Acoustic wave device

1. An acoustic wave device comprising:

a first terminal;

a second terminal having a potential that is different from a potential of the first terminal;

a piezoelectric body portion;

an interdigital transducer electrode provided on or above the piezoelectric body portion and electrically connected to the first terminal and the second terminal; and

a reflector provided on or above the piezoelectric body portion and electrically connected to the second terminal; wherein

the interdigital transducer electrode includes:

a first busbar electrically connected to the first terminal;

a second busbar opposed to the first busbar in a first direction and electrically connected to the second terminal;

a plurality of first electrode fingers connected to the first busbar and extending from the first busbar toward the second busbar in the first direction; and

a plurality of second electrode fingers connected to the second busbar and extending from the second busbar toward the first busbar in the first direction;

the plurality of first electrode fingers and the plurality of second electrode fingers are spaced apart from each other in a second direction perpendicular or substantially perpendicular to the first direction;

the reflector includes two reflectors provided one by one on both sides of the interdigital transducer electrode in the second direction;

at least one electrode finger of the plurality of first electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger, and at least one electrode finger of the plurality of second electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger;

each of the first busbar and the second busbar includes:

an opening portion;

an inner busbar portion located closer to the plurality of first electrode fingers and the plurality of second electrode fingers than the opening portion in the first direction;

an outer busbar portion located across the opening portion from the inner busbar portion in the first direction; and

a coupling portion coupling the inner busbar portion and the outer busbar portion in the first direction;

in the interdigital transducer electrode, where, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers, the electrode finger located at one end in the second direction is a first end electrode finger and the electrode finger located at another end is a second end electrode finger, the first end electrode finger is located between the reflector and the second end electrode finger in the second direction;

the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger, is located on an inner side in the second direction relative to a center portion, in the first direction, of the first end electrode finger;

the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger or the second end electrode finger, is located on an inner side in the second direction relative to the first end electrode finger and the second end electrode finger and does not overlap the first end electrode finger or the second end electrode finger in the first direction; and

one side, along the first direction, of the inner busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger or the second end electrode finger, and a side, away from the second end electrode finger, of the wide portion of the first end electrode finger are aligned in a straight line or substantially in a straight line.

2. The acoustic wave device according to claim 1 , wherein

the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger or the second end electrode finger, is located on an inner side in the second direction relative to the wide portion of the first end electrode finger and the wide portion of the second end electrode finger.

3. The acoustic wave device according to claim 1 , wherein a distal end portion of at least one of the plurality of first electrode fingers includes the wide portion, and a distal end portion of at least one of the plurality of second electrode fingers includes the wide portion.

4. The acoustic wave device according to claim 1 , wherein

the acoustic wave device includes a plurality of regions different from each other in the first direction in plan view taken in a thickness direction of the acoustic wave device,

the plurality of regions include:

a center region located in a center in the first direction and including center portions of the plurality of first electrode fingers and center portions of the plurality of second electrode fingers;

two outer busbar regions respectively including the outer busbar portion of the first busbar and the outer busbar portion of the second busbar;

two inner busbar regions respectively including the inner busbar portion of the first busbar and the inner busbar portion of the second busbar;

two coupling regions respectively including the coupling portion and opening portion of the first busbar and the coupling portion and opening portion of the second busbar;

two gap regions respectively including a gap between the second busbar and the plurality of first electrode fingers and a gap between the first busbar and the plurality of second electrode fingers; and

two wide regions respectively including the wide portion of at least one of the plurality of first electrode fingers and the wide portion of at least one of the plurality of second electrode fingers;

an acoustic velocity of acoustic waves in the two outer busbar regions is lower than the acoustic velocity in the center region;

an acoustic velocity of acoustic waves in the two inner busbar regions is lower than the acoustic velocity in the center region;

an acoustic velocity of acoustic waves in the two coupling regions is higher than the acoustic velocity in the two outer busbar regions or the acoustic velocity in the center region;

an acoustic velocity of acoustic waves in the two gap regions is higher than the acoustic velocity in the two inner busbar regions or the acoustic velocity in the center region; and

an acoustic velocity of acoustic waves in the two wide regions is lower than the acoustic velocity in the center region.

5. The acoustic wave device according to claim 1 , further comprising:

a first wiring layer that electrically connects the interdigital transducer electrode to the first terminal; and

a second wiring layer that electrically connects the interdigital transducer electrode to the second terminal.

6. The acoustic wave device according to claim 1 , wherein:

the piezoelectric body portion includes a high acoustic velocity support substrate,

a low acoustic velocity film is directly laminated on the high acoustic velocity support substrate, and

an acoustic velocity of bulk waves that propagate through the low acoustic velocity film is lower than an acoustic velocity of the acoustic waves that propagate through the piezoelectric body portion.

7. An acoustic wave device comprising:

a first terminal;

a second terminal having a potential that is different from a potential of the first terminal;

a piezoelectric body portion;

an interdigital transducer electrode provided on or above the piezoelectric body portion and electrically connected to the first terminal and the second terminal; and

a reflector provided on or above the piezoelectric body portion and electrically connected to the second terminal; wherein

the interdigital transducer electrode includes:

a first bulbar electrically connected to the first terminal;

a second busbar opposed to the first busbar in a first direction and electrically connected to the second terminal;

a plurality of first electrode fingers connected to the first busbar and extending from the first busbar toward the second busbar in the first direction; and

a plurality of second electrode fingers connected to the second busbar and extending from the second busbar toward the first busbar in the first direction;

the plurality of first electrode fingers and the plurality of second electrode fingers are spaced apart from each other in a second direction perpendicular or substantially perpendicular to the first direction;

at least one electrode finger of the plurality of first electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger, and at least one electrode finger of the plurality of second electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger;

each of the first busbar and the second busbar includes:

an opening portion;

an inner busbar portion located closer to the plurality of first electrode fingers and the plurality of second electrode fingers than the opening portion in the first direction;

an outer busbar portion located across the opening portion from the inner busbar portion in the first direction; and

a coupling portion coupling the inner busbar portion and the outer busbar portion in the first direction;

in the interdigital transducer electrode, where, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers, the electrode finger located at one end in the second direction is a first end electrode finger and the electrode finger located at another end is a second end electrode finger, the first end electrode finger is located between the reflector and the second end electrode finger in the second direction; and

the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger, is located on an inner side in the second direction relative to the inner busbar portion of the busbar not connected to the first end electrode finger.

8. An acoustic wave device comprising:

a first terminal;

a second terminal having a potential that is different from a potential of the first terminal;

a piezoelectric body portion;

a plurality of interdigital transducer electrodes provided on or above the piezoelectric body portion and electrically connected to the first terminal and the second terminal; and

two reflectors provided on or above the piezoelectric body portion and reflect acoustic waves excited by the plurality of interdigital transducer electrodes; wherein

each of the plurality of interdigital transducer electrodes includes:

a first busbar;

a second busbar opposed to the first busbar in a first direction;

a plurality of first electrode fingers connected to the first busbar and extending from the first busbar toward the second busbar in the first direction; and

a plurality of second electrode fingers connected to the second busbar and extending from the second busbar toward the first busbar in the first direction;

the plurality of first electrode fingers and the plurality of second electrode fingers are spaced apart from each other in a second direction perpendicular or substantially perpendicular to the first direction;

at least one electrode finger of the plurality of first electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger, and at least one electrode finger of the plurality of second electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger;

each of the first busbar and the second busbar includes:

an opening portion;

an inner busbar portion located closer to the plurality of first electrode fingers and the plurality of second electrode fingers than the opening portion in the first direction;

an outer busbar portion located across the opening portion from the inner busbar portion in the first direction; and

a coupling portion coupling the inner busbar portion and the outer busbar portion in the first direction;

the plurality of interdigital transducer electrodes are arranged in the second direction;

the two reflectors each are located across the interdigital transducer electrode at any one of both sides of the plurality of interdigital transducer electrodes arranged in the second direction from the interdigital transducer electrode adjacent to the interdigital transducer electrode at the any one of both sides;

in the interdigital transducer electrode adjacent to one of the two reflectors, of the plurality of interdigital transducer electrodes, where, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers, the electrode finger located at one end in the second direction is a first end electrode finger and the electrode finger located at another end is a second end electrode finger, the first end electrode finger is located between the one of the two reflectors and the second end electrode finger in the second direction; and

in the interdigital transducer electrode adjacent to the one of the two reflectors, the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger, is located on an inner side in the second direction relative to the inner busbar portion of the busbar not connected to the first end electrode finger.

9. An acoustic wave device comprising:

a first terminal;

a second terminal having a potential that is different from a potential of the first terminal;

a piezoelectric body portion; and

a plurality of interdigital transducer electrodes provided on or above the piezoelectric body portion and electrically connected to the first terminal and the second terminal; wherein

each of the plurality of interdigital transducer electrodes includes:

a first busbar;

a second busbar opposed to the first busbar in a first direction;

a plurality of first electrode fingers connected to the first busbar and extending from the first busbar toward the second busbar in the first direction; and

a plurality of second electrode fingers connected to the second busbar and extending from the second busbar toward the first busbar in the first direction;

the plurality of first electrode fingers and the plurality of second electrode fingers are spaced apart from each other in a second direction perpendicular or substantially perpendicular to the first direction;

at least one electrode finger of the plurality of first electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger, and at least one electrode finger of the plurality of second electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger;

each of the first busbar and the second busbar includes:

an opening portion;

an inner busbar portion located closer to the plurality of first electrode fingers and the plurality of second electrode fingers than the opening portion in the first direction;

an outer busbar portion located across the opening portion from the inner busbar portion in the first direction; and

a coupling portion coupling the inner busbar portion and the outer busbar portion in the first direction;

where, of the plurality of interdigital transducer electrodes, one of the two interdigital transducer electrodes adjacent to each other in the second direction is a first interdigital transducer electrode and another one of the two interdigital transducer electrodes is a second interdigital transducer electrode;

where, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers of the first interdigital transducer electrode, the electrode finger located at an end closer to the second interdigital transducer electrode in the second direction is a first end electrode finger of the first interdigital transducer electrode and the electrode finger located at an end away from the second interdigital transducer electrode is a second end electrode finger of the first interdigital transducer electrode, and, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers of the second interdigital transducer electrode, the electrode finger located at an end closer to the first interdigital transducer electrode in the second direction is a first end electrode finger of the second interdigital transducer electrode and the electrode finger located at an end away from the first interdigital transducer electrode is a second end electrode finger of the second interdigital transducer electrode;

the first end electrode finger of the first interdigital transducer electrode is connected to the first terminal;

the first end electrode finger of the second interdigital transducer electrode is connected to the second terminal; and

in each of the first interdigital transducer electrode and the second interdigital transducer electrode, the outer busbar portion electrically connected to one of the first terminal and the second terminal, different from the terminal to which the first end electrode finger is connected, is located on an inner side in the second direction relative to the inner busbar portion electrically connected to the one of the first terminal and the second terminal, different from the terminal to which the first end electrode finger is connected.

10. An acoustic wave device comprising:

a first terminal;

a second terminal having a potential that is different from a potential of the first terminal;

a piezoelectric body portion; and

a plurality of interdigital transducer electrodes provided on or above the piezoelectric body portion and electrically connected to the first terminal and the second terminal; wherein

each of the plurality of interdigital transducer electrodes includes:

a first busbar;

a second busbar opposed to the first busbar in a first direction;

a plurality of first electrode fingers connected to the first busbar and extending from the first busbar toward the second busbar in the first direction; and

a plurality of second electrode fingers connected to the second busbar and extending from the second busbar toward the first busbar in the first direction;

the plurality of first electrode fingers and the plurality of second electrode fingers are spaced apart from each other in a second direction perpendicular or substantially perpendicular to the first direction;

at least one electrode finger of the plurality of first electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger, and at least one electrode finger of the plurality of second electrode fingers includes a wide portion having a greater width in the second direction than a center portion, in the first direction, of the at least one electrode finger;

each of the first busbar and the second busbar includes:

an opening portion;

an inner busbar portion located closer to the plurality of first electrode fingers and the plurality of second electrode fingers than the opening portion in the first direction;

an outer busbar portion located across the opening portion from the inner busbar portion in the first direction; and

a coupling portion coupling the inner busbar portion and the outer busbar portion in the first direction;

in at least one interdigital transducer electrode of the plurality of interdigital transducer electrodes, where, of a group of electrode fingers including the plurality of first electrode fingers and the plurality of second electrode fingers, the electrode finger located at one end in the second direction is a first end electrode finger and the electrode finger located at another end is a second end electrode finger, the first end electrode finger is located closer to the interdigital transducer electrode adjacent to the at least one interdigital transducer electrode in the second direction; and

in the at least one interdigital transducer electrode, the outer busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger, is located on an inner side in the second direction relative to the inner busbar portion of one of the first busbar and the second busbar, not connected to the first end electrode finger, at least at a side closer to the adjacent interdigital transducer electrode.