IP Library Granted Patent US 11,187,764
Granted Patent B2
US 11,187,764 · App. 16/825,368 · Granted Nov 30, 2021

Layout of magnetoresistance element

Inventors: Rémy Lassalle-Balier (Bures sur Yvette, FR); Amal Hamdache (Limours, FR); Julien Voillot (Chilly Mazarin, FR); Paolo Campiglio (Arcueil, FR)
Assignee: Allegro MicroSystems, LLC
G01R33/098G01D5/16G01R15/205G01V3/08
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Quick Facts
Patent No.
US 11,187,764
App. No.
16/825,368
Granted
Nov 30, 2021
Kind
B2
Abstract

In one aspect, a bridge includes a first magnetoresistance element that includes a first set of pillars, a second magnetoresistance element that includes a second set of pillars, a third magnetoresistance element that includes a third set of pillars and a fourth magnetoresistance element that includes a fourth set of pillars. The first set of pillars and the fourth set of pillars are disposed in a first matrix and the second set of pillars and the third set of pillars are disposed in a second matrix. The second magnetoresistance element is in series with the first magnetoresistance element, the third magnetoresistance element is in parallel with the first magnetoresistance element and the fourth magnetoresistance element is in series with the third magnetoresistance element.

Claims (37)

1. A bridge comprising:

a first magnetoresistance element comprising a first set of pillars;

a second magnetoresistance element comprising a second set of pillars, the second magnetoresistance element being in series with the first magnetoresistance element;

a third magnetoresistance element comprising a third set of pillars, the third magnetoresistance element being in parallel with the first magnetoresistance element; and

a fourth magnetoresistance element comprising a fourth set of pillars, the fourth magnetoresistance element being in series with the third magnetoresistance element,

wherein the first set of pillars and the fourth set of pillars are disposed in a first matrix and the second set of pillars and the third set of pillars are disposed in a second matrix.

2. The bridge of claim 1 , wherein the first matrix comprises one or more columns comprising pillars from the first set of pillars adjacent to one or more columns comprising pillars from the fourth set of pillars.

3. The bridge of claim 2 , wherein the second matrix comprises one or more columns comprising pillars from the second set of pillars adjacent to one or more columns comprising pillars from the third set of pillars.

4. The bridge of claim 1 , wherein the first matrix comprises columns alternating between a column comprising pillars from the first set of pillars and a column comprising pillars from the fourth set of pillars.

5. The bridge of claim 4 , wherein the second matrix comprises columns alternating between a column comprising pillars from the second set of pillars and a column comprising pillars from the third set of pillars.

6. The bridge of claim 1 , wherein the first matrix has the first set of pillars and the fourth set of pillars diagonally interleaved.

7. The bridge of claim 6 , wherein the second matrix has the second set of pillars and the third set of pillars diagonally interleaved.

8. The bridge of claim 1 , wherein the first matrix has submatrices comprising pillars from the first set of pillars interleaved with submatrices comprising pillars from the fourth set of pillars.

9. The bridge of claim 8 , wherein the second matrix has submatrices of pillars from the second set of pillars interleaved with submatrices of pillars from the third set of pillars.

10. The bridge of claim 1 , wherein the first, second, third type and fourth magnetoresistance elements are tunnel magnetoresistance (TMR) elements.

11. The bridge of claim 10 , wherein the first magnetoresistance element has the reference direction as the fourth magnetoresistance element.

12. The bridge of claim 1 , wherein the first set of pillars are connected in series.

13. The bridge of claim 1 , wherein the first set of pillars are connected in parallel.

14. The bridge of claim 1 , wherein the first set of pillars comprises pillars connected in series and pillars connected in parallel.

15. The bridge of claim 1 , wherein the first matrix and the second matrix are separated by at least 10 microns,

wherein each pillar within the first or second matrix is separated from a nearest pillar by about one to two microns.

16. A magnetic-field sensor comprising:

a bridge comprising:

a first magnetoresistance element comprising a first set of pillars;

a second magnetoresistance element comprising a second set of pillars, the second magnetoresistance element being in series with the first magnetoresistance element;

a third magnetoresistance element comprising a third set of pillars, the third magnetoresistance element being in parallel with the first magnetoresistance element; and

a fourth magnetoresistance element comprising a fourth set of pillars, the fourth magnetoresistance element being in series with the third magnetoresistance element,

wherein the first set of pillars and the fourth set of pillars are disposed in a first matrix and the second set of pillars and the third set of pillars are disposed in a second matrix.

17. The magnetic-field sensor of claim 16 , wherein the first matrix comprises one or more columns comprising pillars from the first set of pillars adjacent to one or more columns comprising pillars from the fourth set of pillars,

wherein the second matrix comprises one or more columns comprising pillars from the second set of pillars adjacent to one or more columns comprising pillars from the third set of pillars.

18. The magnetic-field sensor of claim 16 , wherein the first matrix comprises columns alternating between a column comprising pillars from the first set of pillars and a column comprising pillars from the fourth set of pillars,

wherein the second matrix comprises columns alternating between a column comprising pillars from the second set of pillars and a column comprising pillars from the third set of pillars.

19. The magnetic-field sensor of claim 16 , wherein the first matrix has the first set of pillars and the fourth set of pillars diagonally interleaved,

wherein the second matrix has the second set of pillars and the third set of pillars diagonally interleaved.

20. The magnetic-field sensor of claim 16 , wherein the first matrix has submatrices comprising pillars from the first set of pillars interleaved with submatrices comprising pillars from the fourth set of pillars,

wherein the second matrix has submatrices of pillars from the second set of pillars interleaved with submatrices of pillars from the third set of pillars.

21. The magnetic-field sensor of claim 16 , wherein the magnetic-field sensor is an angle sensor.

Assignments (6)
RELEASE OF SECURITY INTEREST IN PATENTS AT REEL 053957/FRAME 0874 Recorded Nov 1, 2023
From: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH, AS COLLATERAL AGENT
To: ALLEGRO MICROSYSTEMS, LLC
Reel/Frame 065420/0572 →
RELEASE OF SECURITY INTEREST IN PATENTS (R/F 053957/0620) Recorded Jun 22, 2023
From: MIZUHO BANK, LTD., AS COLLATERAL AGENT
To: ALLEGRO MICROSYSTEMS, LLC
Reel/Frame 064068/0360 →
PATENT SECURITY AGREEMENT Recorded Jun 22, 2023
From: ALLEGRO MICROSYSTEMS, LLC
To: MORGAN STANLEY SENIOR FUNDING, INC., AS THE COLLATERAL AGENT
Reel/Frame 064068/0459 →
PATENT SECURITY AGREEMENT Recorded Oct 1, 2020
From: ALLEGRO MICROSYSTEMS, LLC
To: MIZUHO BANK LTD., AS COLLATERAL AGENT
Reel/Frame 053957/0620 →
PATENT SECURITY AGREEMENT Recorded Oct 1, 2020
From: ALLEGRO MICROSYSTEMS, LLC
To: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH, AS COLLATERAL AGENT
Reel/Frame 053957/0874 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 23, 2020
From: LASSALLE-BALIER, RÉMY; HAMDACHE, AMAL; VOILLOT, JULIEN; CAMPIGLIO, PAOLO; ALLEGRO MICROSYSTEMS FRANCE SAS; ALLEGRO MICROSYSTEMS EUROPE LIMITED; CRIVASENSE TECHNOLOGIES SAS
To: ALLEGRO MICROSYSTEMS, LLC
Reel/Frame 052193/0123 →
Continuity (1)
Related Publication 20210293911A1 · Sep 23, 2021
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