a direction towards the top electrode via.
11. The integrated chip of claim 9 , wherein the top electrode comprises a first conductive material and the top electrode via comprises a second conductive material different than the first conductive material.
12. The integrated chip of claim 11 , wherein the co-doped high κ dielectric material comprises a first dopant and a second dopant, wherein the first conductive material comprises the first dopant or the second dopant.
13. The integrated chip of claim 9 , wherein the sidewall spacer structure continuously extends from a sidewall of the data storage structure to an upper surface of the data storage structure.
14. The integrated chip of claim 9 , wherein the data storage structure comprises a first pair of opposing sidewalls and a second pair of opposing sidewalls, wherein the first pair of opposing sidewalls are spaced laterally between the second pair of opposing sidewalls.
15. An integrated chip comprising:
a substrate; and
a memory cell overlying the substrate, wherein the memory cell comprises a top electrode, a bottom electrode, and a data storage structure disposed between the top and bottom electrodes, wherein the data storage structure comprises a dielectric material co-doped with a cation and an anion, wherein a first atomic percentage of the cation in the dielectric material is less than a second atomic percentage of the anion in the dielectric material.
16. The integrated chip of claim 15 , wherein the first atomic percentage is within a range of about 1 to 15 percent and the second atomic percentage is within a range of about 2 to 20 percent.
17. The integrated chip of claim 15 , wherein the dielectric material has a dielectric constant greater than 3.9.
18. The integrated chip of claim 15 , wherein a thickness of the dielectric material is within a range of about 20 to 80 angstroms.
19. The memory device of claim 1 , wherein a width of the data storage structure discretely increases from a top surface of the data storage structure in a direction towards the substrate.
20. The integrated chip of claim 9 , wherein the co-doped high κ dielectric material comprises a first dopant having a first atomic percentage and a second dopant having a second atomic percentage different from the first atomic percentage.