Fully interconnected heterogeneous multi-layer reconstructed silicon device
Reconstructed 3DIC structures and methods of manufacture are described. In an embodiment, one or more dies in each package level of a 3DIC are both functional chips and/or stitching devices for two or more dies in an adjacent package level. Thus, each die can function as a communication bridge between two other dies/chiplets in addition to performing a separate chip core function.
1. A reconstructed three dimensional integrated circuit (3DIC) structure comprising:
a first package level including a first plurality of dies embedded in first gap fill material, wherein the first gap fill material is between adjacent dies of the first plurality of dies;
a second package level including a second plurality of dies bonded to the first package level and embedded in a second gap fill material, wherein the second gap fill material is between adjacent dies of the second plurality of dies; and
a communication path that travels up and down between the first package level and the second package level, wherein a first group of one or more dies in the first plurality of dies function as both functional dies and stitching devices for two or more of the second plurality of dies; and a second group of one or more dies in the second plurality of dies function as both functional dies and stitching devices for two or more of the first plurality of dies;
wherein each die in the first group of dies and the second group of dies includes a corresponding communication bridge routing through which the communication path extends;
a plurality of through silicon vias (TSVs) extending into the second plurality of dies; and
a plurality of landing pads coupled with the plurality of TSVs.
2. The reconstructed 3DIC structure of claim 1 , further comprising a plurality of solder bumps attached to the plurality of landing pads.
3. The reconstructed 3DIC structure of claim 2 , wherein the second plurality of dies are hybrid bonded to the first package level.
4. The reconstructed 3DIC structure of claim 3 , wherein the second plurality of dies hybrid bonded to the first plurality of dies.
5. The reconstructed 3DIC structure of claim 4 , wherein the first gap fill material is a first oxide gap fill material.
6. The reconstructed 3DIC structure of claim 5 , wherein the second gap fill material is a second oxide gap fill material, and the first oxide gap fill material and the second oxide gap fill material are a same material.
7. The reconstructed-3DIC structure of claim 1 , wherein the corresponding communication bridge routing includes one or more active devices selected from the group consisting of a repeater, a flop, a buffer, and a transistor.
8. The reconstructed 3DIC structure of claim 7 , further comprising a passive interposer chiplet in the first package level or the second package level, wherein the communication path travels through the passive interposer chiplet.
9. The reconstructed 3DIC structure of claim 7 , wherein the communication path further comprises a transceiver and a receiver.
10. The reconstructed 3DIC structure of claim 1 , wherein the second plurality of dies are bonded to the first package level with a plurality of microbumps.
11. The reconstructed 3DIC structure of claim 10 , wherein the second plurality of dies are bonded to a redistribution layer of the first package level with the plurality of microbumps.
12. The reconstructed 3DIC structure of claim 1 , further comprising a first plurality of TSVs extending into the first plurality of dies.
13. The reconstructed 3DIC structure of claim 12 , further comprising a third plurality of dies hybrid bonded to the first plurality of dies.
14. A method of fabricating a three dimensional integrated circuit (3DIC) structure comprising:
bonding a second plurality of dies onto a first reconstructed wafer including a first plurality of dies embedded in a first gap fill material, wherein the second plurality of dies comprises a plurality of through silicon vias (TSVs) extending into the second plurality of dies;
wherein a communication path travels up and down between the first plurality of dies and the second plurality of dies, wherein a first group of one or more dies in the first plurality of dies function as both functional dies and stitching devices for two or more of the second plurality of dies; and a second group of one or more dies in the second plurality of dies function as both functional dies and stitching devices for two or more of the first plurality of dies;
wherein each die in the first group of dies and the second group of dies includes a corresponding communication bridge routing through which the communication path extends.
15. The method of claim 14 , wherein bonding the second plurality of dies to the first reconstructed wafer comprises hybrid bonding.
16. The method of claim 15 , wherein bonding the second plurality of dies to the first reconstructed wafer comprises hybrid bonding a second reconstructed wafer to the first reconstructed wafer.
17. The method of claim 15 , further comprising applying a second gap fill material around the second plurality of dies after hybrid bonding the second plurality of dies to the first reconstructed wafer.
18. The method of claim 14 , wherein bonding the second plurality of dies to the first reconstructed wafer comprises bonding the second plurality of dies to a redistribution layer of the first reconstructed wafer with a plurality of microbumps.