IP Library Granted Patent US 11,522,069
Granted Patent B2
US 11,522,069 · App. 16/881,500 · Granted Dec 6, 2022

Thin-film semiconductors

Inventors: Heayoung Yoon (Salt Lake City, UT); David Magginetti (Salt Lake City, UT)
Assignee: UNIVERSITY OF UTAH RESEARCH FOUNDATION
H01L29/66742H01L21/02417H01L29/786
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Quick Facts
Patent No.
US 11,522,069
App. No.
16/881,500
Granted
Dec 6, 2022
Kind
B2
Abstract

Systems and methods disclosed and contemplated herein relate to manufacturing thin film semiconductors. Resulting thin film semiconductors are particularly suited for applications such as flexible optoelectronics and photovoltaic devices. Broadly, methods and techniques disclosed herein include high-temperature deposition techniques combined with lift-off in aqueous environments. These methods and techniques can be utilized to incorporate thin film semiconductors into substrates that have limited temperature tolerances.

Claims (32)

1. A method of making a thin film, the method comprising:

depositing a first cadmium layer onto a substrate;

depositing a second cadmium layer onto the first cadmium layer, wherein a thickness of the second cadmium layer is between 0.2 μm to 6 μm, thereby generating a coated substrate;

immersing the coated substrate in an aqueous medium; and

after immersing the coated substrate, removing a delaminated layer from the substrate, the delaminated layer including the first cadmium layer and the second cadmium layer.

2. The method according to claim 1 , further comprising applying the delaminated layer to a second substrate.

3. The method according to claim 2 , the second substrate being selected from a plastic, a fabric, and a cellulose paper.

4. The method according to claim 1 , wherein a thickness of the first cadmium layer is no greater than 200 nm.

5. The method according to claim 1 , wherein depositing the second cadmium layer includes a vapor deposition technique.

6. The method according to claim 5 , wherein the vapor deposition technique is thermal evaporation.

7. The method according to claim 1 , wherein a substrate temperature is 20° C. to 25° C. while the first cadmium layer is deposited onto the substrate.

8. The method according to claim 7 , wherein the substrate temperature is at least 400° C. and no more than 540° C. while the second cadmium layer is deposited onto the substrate.

9. The method according to claim 1 , wherein the first cadmium layer includes cadmium sulfide (CdS).

10. The method according to claim 1 , wherein the first cadmium layer includes cadmium selenide (CdSe).

11. The method according to claim 1 , wherein the second cadmium layer includes cadmium telluride (CdTe).

12. The method according to claim 1 , wherein an aqueous medium temperature is at ambient temperature before immersing the coated substrate in the aqueous medium.

13. The method according to claim 1 , wherein the substrate includes silicon material.

14. A method of making a thin film, the method comprising:

depositing a first cadmium layer onto a substrate,

wherein a substrate temperature is 20° C. to 25° C. while the first cadmium layer is deposited onto the substrate;

depositing a second cadmium layer onto the first cadmium layer, thereby generating a coated substrate,

wherein the substrate temperature is at least 400° C. and no more than 540° C. while the second cadmium layer is deposited onto the substrate;

immersing the coated substrate in an aqueous medium; and

after immersing the coated substrate, removing a delaminated layer from the substrate without application of physical force, the delaminated layer including the first cadmium layer and the second cadmium layer.

15. The method according to claim 14 , further comprising applying the delaminated layer to a second substrate, the second substrate being selected from a plastic, a fabric, and a cellulose paper,

wherein an aqueous medium temperature is at ambient temperature before immersing the coated substrate in the aqueous medium.

16. The method according to claim 15 , wherein a thickness of the first cadmium layer is no greater than 250 nm;

wherein a thickness of the second cadmium layer is between 0.2 μm to 6 μm;

wherein depositing the second cadmium layer includes a vapor deposition technique;

wherein the first cadmium layer includes cadmium sulfide (CdS) or cadmium selenide (Cd Se);

wherein the second cadmium layer includes cadmium telluride (CdTe); and

wherein the substrate includes silicon material.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2020
From: YOON, HEAYOUNG; MAGGINETTI, DAVID
To: UNIVERSITY OF UTAH
Reel/Frame 053836/0004 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 21, 2020
From: UNIVERSITY OF UTAH
To: UNIVERSITY OF UTAH RESEARCH FOUNDATION
Reel/Frame 053836/0067 →
CONFIRMATORY LICENSE Recorded May 27, 2020
From: UNIVERSITY OF UTAH
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 052759/0737 →
Continuity (2)
Provisional Application 62851895 · May 23, 2019
Related Publication 20200373414A1 · Nov 26, 2020