Granted Patent B1

US 10,741,364 · App. 16/839,424 · Granted Aug 11, 2020

Inventors: Tomislav Lozic (Gilbert, AZ); Imran Bhutta (Moorestown, NJ); Ronald Decker (Turnersville, NJ); Bala Kandampalayam (Lansdale, PA)

Assignee: RENO TECHNOLOGIES, INC.

H01J37/32183H01L21/02274H01L21/28556H01L21/31116H01L21/31138H01L21/32136H01L21/67069H03H7/38H01J2237/332H01J2237/334

Abstract

Claims (86)

1. A matching network comprising:

an RF input configured to operably couple to an RF source;

an RF output configured to operably couple to a plasma chamber;

at least one electronically variable capacitor (EVC) configured to carry out a matching activity of altering its capacitance to provide match configurations; and

a control circuit configured to carry out the operations of:

receiving parameter signals, each parameter signal indicative of at least one changing value of a parameter related to the plasma chamber or the matching network;

for each of the parameter signals, determining a corresponding parameter value based on the parameter signal;

for each parameter value:

determining whether the parameter value is relevant to the matching activity; and

determining whether the parameter value is relevant to a second activity of the matching network different from the matching activity;

carrying out the matching activity based on the parameter values determined to be relevant to the matching activity; and

carrying out the second activity based on the parameter values determined to be relevant to the second activity.

2. The matching network of claim 1 wherein the parameter values relevant to the matching activity do not include parameter values whose corresponding parameter signals were output outside a predetermined time interval.

3. The matching network of claim 1 wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber, or is providing information to a user interface.

4. The matching network of claim 1 wherein the parameter signals are output by at least one sensor, and wherein the parameter signals are indicative of the corresponding parameter value of at least one of a voltage, a current, a phase, or a temperature.

5. The matching network of claim 1 wherein the parameter values comprise voltage values at the RF input, wherein the voltage values relevant to the matching activity are also relevant to the second activity.

6. The matching network of claim 1 wherein the parameter signal is a pulse information signal from the RF generator or from a semiconductor processing tool, the matching network forming part of the semiconductor processing tool.

7. The matching network of claim 1 wherein the control circuit is further configured to:

identify whether each parameter value is relevant to a third activity, the third activity being different from the matching activity and the second activity; and

carry out the third activity based on the parameter values determined to be relevant to the third activity.

8. The matching network of claim 1 :

wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber; and

wherein the parameter values relevant to the protective action comprise temperature values that are not relevant to the matching activity.

9. The matching network of claim 1 :

wherein the RF input is configured to receive at least two non-zero pulse levels from the RF source;

wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber; and

wherein the parameter values relevant to the protective action comprise at least one of:

parameter values whose corresponding parameter signals were output immediately after a change between the at least two pulse levels;

parameter values whose corresponding parameter signals were output during an altering of the at least one EVC; or

parameter values whose corresponding parameter signals were output outside a predetermined time interval.

10. A semiconductor processing tool comprising:

a plasma chamber configured to deposit a material onto a substrate or etch a material from a substrate; and

an impedance matching network operably coupled to the plasma chamber, the matching network comprising:

an RF input configured to operably couple to an RF source;

an RF output configured to operably couple to the plasma chamber;

at least one electronically variable capacitor (EVC) configured to carry out a matching activity of altering its capacitance to provide match configurations; and

a control circuit configured to carry out the operations of:

receiving parameter signals, each parameter signal indicative of at least one changing value of a parameter related to the plasma chamber or the matching network;

for each of the parameter signals, determining a corresponding parameter value based on the parameter signal;

for each parameter value:

determining whether the parameter value is relevant to the matching activity; and

determining whether the parameter value is relevant to a second activity of the matching network different from the matching activity;

carrying out the matching activity based on the parameter values determined to be relevant to the matching activity; and

carrying out the second activity based on the parameter values determined to be relevant to the second activity.

11. A method comprising:

positioning a matching network between a radio frequency (RF) source and a plasma chamber, wherein the matching network comprises:

an RF input configured to operably couple to an RF source;

an RF output configured to operably couple to a plasma chamber; and

at least one electronically variable capacitor (EVC) configured to carry out a matching activity of altering its capacitance to provide match configurations;

receiving, at the matching network, parameter signals, each parameter signal indicative of at least one changing value of a parameter related to the plasma chamber or the matching network;

for each of the parameter signals, determining a corresponding parameter value based on the parameter signal;

for each parameter value:

determining whether the parameter value is relevant to the matching activity; and

determining whether the parameter value is relevant to a second activity of the matching network different from the matching activity;

carrying out the matching activity based on the parameter values determined to be relevant to the matching activity; and

carrying out the second activity based on the parameter values determined to be relevant to the second activity.

12. The method of claim 11 wherein the parameter values relevant to the matching activity do not include parameter values whose corresponding parameter signals were output outside a predetermined time interval.

13. The method of claim 11 wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber, or is providing information to a user interface.

14. The method of claim 11 wherein the parameter signals are output by at least one sensor, and wherein the parameter signals are indicative of the corresponding parameter value of at least one of a voltage, a current, a phase, or a temperature.

15. The method of claim 11 wherein the parameter values comprise voltage values at the RF input, wherein the voltage values relevant to the matching activity are also relevant to the second activity.

16. The method of claim 11 wherein the parameter signal is a pulse information signal from the RF generator or from a semiconductor processing tool, the matching network forming part of the semiconductor processing tool.

17. The method of claim 11 further comprising:

identifying whether each parameter value is relevant to a third activity, the third activity being different from the matching activity and the second activity; and

carrying out the third activity based on the parameter values determined to be relevant to the third activity.

18. The method of claim 11 :

wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber; and

wherein the parameter values relevant to the protective action comprise temperature values that are not relevant to the matching activity.

19. The method of claim 11 :

wherein the RF input is configured to receive at least two non-zero pulse levels from the RF source;

wherein the second activity is protective action on behalf of the matching network, the RF source, or the plasma chamber; and

wherein the parameter values relevant to the protective action comprise at least one of:

parameter values whose corresponding parameter signals were output immediately after a change between the at least two pulse levels;

parameter values whose corresponding parameter signals were output during an altering of the at least one EVC; or

parameter values whose corresponding parameter signals were output outside a predetermined time interval.

20. A method of manufacturing a semiconductor, the method comprising:

placing a substrate in a plasma chamber configured to deposit a material layer onto the substrate or etch a material layer from the substrate;

coupling an impedance matching network between an RF source and the plasma chamber, wherein the impedance matching network comprises:

at least one electronically variable capacitor (EVC) configured to carry out a matching activity of altering its capacitance to provide match configurations; and

a control circuit configured to carry out the operations of:

receiving parameter signals, each parameter signal indicative of at least one changing value of a parameter related to the plasma chamber or the matching network;

for each of the parameter signals, determining a corresponding parameter value based on the parameter signal;

for each parameter value:

determining whether the parameter value is relevant to the matching activity; and

determining whether the parameter value is relevant to a second activity of the matching network different from the matching activity;

carrying out the matching activity based on the parameter values determined to be relevant to the matching activity; and

carrying out the second activity based on the parameter values determined to be relevant to the second activity.

Assignments (3)

Continuity (15)