Method for fabricating an electronic device comprising forming an infused adhesive and a periperal ring
A method for fabricating an electronic device includes fixing a rear face of an integrated-circuit chip to a front face of a support wafer. An infused adhesive is applied in the form of drops or segments that are separated from each other. A protective wafer is applied to the infused adhesive, and the infused adhesive is cured. The infused adhesive includes a curable adhesive and solid spacer elements infused in the curable adhesive. A closed intermediate peripheral ring is deposited on the integrated-circuit chip outside the cured infused adhesive, and an encapsulation block is formed such that it surrounds the chip, the protective wafer and the closed intermediate peripheral ring.
1. A method of collectively fabricating a plurality of electronic devices, comprising:
forming a plurality of stacks on a support wafer, wherein forming each stack of said plurality of stacks comprises:
fixing a rear face of an integrated-circuit chip on a front face of the support wafer;
depositing on a front face of the integrated-circuit chip an infused adhesive in a plurality of drops or segments separated from each other, the infused adhesive comprising a curable adhesive and solid spacer elements infused in the curable adhesive;
placing a protective wafer on the infused adhesive and thereby creating a free space between the front face of the integrated-circuit chip and the protective wafer;
curing the infused adhesive to fix the protective wafer to the integrated-circuit chip; and
depositing a closed intermediate peripheral ring on the integrated-circuit chip outside of the cured infused adhesive between the front face of the integrated-circuit chip and a rear face of the protective wafer;
applying an encapsulation block on the support wafer in areas between adjacent stacks of said plurality of stacks; and
performing a dicing operation to cut through the support wafer and the encapsulation block at locations between adjacent stacks to form a plurality of the electronic devices, wherein each electronic device includes at least one stack.
2. The method of claim 1 , wherein curing the infused adhesive comprises exposing the infused adhesive to heat to polymerize the infused adhesive.
3. The method of claim 2 , wherein curing the infused adhesive occurs with a release of gas.
4. The method of claim 1 , further comprising curing the closed intermediate peripheral ring.
5. The method of claim 4 , wherein curing the closed intermediate peripheral ring comprises exposing the closed intermediate peripheral ring to ultraviolet radiation.
6. The method of claim 5 , wherein curing of the closed intermediate peripheral ring occurs without releasing gas.
7. The method of claim 1 , wherein depositing the closed intermediate peripheral ring comprises curing a resin using ultraviolet radiation.
8. The method of claim 7 , wherein depositing the closed intermediate peripheral ring occurs without releasing gas.
9. The method of claim 1 , wherein applying the encapsulation block comprises supplying a coating material and curing the coating material.
10. The method of claim 1 , wherein performing the dicing operation comprises cutting through the support wafer and the encapsulation block to form an encapsulating ring around said at least one stack of the electronic device on a peripheral zone of the front face of the diced support wafer.