IP Library Granted Patent US 11,022,826
Granted Patent B2
US 11,022,826 · App. 16/872,731 · Granted Jun 1, 2021

All-optical spatial light modulators

Inventors: Christopher Louis Panuski (Somerville, MA); Dirk Robert Englund (Brookline, MA)
Assignee: Massachusetts Institute of Technology
G02F1/025G02F2001/0152G02F2202/32G02F2203/12G02F2203/15
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Quick Facts
Patent No.
US 11,022,826
App. No.
16/872,731
Granted
Jun 1, 2021
Kind
B2
Abstract

A spatial light modulator (SLM) comprised of a 2D array of optically-controlled semiconductor nanocavities can have a fast modulation rate, small pixel pitch, low pixel tuning energy, and millions of pixels. Incoherent pump light from a control projector tunes each PhC cavity via the free-carrier dispersion effect, thereby modulating the coherent probe field emitted from the cavity array. The use of high-Q/V semiconductor cavities enables energy-efficient all-optical control and eliminates the need for individual tuning elements, which degrade the performance and limit the size of the optical surface. Using this technique, an SLM with 10 6 pixels, micron-order pixel pitch, and GHz-order refresh rates could be realized with less than 1 W of pump power.

Claims (21)

1. A spatial light modulator comprising:

a layer patterned with a two-dimensional array of semiconductor cavities, the two-dimensional array of semiconductor cavities each scattering signal light at a resonant wavelength;

a two-dimensional array of light-emitting diodes (LEDs), in optical communication with the two-dimensional array of semiconductor cavities, to tune the resonant wavelength of at least one semiconductor cavity in the two-dimensional array of semiconductor cavities via optical free carrier injection;

a control layer, operably coupled to the two-dimensional array of LEDs, to modulate LEDs in the two-dimensional array of LEDs at a rate of at least 1 GHz; and

a waveguide layer, in optical communication with the two-dimensional array of LEDs and the two-dimensional array of semiconductor cavities, to image pump signals emitted by the two-dimensional array of LEDs onto the two-dimensional array of semiconductor cavities.

2. The spatial light modulator of claim 1 , wherein the semiconductor layer comprises silicon.

3. The spatial light modulator of claim 1 , wherein each semiconductor cavity in the two-dimensional array of semiconductor cavities has a quality factor Q of at least 1000.

4. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities is comprised of H1 photonic crystal cavities.

5. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities is comprised of L4/3 photonic crystal cavities.

6. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities is comprised of micropillar cavities.

7. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities has a pitch of about half the resonant wavelength to about the resonant wavelength.

8. The spatial light modulator of claim 1 , wherein the pump signals emitted by the two-dimensional array of LEDs are at a wavelength of less than 500 nm and the signal light is at a wavelength of more than 500 nm.

9. The spatial light modulator of claim 1 , further comprising:

a signal light waveguide layer, in optical communication with the semiconductor layer, to guide the signal light to the at least one semiconductor cavity.

10. The spatial light modulator of claim 9 , further comprising:

a signal light source, in optical communication with the signal waveguide layer, to launch the signal light into the signal waveguide layer.

11. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities comprises a surface defined by a photonic crystal slab guided mode resonator.

12. The spatial light modulator of claim 1 , wherein the two-dimensional array of semiconductor cavities includes a wavelength-scale patterned semiconductor slab.

13. The spatial light modulator of claim 12 , wherein the two-dimensional array of semiconductor cavities supports a spatially distributed resonant mode.

14. The spatial light modulator of claim 1 , wherein a free carrier lifetime of the two-dimensional array of semiconductor cavities is about 100 ps or less.

15. The spatial light modulator of claim 1 , wherein a free carrier lifetime of the two-dimensional array of semiconductor cavities is about 1 ns or more.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 19, 2020
From: PANUSKI, CHRISTOPHER LOUIS; ENGLUND, DIRK ROBERT
To: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Reel/Frame 054098/0824 →
Continuity (2)
Provisional Application 62873232 · Jul 12, 2019
Related Publication 20210011309A1 · Jan 14, 2021
Cited By (2)
US 12,585,147 US 12,724,589