Ultrasonic sensor

1. An ultrasonic sensor comprising:

a first electrode that is provided to an ultrasonic microphone including a vibration element having a function of performing conversion between mechanical vibration and an electrical signal, the vibration element configured to deform due to the mechanical vibration in an axial direction;

a second electrode that is provided at a position different from the first electrode in an in-plane direction intersecting a directional axis of the ultrasonic microphone, the directional axis being parallel to the axial direction; and

a detection section that is provided to detect presence or absence of attached matter attached to the ultrasonic sensor on the basis of a change in capacitance between the first electrode and the second electrode, wherein

in a mounted state in which the ultrasonic sensor is mounted to a body component of an object to which the ultrasonic sensor is mounted, the second electrode is provided to be arranged along the body component in the in-plane direction intersecting the directional axis of the ultrasonic microphone.

2. The ultrasonic sensor according to claim 1 , wherein

the ultrasonic microphone has a diaphragm portion and a diaphragm support portion that is provided to support an outer edge of the diaphragm portion,

the vibration element is fixedly supported on the diaphragm portion, and

the first electrode is provided to the diaphragm portion, the diaphragm support portion, or the vibration element.

3. The ultrasonic sensor according to claim 2 , wherein

the first electrode is the diaphragm portion or the diaphragm support portion formed of a conductor, and

the first electrode is electrically connected to an electrode layer that configures the vibration element and that is fixedly supported on the diaphragm portion.

4. The ultrasonic sensor according to claim 2 , wherein the first electrode is grounded while being electrically insulated from an electrode layer that configures the vibration element and that is fixedly supported on the diaphragm portion.

5. The ultrasonic sensor according to claim 1 , wherein

the ultrasonic microphone includes:

an element support portion including a diaphragm support portion and a diaphragm portion, the diaphragm support portion having an axial direction in a first direction parallel to the directional axis and being formed in a tubular shape that is opened at an end portion of the diaphragm support portion on a side in the first direction, the diaphragm portion being a plate-shaped portion provided so that an end portion of the diaphragm support portion on a side in a second direction opposite to the first side is closed, the diaphragm portion having an inner surface which is a principal surface on the side in the first direction and an outer surface which is a principal surface on the side in the second direction; and

the vibration element that is fixedly supported on the diaphragm portion,

the body component is formed in a plate shape and has a mounting hole which is a through hole passing through the body component in the axial direction; and

the element support portion is provided so that the diaphragm portion is inserted into the mounting hole and the diaphragm support portion extends from the mounting hole in the first direction.

6. The ultrasonic sensor according to claim 5 , wherein the second electrode is provided along the diaphragm support portion.

7. The ultrasonic sensor according to claim 5 , further comprising:

an elastic support member that elastically supports the element support portion;

a sensor case that holds the elastic support member; and

a mounting member that is configured to hold the ultrasonic sensor to the body component by being fixed to the body component and the sensor case in a mounted state in which the ultrasonic sensor is mounted on the body component, wherein

the second electrode is provided to the elastic support member or the mounting member.

8. The ultrasonic sensor according to claim 1 , wherein the detection section is provided to detect an attachment position of the attached matter on the basis of a change in capacitance between each of a plurality of the second electrodes and the first electrode.

9. The ultrasonic sensor according to claim 1 , wherein the detection section is provided to detect the presence or absence of the attached matter at a timing at which a drive signal that drives the vibration element is not inputted into the vibration element or at a timing at which object detection operation of detecting an object around the ultrasonic sensor on the basis of an output signal from the vibration element is not performed.

10. The ultrasonic sensor according to claim 1 , wherein the detection section is provided to detect the presence or absence of the attached matter on the basis of a first impedance change that occurs when a first detection voltage having a first frequency is applied between the first electrode and the second electrode and a second impedance change that occurs when a second detection voltage having a second frequency different from the first frequency is applied between the first electrode and the second electrode.

11. The ultrasonic sensor according to claim 1 , further comprising a temperature sensor that is provided to generate an output corresponding to an ambient temperature, wherein

the detection section is provided to detect the presence or absence of the attached matter on the basis of the output of the temperature sensor and the change in capacitance.

12. The ultrasonic sensor according to claim 1 , wherein the second electrode is positioned external of the ultrasonic microphone.

13. The ultrasonic sensor according to claim 1 , wherein

the vibration element includes a drive electrode and a reference electrode, and

the mechanical vibration in the axial direction of the vibration element generates a voltage between the drive electrode and the reference electrode, which is output as the electrical signal.