IP Library Granted Patent US 11,476,308
Granted Patent B2
US 11,476,308 · App. 16/824,041 · Granted Oct 18, 2022

Method for manufacturing image display device and image display device

Inventor: Hajime Akimoto (Anan, JP)
Assignee: NICHIA CORPORATION
H01L27/3211H01L27/322H01L31/107H01L27/3241
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Quick Facts
Patent No.
US 11,476,308
App. No.
16/824,041
Granted
Oct 18, 2022
Kind
B2
Abstract

A method for manufacturing an image display device includes: preparing a substrate, the substrate comprising a semiconductor layer, the semiconductor layer comprising a light emitting layer, the semiconductor layer being formed on a first substrate; bonding the semiconductor layer to a second substrate, the second substrate comprising a circuit that comprises a circuit element; forming a light emitting element by etching the semiconductor layer; forming an insulating film covering the light emitting element; forming a via reaching the circuit through the insulating film; and electrically connecting the light emitting element and the circuit element through the via, the via connecting the light emitting element and the circuit element provided in different layers.

Claims (19)

1. A method for manufacturing an image display device, the method comprising:

preparing a substrate, the substrate comprising a semiconductor layer, the semiconductor layer comprising a light emitting layer, the semiconductor layer being formed on a first substrate;

removing the first substrate;

after removing the first substrate, bonding the semiconductor layer to a second substrate, the second substrate comprising a circuit that comprises a circuit element;

forming a light emitting element by etching the semiconductor layer;

forming an insulating film covering the light emitting element;

forming a via reaching the circuit through the insulating film; and

electrically connecting the light emitting element and the circuit element through the via, the via connecting the light emitting element and the circuit element provided in different layers.

2. The method according to claim 1 , further comprising:

exposing a surface of the light emitting element.

3. The method according to claim 2 , further comprising:

forming a transparent electrode on the exposed surface of the light emitting element.

4. The method according to claim 1 , wherein the semiconductor layer is grown on a buffer layer formed on the first substrate.

5. The method according to claim 4 , wherein the buffer layer comprises a nitride.

6. The method according to claim 1 , wherein the first substrate comprises silicon or sapphire.

7. The method according to claim 1 , wherein:

the semiconductor layer comprises a gallium nitride-based compound semiconductor, and the second substrate comprises silicon.

8. The method according to claim 1 , further comprising:

forming a wavelength conversion member on the light emitting element.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 19, 2020
From: AKIMOTO, HAJIME
To: NICHIA CORPORATION
Reel/Frame 052169/0517 →
Priority Claims (1)
JP JP2019-055382 · Mar 22, 2019 · national
Continuity (1)
Related Publication 20200303471A1 · Sep 24, 2020
Cited By (1)
US 12,260,800