Radiation-sensitive resin composition, resist pattern-forming method, compound and method of generating acid
A radiation-sensitive resin composition contains: a polymer that includes a structural unit including an acid-labile group; and a radiation-sensitive acid generating agent. The radiation-sensitive acid generating agent includes a sulfonate anion and a radiation-sensitive cation. The sulfonate anion includes two or more rings, and an iodine atom and a monovalent group having 0 to 10 carbon atoms which includes at least one of an oxygen atom and a nitrogen atom bond to at least one of the two or more rings. The ring is preferably an aromatic ring. The radiation-sensitive acid generating agent is preferably a compound represented by formula (1). In the formula (1), A 1 represents a group obtained from a compound which includes a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring.
1. A radiation-sensitive resin composition comprising:
a polymer that comprises a structural unit comprising an acid-labile group; and
a radiation-sensitive acid generating agent,
wherein the radiation-sensitive acid generating agent is a compound represented by formula (1):
wherein, in the formula (1),
A 1 represents a group obtained from a compound which comprises a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring;
R 1 represents a monovalent group having 0 to 10 carbon atoms which comprises at least one of an oxygen atom and a nitrogen atom;
R 2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms, a monovalent halogenated hydrocarbon group having 1 to 20 carbon atoms or a halogen atom;
p is an integer of 1 to 10, q is an integer of 0 to 9 and r is an integer of 1 to 10, wherein (p+q+r) is no greater than 11;
R 3 represents a single bond, —O— or —COO—;
A 2 represents an organic group having a valency of (n+1) and having 3 to 30 carbon atoms that comprises a ring having 3 to 20 ring atoms;
n is an integer of 1 to 3, wherein
in a case in which there exist a plurality of R 1 s, the plurality of R 1 s are identical or different from each other,
in a case in which there exist a plurality of R 2 s, the plurality of R 2 s are identical or different from each other, and
in a case in which n is no less than 2, a plurality of A 1 s are identical or different from each other, a plurality of R 3 s are identical or different from each other, a plurality of p's are identical or different from each other, a plurality of q's are identical or different from each other, and a plurality of r's are identical or different from each other;
R 4 represents a fluorinated alkanediyl group having 1 to 10 carbon atoms; and
X + represents a monovalent radiation-sensitive onium cation.
2. The radiation-sensitive resin composition according to claim 1 , wherein the ring comprised in A 1 in the formula (1) is an aromatic ring having 6 to 20 ring atoms.
3. The radiation-sensitive resin composition according to claim 1 , wherein R 4 in the formula (1) is represented by formula (F):
wherein, in the formula (F),
R A and R B each independently represent a hydrogen atom or a fluorine atom;
R C and R D each independently represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 10 carbon atoms;
m is an integer of 0 to 3, wherein
in a case in which m is no less than 2, a plurality of R C s are identical or different from each other, a plurality of R D s are identical or different from each other, and at least one of R A , R B , one or a plurality of R C s and one or a plurality of R D s represents a fluorine atom or a perfluoroalkyl group; and
* denotes a site that bonds to a sulfur atom of —S(═O) 2 —O − in the formula (1).
4. The radiation-sensitive resin composition according to claim 1 , wherein R 1 in the formula (1) represents a hydroxy group, a hydroxyhydrocarbon group, a group comprising a lactone structure, an acyl group or a carbonyloxyhydrocarbon group.
5. The radiation-sensitive resin composition according to claim 1 , wherein the ring in A 2 in the formula (1) is an aromatic ring, an aliphatic ring, an aliphatic heterocyclic ring, an aromatic ring and an aliphatic ring, an aromatic ring and an aliphatic heterocyclic ring, or an aliphatic ring and an aliphatic heterocyclic ring.
6. The radiation-sensitive resin composition according to claim 1 , wherein the ring comprised in A 1 in the formula (1) is an aromatic ring.
7. A resist pattern-forming method comprising:
applying a radiation-sensitive resin composition directly or indirectly on a substrate to form a resist film;
exposing the resist film; and
developing the resist film exposed,
wherein the radiation-sensitive resin composition comprises:
a polymer that comprises a structural unit comprising an acid-labile group; and
a radiation-sensitive acid generating agent,
wherein the radiation-sensitive acid generating agent is a compound represented by formula (1):
wherein, in the formula (1),
A 1 represents a group obtained from a compound which comprises a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring;
R 1 represents a monovalent group having 0 to 10 carbon atoms which comprises at least one of an oxygen atom and a nitrogen atom;
R 2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms, a monovalent halogenated hydrocarbon group having 1 to 20 carbon atoms or a halogen atom;
p is an integer of 1 to 10, q is an integer of 0 to 9 and r is an integer of 1 to 10, wherein (p+q+r) is no greater than 11;
R 3 represents a single bond, —O— or —COO—;
A 2 represents an organic group having a valency of (n+1) and having 3 to 30 carbon atoms that comprises a ring having 3 to 20 ring atoms;
n is an integer of 1 to 3, wherein
in a case in which there exist a plurality of R 1 s, the plurality of R 1 s are identical or different from each other,
in a case in which there exist a plurality of R 2 s, the plurality of R 2 s are identical or different from each other, and
in a case in which n is no less than 2, a plurality of A 1 s are identical or different from each other, a plurality of R 3 s are identical or different from each other, a plurality of p's are identical or different from each other, a plurality of p's are identical or different from each other, and a plurality of r's are identical or different from each other;
R 4 represents a fluorinated alkanediyl group having 1 to 10 carbon atoms; and
X + represents a monovalent radiation-sensitive onium cation.
8. The resist pattern-forming method according to claim 7 , wherein the ring comprised in A 1 in the formula (1) is an aromatic ring having 6 to 20 ring atoms.
9. The resist pattern-forming method according to claim 7 , wherein R 4 in the formula (1) is represented by formula (F):
wherein, in the formula (F),
R A and R B each independently represent a hydrogen atom or a fluorine atom;
R C and R D each independently represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 10 carbon atoms;
m is an integer of 0 to 3, wherein
in a case in which m is no less than 2, a plurality of R C s are identical or different from each other, a plurality of R D s are identical or different from each other, and at least one of R A , R B , one or a plurality of R C s and one or a plurality of R D s represents a fluorine atom or a perfluoroalkyl group; and
* denotes a site that bonds to a sulfur atom of —S(═O) 2 —O − in the formula (1).
10. The resist pattern-forming method according to claim 7 , wherein R 1 in the formula (1) represents a hydroxy group, a hydroxyhydrocarbon group, a group comprising a lactone structure, an acyl group or a carbonyloxyhydrocarbon group.
11. The resist pattern-forming method according to claim 7 , wherein the ring in A 2 in the formula (1) is an aromatic ring, an aliphatic ring, an aliphatic heterocyclic ring, an aromatic ring and an aliphatic ring, an aromatic ring and an aliphatic heterocyclic ring, or an aliphatic ring and an aliphatic heterocyclic ring.
12. A compound represented by formula (1):
wherein, in the formula (1),
A 1 represents a group obtained from a compound which comprises a ring having 3 to 20 ring atoms by removing (p+q+r+1) hydrogen atoms on the ring;
R 1 represents a monovalent group having 0 to 10 carbon atoms which comprises at least one of an oxygen atom and a nitrogen atom;
R 2 represents a monovalent hydrocarbon group having 1 to 20 carbon atoms, a monovalent halogenated hydrocarbon group having 1 to 20 carbon atoms or a halogen atom;
p is an integer of 1 to 10, q is an integer of 0 to 9 and r is an integer of 1 to 10, wherein (p+q+r) is no greater than 11;
R 3 represents a single bond, —O— or —COO—;
A 2 represents an organic group having a valency of (n+1) and having 3 to 30 carbon atoms that comprises a ring having 3 to 20 ring atoms;
n is an integer of 1 to 3, wherein
in a case in which there exist a plurality R 1 s, the plurality R 1 s are identical or different from each other,
in a case in which there exist a plurality of R 2 s, the plurality of R 2 s are identical or different from each other, and
in a case in which n is no less than 2, a plurality of A 1 s are identical or different from each other, a plurality of R 3 s are identical or different from each other, a plurality of p's are identical or different from each other, a plurality of q's are identical or different from each other, and a plurality of r's are identical or different from each other;
R 4 represents a fluorinated alkanediyl group having 1 to 10 carbon atoms; and
X + represents a monovalent radiation-sensitive onium cation.
13. A method of generating an acid comprising
irradiating the compound according to claim 12 with a far ultraviolet ray, an extreme ultraviolet ray or an electron beam.