Forksheet transistor architectures
Embodiments disclosed herein include a semiconductor device. In an embodiment, the semiconductor device comprises a first transistor strata. The first transistor strata comprises a first backbone, a first transistor adjacent to a first edge of the first backbone, and a second transistor adjacent to a second edge of the first backbone. In an embodiment, the semiconductor device further comprises a second transistor strata over the first transistor strata. The second transistor strata comprises a second backbone, a third transistor adjacent to a first edge of the second backbone, and a fourth transistor adjacent to a second edge of the second backbone.
1. A semiconductor device, comprising:
a first transistor strata, wherein the first transistor strata comprises:
a first backbone;
a first transistor adjacent to a first edge of the first backbone; and
a second transistor adjacent to a second edge of the first backbone; and
a second transistor strata over the first transistor strata, wherein the second transistor strata comprises:
a second backbone, the second backbone separate and distinct from the first backbone, and the second backbone at least partially vertically overlapping with the first backbone;
a third transistor adjacent to a first edge of the second backbone; and
a fourth transistor adjacent to a second edge of the second backbone.
2. The semiconductor device of claim 1 , wherein individual ones of the first transistor, the second transistor, the third transistor, and the fourth transistor comprise:
a source;
a drain;
a semiconductor channel between the source and the drain;
a gate dielectric surrounding portions of the semiconductor channel; and
a gate electrode over the gate dielectric.
3. The semiconductor device of claim 2 , wherein a surface of the semiconductor channel directly contacts the first backbone or the second backbone.
4. The semiconductor device of claim 2 , wherein the semiconductor channel comprises a plurality of semiconductor channels in a vertical stack between the source and the drain.
5. The semiconductor device of claim 1 , wherein the first edge of the first backbone is offset from the first edge of the second backbone.
6. The semiconductor device of claim 1 , wherein the first edge of the first backbone is aligned with the first edge of the second backbone.
7. The semiconductor device of claim 6 , wherein the first backbone is connected to the second backbone.
8. The semiconductor device of claim 1 , wherein the first transistor and the second transistor are P-type transistors, and wherein the third transistor and the fourth transistor are N-type transistors.
9. The semiconductor device of claim 1 , wherein the first transistor and the third transistor are P-type transistors, and wherein the second transistor and the fourth transistor are N-type transistors.
10. The semiconductor device of claim 1 , further comprising:
an insulating layer between the first transistor strata and the second transistor strata.
11. The semiconductor device of claim 10 , further comprising:
an interconnect through the insulating layer to electrically couple a gate electrode of the first transistor to a gate electrode of the third transistor.
12. The semiconductor device of claim 10 , further comprising:
an interconnect through the insulating layer to electrically couple a source or a drain of the first transistor to a source or a drain of the third transistor.
13. The semiconductor device of claim 12 , wherein the interconnect extends through the source or the drain of the third transistor.
14. The semiconductor device of claim 13 , wherein the interconnect passes into the source or the drain of the first transistor.
15. The semiconductor device of claim 12 , wherein the interconnect contacts a perimeter of the source or the drain of the third transistor, and wherein the interconnect contacts a perimeter of the source or drain of the first transistor.
16. The semiconductor device of claim 1 , further comprising:
a contact below the first transistor strata, wherein the contact is separated from the first transistor strata by an insulating layer; and
an interconnect through the insulating layer, wherein the interconnect electrically couples the contact to the first transistor.
17. The semiconductor device of claim 16 , wherein the interconnect electrically couples the contact to a source or a drain of the first transistor.
18. The semiconductor device of claim 16 , wherein the interconnect electrically couples the contact to a gate electrode of the first transistor.
19. A semiconductor device, comprising:
a backbone having a first edge and a second edge, wherein the backbone is an insulative material, and a liner is over a portion of the first edge of the backbone and over a portion of the second edge of the backbone;
a first transistor adjacent to the first edge of the backbone; and
a second transistor adjacent to the second edge of the backbone, wherein individual ones of the first transistor and the second transistor comprise:
a source;
a drain;
a semiconductor channel between the source and the drain, wherein an edge of the semiconductor channel closest to the backbone is spaced away from the first edge of the backbone or the second edge of the backbone;
a gate dielectric completely surrounding a perimeter of the semiconductor channel; and
a gate electrode completely surrounding the gate dielectric.
20. The semiconductor device of claim 19 , wherein the edge of the semiconductor channel closest to the backbone is spaced away from the first edge of backbone or the second edge of the backbone by approximately 6 nm or less.
21. An electronic system, comprising:
a board;
an electronic package connected to the board; and
a die electrically coupled to the electronic package, wherein the die comprises:
a backbone having a first edge and a second edge, wherein the backbone is an insulative material, and a liner is over a portion of the first edge of the backbone and over a portion of the second edge of the backbone;
a first transistor adjacent to the first edge of the backbone;
a second transistor adjacent to the second edge of the backbone; and
an interconnect to electrically couple the first transistor to the second transistor, wherein the interconnect passes through the backbone.
22. The electronic system of claim 21 , wherein individual ones of the first transistor and the second transistor comprise:
a source;
a drain;
a semiconductor channel between the source and the drain;
a gate dielectric surrounding at least a portion of a perimeter of the semiconductor channel; and
a gate electrode over the gate dielectric.
23. The electronic system of claim 22 , wherein the gate dielectric completely surrounds a perimeter of the semiconductor channel.
24. A semiconductor device, comprising:
a backbone having a first edge and a second edge, wherein the backbone is an insulative material;
a liner below the backbone, wherein the liner is a material that has an etch selectivity to a material of the backbone;
a first transistor adjacent to the first edge of the backbone; and
a second transistor adjacent to the second edge of the backbone, wherein individual ones of the first transistor and the second transistor comprise:
a source;
a drain;
a semiconductor channel between the source and the drain, wherein an edge of the semiconductor channel closest to the backbone is spaced away from the first edge of the backbone or the second edge of the backbone;
a gate dielectric completely surrounding a perimeter of the semiconductor channel; and
a gate electrode completely surrounding the gate dielectric.