Ferroelectric thin-film structures, methods of manufacturing the same, and electronic devices including the ferroelectric thin-film structures

1. A ferroelectric thin-film structure, comprising:

at least one first atomic layer including a first dielectric material that is based on an oxide;

at least one second atomic layer including a second dielectric material that is based on another oxide, the second dielectric material being different from the first dielectric material; and

at least one third atomic layer having a different total material composition than both the at least one first atomic layer and the at least one second atomic layer, wherein the at least one second atomic layer is between the at least one first atomic layer and the at least one third atomic layer, the at least one third atomic layer including both the first dielectric material and a dopant, the dopant having a bandgap greater than a bandgap of the first dielectric material,

wherein the ferroelectric thin-film structure has a thickness of 0.1 nm to 2 nm, and

wherein the at least one first atomic layer, the at least one second atomic layer, and the at least one third atomic layer have a crystallized material structure such that the ferroelectric thin-film structure has ferroelectric characteristics.

2. The ferroelectric thin-film structure of claim 1 , wherein the first dielectric material includes

an oxide of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al), or

a perovskite of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al).

3. The ferroelectric thin-film structure of claim 1 , wherein the dopant includes an oxide of at least one of silicon (Si), hafnium (Hf), zirconium (Zr), aluminum (Al), lanthanum (La), yttrium (Y), strontium (Sr), or gadolinium (Gd).

4. The ferroelectric thin-film structure of claim 1 , wherein the at least one third atomic layer is disposed on at least one of

an uppermost portion of the ferroelectric thin-film structure,

a middle portion of the ferroelectric thin-film structure, or

a lowermost portion of the ferroelectric thin-film structure.

5. A method of forming a ferroelectric thin-film structure by atomic layer deposition (ALD), the method comprising:

depositing, on a substrate, a first atomic layer according to a first atomic layer deposition (ALD) operation, the first atomic layer including a first dielectric material that is based on an oxide;

depositing a second atomic layer on the first atomic layer according to a second atomic layer (ALD) operation, the second atomic layer including a second dielectric material that is based on another oxide, the second dielectric material being different from the first dielectric material;

depositing a third atomic layer on the second atomic layer according to a third atomic layer (ALD) operation, the third atomic layer having a different total material composition than both the first atomic layer and the second atomic layer, the third atomic layer including both the first dielectric material and a dopant, the dopant having a bandgap greater than a bandgap of the first dielectric material; and

the crystallizing the first atomic layer, the second atomic layer, and the third atomic layer by a heat treatment such that a stacked structure including the first atomic layer, the second atomic layer and the third atomic layer has ferroelectric characteristics,

wherein the ferroelectric thin-film structure has a thickness of 0.1 nm to 2 nm.

6. The method of claim 5 , wherein the depositing of the first atomic layer according to the first atomic layer deposition (ALD) operation comprises:

forming a precursor of the first dielectric material on the substrate; and

supplying an oxidant to the precursor of the first dielectric material to cause the oxidant to react with the precursor of the first dielectric material to form the first atomic layer.

7. The method of claim 5 , wherein the depositing of the third atomic layer comprises:

forming a separate precursor of the first dielectric material on a portion of the second atomic layer, such that a separate portion of the second atomic layer is exposed by the separate precursor of the first dielectric material;

forming a precursor of the dopant on the separate portion of the second atomic layer which is exposed by the precursor of the first dielectric material; and

reacting the precursor of the first dielectric material and the precursor of the dopant with an oxidant to form the third atomic layer.

8. The method of claim 5 , wherein the first dielectric material includes an oxide of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al), or a perovskite of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al).

9. The method of claim 5 , wherein the dopant includes an oxide of at least one of silicon (Si), hafnium (Hf), zirconium (Zr), aluminum (Al), lanthanum (La), yttrium (Y), strontium (Sr), or gadolinium (Gd).

10. An electronic device, comprising:

a substrate;

a gate electrode on the substrate; and

a ferroelectric thin-film structure between the substrate and the gate electrode, the ferroelectric thin-film structure including

at least one first atomic layer including a first dielectric material that is based on an oxide;

at least one second atomic layer including a second dielectric material that is based on another oxide, the second dielectric material being different from the first dielectric material; and

at least one third atomic layer having a different total material composition than both the at least one first atomic layer and the at least one second atomic layer, wherein the at least one second atomic layer is between the at least one first atomic layer and the at least one third atomic layer, the at least one third atomic layer including both the first dielectric material and a dopant, the dopant having a bandgap greater than a bandgap of the first dielectric material,

wherein the ferroelectric thin-film s ructure has a thickness of 0.1 nm to 2 nm, and

wherein the at least one first atomic layer, the at least one second atomic layer, and the at least one third atomic layer have a crystallized material structure such that the ferroelectric thin-film structure has ferroelectric characteristics.

11. The electronic device of claim 10 , wherein the first dielectric material includes

an oxide of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al), or

a perovskite of at least one of hafnium (Hf), zirconium (Zr), or aluminum (Al).

12. The electronic device of claim 10 , wherein the dopant includes an oxide of at least one of silicon (Si), hafnium (Hf), zirconium (Zr), aluminum (Al), lanthanum (La), yttrium (Y), strontium (Sr), or gadolinium (Gd).

13. The electronic device of claim 10 , wherein the substrate includes

a channel element vertically overlapping with the gate electrode, and

a source and a drain at opposite sides of the channel element.

14. The electronic device of claim 13 , wherein the channel element includes at least one of Si, Ge, SiGe, III-V semiconductors, oxide semiconductors, nitride semiconductors, oxynitride semiconductors, 2-dimensional (2D) materials, quantum dots, or organic semiconductors.

15. An electronic device, comprising:

a first electrode and a second electrode spaced apart from each other; and

a ferroelectric thin-film structure between the first electrode and the second electrode, wherein the ferroelectric thin-film structure includes

at least one first atomic layer including a first dielectric material that is based on an oxide;

at least one second atomic layer including a second dielectric material that is based on another oxide, the second dielectric material being different from the first dielectric material; and

at least one third atomic layer having a different total material composition than both the at least one first atomic layer and the at least one second atomic layer, wherein the at least one second atomic layer is between the at least one first atomic layer and the at least one third atomic layer, the at least one third atomic layer including both the first dielectric material and a dopant, the dopant having a bandgap that is greater than a bandgap of the first dielectric material,

wherein the ferroelectric thin-film structure has a thickness 0.1 nm to 2 nm, and

wherein the atleast one first atomic layer, the atleast one second atomic layer, and the at least one third atomic layer have a crystallized material structure such that the ferroelectric thin-film structure has ferroelectric characteristics.

16. A method of manufacturing an electronic device, the method comprising:

forming a ferroelectric thin-film structure according to the method of claim 5 ; and

fabricating the electronic device based on incorporating the ferroelectric thin-film structure into an electronic device component.

17. The method of claim 16 , wherein the electronic device component includes at least one of a processing circuitry or a memory.

18. A system for forming a ferroelectric thin-film structure, the system comprising:

a process chamber including a pedestal or chuck configured to structurally support a substrate in the process chamber;

a plurality of composition sources and a plurality of control devices, each composition source coupled to the process chamber via a separate control device, each control device configured to control a supply of a separate material held in a separate coupled composition source to the process chamber; and

an electronic device configured to control at least the plurality of control devices to

deposit, on the substrate in the process chamber, a first atomic layer according to a first atomic layer deposition (ALD) operation, the first atomic layer including a first dielectric material that is based on an oxide,

deposit a second atomic layer on the first atomic layer according to a second atomic layer deposition (ALD) operation, the second atomic layer including a second dielectric material that is based on another oxide, the second dielectric material being different from the first dielectric material, and

deposit a third atomic layer on the second atomic layer according to a third atomic layer deposition (ALD) operation, the third atomic layer having a different total material composition than both the first atomic layer and the second atomic layer, the third atomic layer including both the first dielectric material and a dopant, the dopant having a bandgap greater than a bandgap of the first dielectric material,

wherein the ferroelectric thin-film structure has a thickness of 0.1 nm to 2 nm, and

wherein the first atomic layer, the second atomic layer, and the third atomic layer have a crystallized material stricture such that the ferroelectric thin-film structure has ferroelectric characteristics.

19. The system of claim 18 , further comprising:

a heat source configured to heat at least a portion of the process chamber,

wherein the electronic device is configured to control the heat source to perform a heat treatment process on the first, second, and third atomic layers to crystallize the first, second, and third atomic layers.