IP Library Granted Patent US 11,805,597
Granted Patent B2
US 11,805,597 · App. 16/817,176 · Granted Oct 31, 2023

Liquid metal circuits and methods of making the same

Inventors: O Burak Ozdoganlar (Sewickley, PA); Carmel Majidi (Pittsburgh, PA); Kadri Bugra Ozutemiz (Pittsburgh, PA); James Wissman (Hyattsville, MD)
Assignee: CARNEGIE MELLON UNIVERSITY
H05K1/0283H01L21/4846H01L23/4985H01Q1/364H05K3/1208H05K3/1216H05K3/1241H05K3/1258H05K3/388
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Quick Facts
Patent No.
US 11,805,597
App. No.
16/817,176
Granted
Oct 31, 2023
Kind
B2
Abstract

A high-throughput method of manufacturing a liquid metal circuit may include applying a liquid metal to an alloying metal pattern on an elastic substrate to form the liquid metal circuit. The elastic substrate may have a surface area greater than 1 square inch. The liquid metal circuit may include a plurality of liquid metal circuits on the elastic substrate. Methods of using the liquid metal circuit are also described.

Claims (36)

1. A high-throughput method of manufacturing a liquid metal circuit, the method comprising:

providing an alloying metal on a circuit pattern on a surface of an elastic substrate to form an alloying metal pattern on the elastic substrate;

submerging the elastic substrate having the alloying metal pattern into a liquid bath for a dwell time to alloy the liquid metal with the alloying metal pattern, wherein the liquid bath comprises a top layer of an oxide reducing agent and a bottom layer of a liquid metal in an oxide-free state, and wherein the alloying metal pattern contacts the oxide reducing agent before contacting the liquid metal; and

withdrawing the elastic substrate from the liquid bath at a removal speed to form the liquid metal circuit having the circuit pattern defined by the alloying metal pattern and a deposition height correlated with the removal speed,

wherein the liquid metal is not deposited on the elastic substrate at locations lacking the alloying metal pattern, and

wherein the liquid metal deposited on the alloying metal pattern contacts the reducing agent immediately prior to complete removal of the elastic substrate from the liquid bath.

2. The method of claim 1 , wherein providing the alloying metal comprises:

depositing the alloying metal on the circuit pattern on the surface of the elastic substrate.

3. The method of claim 1 comprising:

fabricating the circuit pattern from the alloying metal on the surface of the elastic substrate using photolithography, stencil printing, selective deposition, rolling, or contact printing.

4. The method of claim 1 comprising:

agitating the liquid bath when submerging the elastic substrate.

5. The method of claim 1 comprising:

positioning a microelectronic component proximate to the liquid metal circuit.

6. The method of claim 1 , wherein the removal speed is from 10 −1 to 10 3 mm/s.

7. The method of claim 1 , wherein the liquid metal circuit comprises:

a height up to 100 micrometers,

a width up to 500 micrometers, and

a height-to-width ratio from 0.1-100.

8. The method of claim 1 , wherein the liquid metal circuit has a height-to-width ratio from 0.1-100.

9. The method of claim 1 , wherein the liquid metal circuit has a height-to-width ratio from 0.1-1.

10. The method of claim 1 , wherein

the removal speed is from 10 −1 to 10 3 mm/s, and

the liquid metal circuit comprises a height up to 100 micrometers and a height-to-width ratio from 0.1-100.

11. The method of claim 1 , wherein the elastic substrate comprises a surface area greater than 1 square inch.

12. The method of claim 1 , wherein the elastic substrate comprises a plurality of the liquid metal circuits.

13. The method of claim 1 , wherein the alloying metal is copper, gold, platinum, palladium, tin, zinc, iridium, or any combinations thereof.

14. The method of claim 1 , wherein the liquid metal is gallium, indium, tin, or any combinations thereof.

15. The method of claim 1 , wherein the liquid metal is a gallium-indium alloy or a gallium-indium-tin alloy.

16. The method of claim 1 , wherein the reducing agent is potassium hydroxide, sodium hydroxide, hydrochloric acid, or any combinations thereof.

17. A high-throughput method of manufacturing a liquid metal circuit, the method comprising:

providing an alloying metal on a circuit pattern on a surface of an elastic substrate to form an alloying metal pattern on the elastic substrate, wherein the alloying metal is copper, gold, platinum, palladium, tin, zinc, iridium, or any combinations thereof;

submerging the elastic substrate having the alloying metal pattern into a liquid bath for a dwell time to alloy the liquid metal with the alloying metal pattern, wherein the liquid bath comprises a top layer of an oxide reducing agent and a bottom layer of a liquid metal in an oxide-free state, wherein the alloying metal pattern contacts the oxide reducing agent before contacting the liquid metal, wherein the reducing agent is potassium hydroxide, sodium hydroxide, hydrochloric acid, or any combinations thereof, and wherein the liquid metal is gallium, indium, tin, or any combinations thereof; and

withdrawing the elastic substrate from the liquid bath at a removal speed to form the liquid metal circuit having the circuit pattern defined by the alloying metal pattern and a deposition height correlated with the removal speed, wherein the removal speed is from 10 −1 to 10 3 mm/s, and the liquid metal circuit comprises a height up to 100 micrometers and a height-to-width ratio from 0.1-100,

wherein the liquid metal is not deposited on the elastic substrate at locations lacking the alloying metal pattern,

wherein the liquid metal deposited on the alloying metal pattern contacts the reducing agent immediately prior to complete removal of the elastic substrate from the liquid bath.

Assignments (2)
GOVERNMENT INTEREST AGREEMENT Recorded Jun 12, 2024
From: CARNEGIE-MELLON UNIVERSITY
To: THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
Reel/Frame 067705/0010 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 12, 2020
From: OZDOGANLAR, O BURAK; MAJIDI, CARMEL; OZUTEMIZ, KADRI BUGRA; WISSMAN, JAMES
To: CARNEGIE MELLON UNIVERSITY
Reel/Frame 052100/0956 →
Continuity (2)
Provisional Application 62919401 · Mar 12, 2019
Related Publication 20200296825A1 · Sep 17, 2020