IP Library Granted Patent US 11,380,839
Granted Patent B2
US 11,380,839 · App. 16/865,348 · Granted Jul 5, 2022

Magnetic memory cell having deterministic switching and high data retention

Inventors: Witold Kula (Gilroy, CA); Marc Drouard (Valence, FR); Gilles Gaudin (Corenc, FR); Jean-Pierre Nozieres (Le Sappey-en-Chartreuse, FR)
Assignees: Antaios; Centre National De La Recherche Scientifique
H01L43/04H01L27/222H01L43/06
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Quick Facts
Patent No.
US 11,380,839
App. No.
16/865,348
Granted
Jul 5, 2022
Kind
B2
Abstract

A magnetic memory (MRAM) cell, comprising: a first layer formed from a substantially electrically conductive material; and a magnetic tunnel junction (MTJ) stack formed over the first layer, wherein the MTJ stack comprises: a ferromagnetic reference layer having an in-plane reference magnetization; a tunnel barrier layer; and a ferromagnetic storage layer between the tunnel barrier layer and the first layer, the storage layer having an in-plane storage magnetization; wherein the MTJ stack comprises an arrangement for providing an in-plane uniaxial anisotropy in the storage layer; wherein said in-plane uniaxial anisotropy makes an angle with the direction of the write current that is between 5° and 90°, and wherein said in-plane uniaxial anisotropy has an energy between 40 and 200 kBT and wherein coercivity is larger than 200 Oe.

Claims (24)

1. A magnetic memory (MRAM) cell, comprising:

a first layer formed from a substantially electrically conductive material and configured for passing a write current; and

a magnetic tunnel junction (MTJ) stack formed over the first layer, wherein the MTJ stack comprises:

a ferromagnetic reference layer having an in-plane reference magnetization;

a tunnel barrier layer; and

a ferromagnetic storage layer between the tunnel barrier layer and the first layer, the storage layer having an in-plane storage magnetization;

wherein the MTJ stack is configured for providing an in-plane uniaxial anisotropy in the storage layer;

said in-plane uniaxial anisotropy making an angle relative to the direction of the write current that is between 5° and 90°, and

said in-plane uniaxial anisotropy having an energy between 40 and 200 k B T and a coercivity larger than 200 Oe.

2. The MRAM cell according to claim 1 , wherein the storage layer comprises a crystalline anisotropy to provide said in-plane uniaxial anisotropy.

3. The MRAM cell according to claim 1 , wherein the first layer comprises an antiferromagnetic material, and wherein the in-plane uniaxial anisotropy results from a magnetic interaction between an antiferromagnetic material of the first layer and the ferromagnetic storage layer.

4. The MRAM cell according to claim 1 , wherein the ferromagnetic storage layer is strained, the orientation of the in-plane uniaxial anisotropy being determined by the stress direction of the strained ferromagnetic storage layer.

5. The MRAM cell according to claim 1 , wherein the storage layer is textured with in-plane uni axial anisotropy.

6. The MRAM cell according to claim 1 , wherein the MTJ stack comprises a seed layer on which the storage layer is deposited; and

wherein the in-plane uniaxial anisotropy is provided by the seed layer being textured and/or comprising surface corrugations being oblique to the normal to the seed layer plane, by depositing the seed layer using an oblique angle deposition technique and depositing the storage layer on the seed layer.

7. The MRAM cell according to claim 6 , wherein the in-plane uniaxial anisotropy is further provided by the storage layer being textured, by depositing the storage layer using an oblique angle deposition technique.

8. The MRAM cell according to claim 1 , wherein the MTJ stack comprises a seed layer on which the storage layer is deposited; and

wherein the in-plane uniaxial anisotropy is provided by a patterned substrate on which the seed layer is deposited.

9. The MRAM cell according to claim 1 , wherein the MTJ stack comprises a seed layer on which the storage layer is deposited; and

wherein the in-plane uniaxial anisotropy is provided by the seed layer being pattern.

10. The MRAM cell according to claim 9 , wherein the in-plane uniaxial anisotropy is further provided by a pattern substrate on which the seed layer is deposited.

11. The MRAM cell according to claim 9 , wherein said pattern substrate comprises structures having an average amplitude lower than 2 nm and preferentially lower than 0.5 nm.

12. The MRAM cell according to claim 1 , wherein the angle is between 30°and 90°.

13. The MRAM cell according to claim 1 , wherein said coercivity is larger than 500 Oe or more preferably larger than 1000 Oe.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEES AND ADDED ASSIGNEE PREVIOUSLY RECORDED AT REEL: 52962 FRAME: 529. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF THE ENTIRE INTEREST AND THE GOODWILL . Recorded Mar 21, 2025
From: KULA, WITOLD; DROUARD, MARC; GAUDIN, GILLES; NOZIERES, JEAN-PIERRE
To: ANTAIOS; CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE; COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
Reel/Frame 070586/0078 →
CHANGE OF ADDRESS Recorded Jul 28, 2022
From: ANTAIOS
To: ANTAIOS
Reel/Frame 061002/0069 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2020
From: KULA, WITOLD; DROUARD, MARC; GAUDIN, GILLES; NOZIERES, JEAN-PIERRE
To: ANTAIOS; CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Reel/Frame 052962/0529 →
Priority Claims (1)
EP 19315030 · May 6, 2019 · regional
Continuity (1)
Related Publication 20200357982A1 · Nov 12, 2020