Method of manufacturing magnetic recording medium
A method of manufacturing a magnetic recording medium forms an unfinished product including a magnetic recording layer and a protection layer that are successively formed on a substrate, and forms a lubricant layer on the protection layer of the unfinished product. The lubricant layer is formed by coating a first organic fluorine compound on the protection layer of the unfinished product, and supplying a gas, including a second organic fluorine compound, onto the protection layer of the unfinished product, and decomposing the second organic fluorine compound by Townsend discharge and ultraviolet ray irradiation. The protection layer includes carbon, and the first organic fluorine compound includes a functional group at a terminal thereof.
1. A method of manufacturing a magnetic recording medium, comprising: forming an unfinished product of the magnetic recording medium, including a magnetic recording layer and a protection layer that are successively formed on a substrate; and forming a lubricant layer on a surface of the protection layer of the unfinished product,
wherein the protection layer includes carbon,
wherein the forming the lubricant layer includes coating a first organic fluorine compound on the protection layer of the unfinished product to cause adsorption of the first organic fluorine compound to adsorption sites on the surface of the protection layer via a functional group at a terminal of the first organic fluorine compound, so that the first organic fluorine compound functions as a free layer, and
after the coating, supplying a gas, including a second organic fluorine compound, onto the protection layer of the unfinished product, and decomposing the second organic fluorine compound by Townsend discharge and ultraviolet ray irradiation to cause chemical bonding of a decomposition product of the second organic fluorine compound onto the surface of the protection layer, so that the second organic compound functions as a bond layer,
wherein the first organic fluorine compound has a carboxyl group or a hydroxyl group at one terminal thereof, and wherein the decomposition product of the second organic fluorine compound is in an active state under an environment of the Townsend discharge andthe ultraviolet ray irradiation, and also chemically bonds to locations other than the adsorption sites on the surface of the protection layer.
2. The method of manufacturing the magnetic recording medium as claimed in claim 1 , wherein the first organic fluorine compound has a perfluoropolyether structure, and a weight average molecular weight of 500 or greater.
3. The method of manufacturing the magnetic recording medium as claimed in claim 2 , wherein
the second organic fluorine compound has a perfluoropolyether structure, and a weight average molecular weight of 700 or greater, and
the second organic fluorine compound is decomposed to generate a compound having a weight average molecular weight of 500 or less.
4. The method of manufacturing the magnetic recording medium as claimed in claim 1 , wherein
the second organic fluorine compound has a perfluoropolyether structure, and a weight average molecular weight of 700 or greater, and
the second organic fluorine compound is decomposed to generate a compound having a weight average molecular weight of 500 or less.
5. The method of manufacturing the magnetic recording medium as claimed in claim 1 , wherein
the protection layer is a carbon layer doped with nitrogen, and
the adsorption sites are carbon nitride.
6. The method of manufacturing the magnetic recording medium as claimed in claim 1 , wherein
the protection layer is a carbon layer, and
the adsorption sites are concave or convex portions formed at the surface of the protection layer.
7. The method of manufacturing the magnetic recording medium as claimed in claim 1 , further comprising:
applying an AC bias voltage between the unfinished product of the magnetic recording medium and counter electrodes, thereby applying an AC electric field on opposite surfaces of the unfinished product of the magnetic recording medium.
8. The method of manufacturing the magnetic recording medium as claimed in claim 7 , wherein the applying applies the AC bias voltage to the unfinished product of the magnetic recording medium via a conductive holder which holds the unfinished product of the magnetic recording medium inside a chamber.
9. The method of manufacturing the magnetic recording medium as claimed in claim 7 , further comprising:
adjusting an electric field intensity of the AC electric field so as to generate the Townsend discharge without generating glow discharge plasma between the unfinished product of the magnetic recording medium and the counter electrodes.