IP Library › Granted Patent US 12,248,039
Granted Patent B2
US 12,248,039 · App. 18/366,737 · Granted Mar 11, 2025

Interleaving sub-arrays of magnetoresistance elements based on reference directions to compensate for bridge offset

Inventors: Paolo Campiglio (Arcueil, FR); Noémie Belin (Villejuif, FR); Pierrick Charlier (Palaiseau, FR)
Assignee: Allegro MicroSystems, LLC
G01R33/098
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Quick Facts
Patent No.
US 12,248,039
App. No.
18/366,737
Granted
Mar 11, 2025
Kind
B2
Abstract

In one aspect, a bridge includes at least eight sets of sub-arrays. Each one of the at least eight sets of sub-arrays forms a corresponding one magnetoresistance element. Each one of the at least eight sets of sub-arrays has a reference direction. The at least eight sets of sub-arrays are arranged in a matrix on a die. A reference direction of each one of the at least eight sets of sub-arrays is different from a reference direction of at least one other of the at least eight sets of sub-arrays.

Claims (61)

1. A bridge comprising:

a first set of sub-arrays forming a first magnetoresistance element, each sub-array of the first set having a first reference direction;

a second set of sub-arrays forming a second magnetoresistance element, each sub-array of the second set having a second reference direction different from the first reference direction;

a third set of sub-arrays forming a third magnetoresistance element, each sub-array of the third set having a third reference direction;

a fourth set of sub-arrays forming a fourth magnetoresistance element, each sub-array of the fourth set having a fourth reference direction different from the third reference direction;

a fifth set of sub-arrays forming a fifth magnetoresistance element, each sub-array of the fifth set having a fifth reference direction;

a sixth set of sub-arrays forming a sixth magnetoresistance element, each sub-array of the sixth set having a sixth reference direction different from the fifth reference direction;

a seventh set of sub-arrays forming a seventh magnetoresistance element, each sub-array of the seventh set having a seventh reference direction; and

an eighth set of sub-arrays forming an eighth magnetoresistance element, each sub-array of the eighth set having an eighth reference direction different from the seventh reference direction,

wherein the first, the second, the third, the fourth, the fifth, the sixth, the seventh and the eighth sets of sub-arrays are arranged in a matrix on a die.

2. The bridge of claim 1 , wherein each sub-array in a row of the matrix is different from other sub-arrays in the row.

3. The bridge of claim 2 , wherein each sub-array in a column of the matrix is different from other sub-arrays in the column.

4. The bridge of claim 1 , wherein each sub-array in a column of the matrix is different from other sub-arrays in the column.

5. The bridge of claim 1 , further comprising:

a first plurality of magnetoresistance elements comprising the first and the second magnetoresistance elements;

a second plurality of magnetoresistance elements comprising the third and the fourth magnetoresistance elements;

a third plurality of magnetoresistance elements comprising the fifth and the sixth magnetoresistance elements; and

a fourth plurality of magnetoresistance elements comprising the seventh and the eighth magnetoresistance elements,

wherein each row of the matrix or each column of the matrix includes a sub-array from each of the first plurality, the second plurality, the third plurality and the fourth plurality of magnetoresistance elements.

6. The bridge of claim 5 , wherein each row of the matrix and each column of the matrix includes a sub-array from each of the first plurality, the second plurality, the third plurality and the fourth plurality of magnetoresistance elements.

7. The bridge of claim 1 , wherein the first magnetoresistance element, the second magnetoresistance element, the third magnetoresistance element, the fourth magnetoresistance element, the fifth magnetoresistance element, the sixth magnetoresistance element, the seventh magnetoresistance element and/or the eighth magnetoresistance element is a tunnel magnetoresistance (TMR) element.

8. The bridge of claim 1 , wherein the matrix includes interleaving of sub-arrays from different magnetoresistance elements having the same reference direction.

9. The bridge of claim 1 , wherein the sub-arrays placed in the matrix are placed in a chessboard arrangement in the matrix.

10. The bridge of claim 1 , wherein the bridge is a magnetic gradiometer, a gradient compensation bridge or a magnetometer.

11. The bridge of claim 1 , wherein the first, the second, the seventh and the eighth magnetoresistance elements are connected in series electrically,

wherein the first, the second, the seventh and the eighth magnetoresistance elements are connected in parallel electrically with the third, the fourth, the fifth and the sixth magnetoresistance elements.

12. A magnetic field sensor comprising:

a bridge comprising:

a first set of sub-arrays forming a first magnetoresistance element, each sub-array of the first set having a first reference direction;

a second set of sub-arrays forming a second magnetoresistance element, each sub-array of the second set having a second reference direction different from the first reference direction;

a third set of sub-arrays forming a third magnetoresistance element, each sub-array of the third set having a third reference direction;

a fourth set of sub-arrays forming a fourth magnetoresistance element, each sub-array of the fourth set having a fourth reference direction different from the third reference direction;

a fifth set of sub-arrays forming a fifth magnetoresistance element, each sub-array of the fifth set having a fifth reference direction;

a sixth set of sub-arrays forming a sixth magnetoresistance element, each sub-array of the sixth set having a sixth reference direction different from the fifth reference direction;

a seventh set of sub-arrays forming a seventh magnetoresistance element, each sub-array of the seventh set having a seventh reference direction; and

an eighth set of sub-arrays forming an eighth magnetoresistance element, each sub-array of the eighth set having an eighth reference direction different from the seventh reference direction,

wherein the first, the second, the third, the fourth, the fifth, the sixth, the seventh and the eighth sets of sub-arrays are arranged in a matrix on a die.

13. The magnetic field sensor of claim 12 , wherein each sub-array in a row of the matrix is different from other sub-arrays in the row.

14. The magnetic field sensor of claim 13 , wherein each sub-array in a column of the matrix is different from other sub-arrays in the column.

15. The magnetic field sensor of claim 12 , wherein each sub-array in a column of the matrix is different from other sub-arrays in the column.

16. The magnetic field sensor of claim 12 , further comprising:

a first plurality of magnetoresistance elements comprising the first and the second magnetoresistance elements;

a second plurality of magnetoresistance elements comprising the third and the fourth magnetoresistance elements;

a third plurality of magnetoresistance elements comprising the fifth and the sixth magnetoresistance elements; and

a fourth plurality of magnetoresistance elements comprising the seventh and the eighth magnetoresistance elements,

wherein each row of the matrix or each column of the matrix includes a sub-array from each of the first plurality, the second plurality, the third plurality and the fourth plurality of magnetoresistance elements.

17. The magnetic field sensor of claim 16 , wherein each row of the matrix and each column of the matrix includes a sub-array from each of the first plurality, the second plurality, the third plurality and the fourth plurality of magnetoresistance elements.

18. The magnetic field sensor of claim 12 , wherein the first magnetoresistance element, the second magnetoresistance element, the third magnetoresistance element, the fourth magnetoresistance element, the fifth magnetoresistance element, the sixth magnetoresistance element, the seventh magnetoresistance element and/or the eighth magnetoresistance element is a tunnel magnetoresistance (TMR) element.

19. The magnetic field sensor of claim 12 , wherein the matrix includes interleaving of sub-arrays from different magnetoresistance elements having the same reference direction.

20. The magnetic field sensor of claim 12 , wherein the sub-arrays placed in the matrix are placed in a chessboard arrangement in the matrix.

21. The magnetic field sensor of claim 12 , wherein the bridge is a magnetic gradiometer, a gradient compensation bridge or a magnetometer.

22. The magnetic field sensor of claim 12 , wherein the first, the second, the seventh and the eighth magnetoresistance elements are connected in series electrically,

wherein the first, the second, the seventh and the eighth magnetoresistance elements are connected in parallel electrically with the third, the fourth, the fifth and the sixth magnetoresistance elements.

23. A bridge, comprising:

at least eight sets of sub-arrays, each of the at least eight sets of sub-arrays forming a corresponding one magnetoresistance element, each of the at least eight sets of sub-arrays having a reference direction,

wherein the at least eight sets of sub-arrays are arranged in a matrix on a die, and

wherein a reference direction of each one of the at least eight sets of sub-arrays is different from a reference direction of at least one other of the at least eight sets of sub-arrays.

24. The bridge of claim 23 , wherein the matrix includes interleaving of sub-arrays from different magnetoresistance elements having the same reference direction.

25. The bridge of claim 23 , wherein each sub-array in a row of the matrix is different from other sub-arrays in the row.

26. The bridge of claim 23 , wherein each sub-array in a column of the matrix is different from other sub-arrays in the column.

27. The bridge of claim 23 , wherein the corresponding one magnetoresistance element is a tunnel magnetoresistance (TMR) element.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2023
From: CAMPIGLIO, PAOLO; BELIN, NOÉMIE; CHARLIER, PIERRICK; ALLEGRO MICROSYSTEMS FRANCE SAS; ALLEGRO MICROSYSTEMS EUROPE LIMITED; CRIVASENSE TECHNOLOGIES SAS
To: ALLEGRO MICROSYSTEMS, LLC
Reel/Frame 064517/0934 →
Continuity (1)
Related Publication 20250052838A1 · Feb 13, 2025
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