Radiation based patterning methods
Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.
1. A method for patterning a substrate with sequential radiation based imaging steps, the method comprising:
patterning a structure comprising a first radiation sensitive composition on a substrate, the first radiation sensitive composition comprising metal ions with radiation sensitive ligands to form a first pattern;
heating the structure with the first pattern to convert the first pattern of the irradiated radiation sensitive patterning composition to a stabilized composition having differential solubility relative to a second radiation sensitive composition, to form a frozen first pattern;
depositing the second radiation sensitive composition over the frozen first pattern;
irradiating the second radiation sensitive composition over the frozen first pattern according to a second pattern; and
developing the second pattern to form an updated structure.
2. The method of claim 1 wherein the stabilized composition and the second patterned radiation sensitive composition are simultaneously contacting portions of a common surface.
3. The method of claim 1 wherein the stabilized composition is insoluble in a solvent for a second radiation sensitive composition.
4. The method of claim 1 wherein the first pattern corresponds to a negative tone image of a radiation pattern following development, wherein the negative tone image has irradiated regions with at least a portion of the radiation sensitive ligands broken and wherein development results in formation of the first pattern.
5. The method of claim 1 wherein the stabilized composition is stable to a subsequent deposition of a second radiation sensitive composition.
6. The method of claim 1 wherein the stabilized composition comprises a metal oxide.
7. The method of claim 1 wherein the first pattern and the second pattern comprise a pattern of lines and spaces.
8. The method of claim 1 wherein the heating is at a temperature from about 200° C. to about 400° C.
9. The method of claim 1 further comprising etching the substrate according to a pattern formed by the first and the second pattern.
10. The method of claim 1 further comprising heating the structure at a temperature of about 200° C. to about 400° C. after developing the second pattern.
11. The method of claim 1 further comprising
heating the updated structure with the first pattern and the second pattern after development of the second pattern to convert the second pattern of the irradiated radiation sensitive patterning composition to a stabilized composition having differential solubility relative to a third radiation sensitive composition, to form a frozen second pattern;
depositing the third radiation sensitive composition over the frozen first and second patterns;
irradiating the third radiation sensitive composition over the frozen first and second patterns according to a third pattern; and
developing the third pattern.
12. The method of claim 1 wherein the metal ions comprise tin ions.
13. A structure comprising a substrate, a patterned metal oxide material with a first pattern on a surface of the substrate, and a coating comprising a second photosensitive material, wherein the first pattern is formed by irradiating along a selected pattern a first photosensitive material and contacting the irradiated material with a developing composition to dissolve unirradiated material, wherein the first photosensitive material and the second photosensitive material comprise metal ions with radiation sensitive ligands, and wherein the coating is deposited over at least a portion of the first pattern.
14. The structure of claim 13 wherein the first photosensitive material and/or the second photosensitive material further comprises an oxo/hydroxo network.
15. The structure of claim 13 wherein the patterned metal oxide material is insoluble in a solvent suitable to deposit the second photosensitive material.
16. The structure of claim 13 wherein the first photosensitive material and the second photosensitive material are different from each other.
17. The structure of claim 13 wherein the first photosensitive material and the second photosensitive material comprise the same photosensitive composition.
18. The structure of claim 13 wherein the patterned metal oxide material comprises a layer with a pattern having regions of metal oxide material and regions without metal oxide material, the regions with metal oxide material having an average thickness from about 5 nm to about 30 nm and wherein the first pattern has edges with an average line-width roughness of no more than about 2.25 nm at a pitch of no more than about 60 nm or for individual features having an average width of no more than about 30 nm.
19. The structure of claim 13 further comprising heating the irradiated material after the contacting step to increase the condensation of the metal oxide material to a desired level.
20. The structure of claim 13 wherein the patterned metal oxide material comprises M-O-M and/or M-O—H bonds, wherein M is a metal atom.