Analysis method for fine structure, apparatus, and program
Provided is an analysis method for a fine structure, that is capable of determining shapes of scattering bodies that are long in a thickness direction of a plate-shaped sample; and provided are an apparatus and a program thereof. There is provided an analysis method for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles; calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under a specific condition; fitting the calculated scattering intensity to the prepared scattering intensity; and determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting.
1. An analysis method for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of:
preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles;
calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
fitting the calculated scattering intensity to the prepared scattering intensity; and
determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the prepared data is acquired by rotating the sample relative to a direction in which the X-rays are incident by each of the ω rotation angles, the direction perpendicular to the plane direction in which the scattering bodies are arranged being a reference for the X-ray incident direction, and
the ω rotation angle is a rotation angle around the axis parallel to the plane on which the scattering bodies are arranged.
2. The analysis method according to claim 1 ,
wherein the calculated scattering intensity of the X-rays is calculated by assuming a shape model in which the scattering bodies specified by parameters are periodically arranged in a direction parallel to a surface of the plate-shaped sample.
3. An analysis method for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising the steps of:
preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of w rotation angles;
calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
fitting the calculated scattering intensity to the prepared scattering intensity; and
determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the calculated scattering intensity of the X-rays is calculated under a condition that the scattering bodies are formed by laminating layers having respective shapes in the thickness direction of the plate-shaped sample.
4. The analysis method according to claim 3 ,
wherein each layer of the scattering bodies is specified by a center position and a size of a cross-sectional shape.
5. The analysis method according to claim 3 ,
wherein the plate-shaped sample is formed from a multilayer film.
6. The analysis method according to claim 3 ,
wherein the fitting is performed under a constraint condition that adjacent layers among the layers are seamlessly connected with each other.
7. The analysis method according to claim 1 ,
wherein the plate-shaped sample is formed of silicon, and the scattering bodies each have a length of 200 nm or more and 20 μm or less.
8. An analysis apparatus for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising:
a measurement data storage section that stores data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles;
an intensity calculation section that calculates a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
a fitting section that fits the calculated scattering intensity to the stored scattering intensity; and
a parameter determination section that determines shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the prepared data is acquired by rotating the sample relative to the direction in which the X-rays are incident by each of the co rotation angles, a direction perpendicular to the plane direction in which the scattering bodies are arranged being a reference for the X-ray incident direction, and
the ω rotation angle is a rotation angle around the axis parallel to the plane on which the scattering bodies are arranged.
9. A non-transitory computer readable recording medium having recorded thereon an analysis program for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, the program causing a computer to execute the processes of:
preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles;
calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
fitting the calculated scattering intensity to the prepared scattering intensity; and
determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the prepared data is acquired by rotating the sample ω relative to the direction in which the X-rays are incident, with the direction perpendicular to the plane direction in which the scattering bodies are arranged as a reference for the X-ray incident direction, and
the ω rotation angle is the rotation angle around the axis parallel to the plane on which the scattering bodies are arranged.
10. An analysis apparatus for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, comprising:
a measurement data storage section that stores data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles;
an intensity calculation section that calculates a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
a fitting section that fits the calculated scattering intensity to the stored scattering intensity; and
a parameter determination section that determines shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the calculated scattering intensity of the X-rays is calculated under a condition that the scattering bodies are formed by laminating layers having respective shapes in the thickness direction of the plate-shaped sample.
11. A non-transitory computer readable recording medium having recorded thereon an analysis program for a fine structure of a plate-shaped sample formed to have scattering bodies that are long in a thickness direction and periodically arranged, the program causing a computer to execute the processes of:
preparing data of a scattering intensity from the plate-shaped sample measured via transmission of X-rays at a plurality of ω rotation angles;
calculating a scattering intensity of the X-rays scattered by the plate-shaped sample under specific conditions;
fitting the calculated scattering intensity to the prepared scattering intensity; and
determining shapes of the scattering bodies for the plate-shaped sample, based on a result of the fitting,
wherein the calculated scattering intensity of the X-rays is calculated under a condition that the scattering bodies are formed by laminating layers having respective shapes in the thickness direction of the plate-shaped sample.