Semiconductor packages and manufacturing methods thereof
A semiconductor package includes a semiconductor chip and a redistribution layer structure. The redistribution layer structure is arranged to form an antenna transmitter structure and an antenna receiver structure over the semiconductor chip, wherein patterns of the antenna receiver structure are located at different levels of the redistribution layer structure, and at least one pattern of the antenna transmitter structure is at the same level of the topmost patterns of the antenna receiver structure.
1. A semiconductor package, comprising:
a semiconductor chip; and
a redistribution layer structure arranged to form an antenna transmitter structure and an antenna receiver structure over the semiconductor chip, wherein patterns of the antenna receiver structure are located at different levels of the redistribution layer structure, and at least one pattern of the antenna transmitter structure is at the same level of the topmost patterns of the antenna receiver structure.
2. The semiconductor package of claim 1 , wherein the antenna transmitter structure surrounds the antenna receiver structure.
3. The semiconductor package of claim 1 , wherein the antenna transmitter structure has a ring shape, a bar shape, a spiral shape, a wave shape, a meandering shape or a combination thereof.
4. The semiconductor package of claim 1 , wherein the antenna receiver structure has a plurality of first patterns over the semiconductor chip and at a first level of the redistribution layer structure.
5. The semiconductor package of claim 4 , wherein each of the plurality of first patterns has an island shape, a snake shape, a bar shape, a fishbone shape, a fence shape, a grid shape, a ring shape or a combination thereof.
6. The semiconductor package of claim 4 , wherein the antenna receiver structure further has a plurality of second patterns over the plurality of first patterns and at a second level of the redistribution layer structure.
7. The semiconductor package of claim 6 , wherein the plurality of second patterns are aligned with the plurality of first patterns.
8. The semiconductor package of claim 6 , wherein the antenna receiver structure further has a plurality of third patterns over the plurality of second patterns and at a third level of the redistribution layer structure, the plurality of third patterns are aligned with the plurality of second patterns, and the plurality of second patterns are not aligned with the plurality of first patterns.
9. The semiconductor package of claim 6 , wherein the plurality of second patterns are not aligned with the plurality of first patterns.
10. The semiconductor package of claim 1 , wherein the semiconductor package is a fingerprint semiconductor package.
11. The semiconductor package of claim 1 , wherein from a top view, the antenna transmitter structure is outside of a chip region of the semiconductor chip, and the antenna receiver structure is within the chip region of the semiconductor chip.
12. A semiconductor package, comprising:
a semiconductor chip; and
a redistribution layer structure arranged to form a plurality of sensing patterns, an antenna transmitter structure and an antenna receiver structure,
wherein the sensing patterns are configured to detect target molecules and disposed over the semiconductor chip, and
wherein from a top view, the sensing patterns and the antenna transmitter structure are within a chip region of the semiconductor chip, and the antenna receiver structure is outside of the chip region of the semiconductor chip.
13. The semiconductor package of claim 12 , wherein the semiconductor package further comprises a polymer layer covering the antenna transmitter structure and the antenna receiver structure while exposing top surfaces of the sensing patterns.
14. The semiconductor package of claim 13 , further comprising molecular linkers respectively covering the exposed top surfaces of the sensing patterns.
15. The semiconductor package of claim 12 , wherein the antenna receiver structure is electrically connected to a through-via aside the semiconductor chip.
16. The semiconductor package of claim 12 , wherein each of the antenna transmitter structure and the antenna receiver structure has a bar shape, a spiral shape, a wave shape, a meandering shape or a combination thereof.
17. The semiconductor package of claim 12 , wherein each of the sensing patterns has a split-ring shape.
18. The semiconductor package of claim 12 , wherein the antenna transmitter structure and the antenna receiver structure are laterally aside a redistribution layer of the redistribution layer structure.
19. A method of forming a semiconductor package, comprising:
providing a semiconductor chip;
forming a redistribution layer, an antenna transmitter structure, an antenna receiver structure and a plurality of sensing patterns over the semiconductor chip; and
forming a polymer layer over the redistribution layer structure, wherein the polymer layer covers the antenna transmitter structure and the antenna receiver structure while exposes top surfaces of the sensing patterns.
20. The method of claim 19 , further comprising forming enhancement patterns below the sensing patterns.