IP Library › Granted Patent US 11,502,145
Granted Patent B2
US 11,502,145 · App. 16/899,124 · Granted Nov 15, 2022

Method of forming display electrodes and pixel defining layers without an increase of masks

Inventors: Gwuihyun Park (Yongin-si, KR); Pilsoon Hong (Yongin-si, KR); Chulwon Park (Yongin-si, KR); Koichi Sugitani (Yongin-si, KR); Hyungbin Cho (Yongin-si, KR); Hyein Kim (Yongin-si, KR)
Assignee: SAMSUNG DISPLAY CO., LTD.
H01L27/3246H01L27/322H01L27/3248H01L27/3258H01L27/3276H01L51/0023H01L51/5284H01L51/56H01L51/5206H01L2227/323
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Quick Facts
Patent No.
US 11,502,145
App. No.
16/899,124
Granted
Nov 15, 2022
Kind
B2
Abstract

A method of manufacturing a light-emitting display apparatus and a light-emitting display apparatus are provided. The method includes forming a first photosensitive layer on a conductive material layer, forming a pixel electrode by etching the conductive material layer by using the first photosensitive layer as a mask, ashing the first photosensitive layer disposed on the pixel electrode, forming a pixel defining layer that covers an edge portion of the pixel electrode and includes a first opening overlapping the ashed first photosensitive layer, removing the ashed first photosensitive layer disposed in the first opening, forming an intermediate layer including a functional layer and an emission layer on the pixel defining layer, and forming an opposite electrode on the intermediate layer.

Claims (38)

1. A method of manufacturing a light-emitting display apparatus, the method comprising:

forming a first photosensitive layer on a conductive material layer;

forming a pixel electrode by etching the conductive material layer by using the first photosensitive layer as a mask;

ashing the first photosensitive layer disposed on the pixel electrode;

forming a pixel defining layer that covers an edge portion of the pixel electrode and includes a first opening overlapping the ashed first photosensitive layer;

removing the ashed first photosensitive layer disposed in the first opening;

forming an intermediate layer including a functional layer and an emission layer on the pixel defining layer; and

forming an opposite electrode on the intermediate layer.

2. The method of claim 1 , wherein the forming of the pixel defining layer comprises:

forming a color material layer on the ashed first photosensitive layer;

exposing a part of the color material layer; and

forming the first opening by developing the exposed part of the color material layer.

3. The method of claim 2 , wherein the pixel defining layer comprises a negative photosensitive material.

4. The method of claim 3 , further comprising:

curing the pixel defining layer after the forming of the first opening.

5. The method of claim 3 , wherein the pixel defining layer further comprises a color pigment or carbon black.

6. The method of claim 1 , wherein a shape of the first opening is substantially same as a shape of the pixel electrode in a plan view.

7. The method of claim 1 , further comprising:

forming a thin-film transistor; and

forming an insulating layer between the thin-film transistor and the pixel electrode, wherein

the forming of the insulating layer includes forming a contact hole for electrical connection between the thin-film transistor and the pixel electrode, and

the first opening overlaps the contact hole.

8. The method of claim 7 , further comprising:

forming an optical functional layer comprising a color filter overlapping the first opening and a black matrix adjacent to the color filter, wherein

the black matrix overlaps the contact hole.

9. The method of claim 1 , further comprising:

forming a second photosensitive layer on the conductive material layer; and

forming a wiring by etching the conductive material layer using the second photosensitive layer as a mask.

10. The method of claim 9 , further comprising:

ashing the second photosensitive layer disposed on the wiring, wherein

the forming of the pixel defining layer comprises forming a second opening overlapping the ashed second photosensitive layer and spaced apart from the first opening.

11. The method of claim 10 , further comprising:

removing the ashed second photosensitive layer from the second opening.

12. The method of claim 11 , further comprising:

forming an insulating layer overlapping the second opening and disposed between the wiring and the intermediate layer.

13. The method of claim 11 , further comprising:

forming a hole in a portion of the functional layer, which overlaps the wiring,

wherein the opposite electrode is formed to be in electrical contact with the wiring through the hole.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 11, 2020
From: PARK, GWUIHYUN; HONG, PILSOON; PARK, CHULWON; SUGITANI, KOICHI; CHO, HYUNGBIN; KIM, HYEIN
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 052912/0475 →
Priority Claims (1)
KR 10-2019-0126292 · Oct 11, 2019 · national
Continuity (1)
Related Publication 20210111232A1 · Apr 15, 2021