High purity SiOC and SiC, methods compositions and applications
Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
1. A method of making an article comprising ultra pure silicon carbide, the method comprising:
a. combining a first liquid comprising silicon, carbon and oxygen with a second liquid comprising carbon;
b. curing the combination of the first and second liquids to provide a cured SiOC solid material, consisting essentially of silicon, carbon and oxygen;
c. heating the SiOC solid material in an inert atmosphere and at a temperature sufficient to convert SiOC to SiC, thereby converting the SiOC solid material to an ultra pure polymer derived SiC having a purity of at least 99.999%; and,
d. forming a single crystal SiC structure, comprising a polytype selected from the group consisting of 4H SiC, 6H SiC and 3C SiC, by vapor deposition of the ultra pure polymer derived SiC; wherein the vapor deposed structure is defect free and has a purity of at least 99.9999%.
2. The method of claim 1 , wherein the single crystal SiC structure consists essentially of 4H SiC.
3. The method of claim 1 , wherein the single crystal SiC structure consists essentially of 6H SiC.
4. The method of claim 1 , wherein the single crystal SiC structure consists of 4H SiC.
5. The method of claim 1 , wherein the single crystal SiC structure consists of 6H SiC.
6. The method of claim 1 , wherein the combination of the first and the second liquids is a polysilocarb precursor formulation having a molar ratio of about 30% to 85% carbon, about 5% to 40% oxygen, and about 5% to 35% silicon.
7. The method of claim 1 , wherein the single crystal SiC structure is a boule.
8. The method of claim 1 , wherein the single crystal SiC is a layer.
9. The method of claim 1 , wherein the single crystal SiC structure is a layer on a substrate.
10. The method of claim 1 , wherein the single crystal SiC structure is a layer on a substrate, wherein the substrate is comprised of Si.
11. The method of claim 1 , wherein the single crystal SiC structure is a layer on a substrate, wherein the substrate is comprised of SiC.
12. The methods of claim 1 , wherein the single crystal SiC is sectioned and thereby manufactured into a wafer.
13. The method of claim 1 , wherein the single crystal SiC is sectioned and etched and thereby manufactured into a semiconductor.
14. A method of making a SiC, the method comprising:
a. placing polymer derived SiC particles in a vapor deposition apparatus, wherein the SiC particles have a purity of at least 99.999%, and wherein the SiC particles have the ability to resist, and do not form an oxide layer when exposed to air under standard temperatures and pressures, whereby the SiC particles are free from an oxide layer; and,
b. directly vaporizing the SiC particles and depositing the vapors on a target to form a SiC crystal, comprising a polytype selected from the group consisting of 4H SiC and 6H SiC; wherein the vaporization occurs without the need for a preheating step of the SiC particles.
15. The method of claim 14 , wherein the single crystal SiC structure consists essentially of 4H SiC.
16. The method of claim 14 , wherein the single crystal SiC structure consists essentially of 6H SiC.
17. The method of claim 14 , wherein the single crystal SiC structure consists of 4H SiC.
18. The method of claim 14 , wherein the single crystal SiC structure consists of 6H SiC.
19. The method of claim 14 , wherein the SiC crystal is a boule.
20. The method of claim 14 , wherein the target is a substrate.
21. The method of claim 20 , wherein the substrate is comprised of Si.
22. The method of claim 20 , wherein the substrate is comprised of SiC.
23. The method of claim 14 , wherein the SiC crystal is sectioned and thereby manufactured into a wafer.
24. The method of claim 14 , wherein the SiC crystal is a boule and is essentially free from micropipes.