Fin field effect transistor device structure and method for forming the same
View Patent ↗A method for forming a fin field effect transistor device structure includes forming a fin structure over a substrate. The method also includes forming an isolation structure surrounding the fin structure. The method also includes cleaning sidewalls of the fin structure. The method also includes depositing a silicon cap layer over the fin structure. The method also includes growing an oxide layer over the silicon cap layer. The silicon cap layer is thinned after growing an oxide layer over the silicon cap layer. The method also includes forming a gate structure over the oxide layer across the fin structure. The method also includes growing a source/drain epitaxial structure beside the gate structure. The method also includes forming a contact structure electrically connected to the gate structure.
1. A method for forming a fin field effect transistor device structure, comprising:
forming a fin structure over a substrate;
forming an isolation structure surrounding the fin structure;
cleaning sidewalls of the fin structure;
depositing a silicon cap layer over the fin structure;
growing an oxide layer over the silicon cap layer, wherein the silicon cap layer is thinned after growing an oxide layer over the silicon cap layer;
forming a gate structure over the oxide layer across the fin structure;
growing a source/drain epitaxial structure beside the gate structure; and
forming a contact structure electrically connected to the gate structure,
wherein the silicon cap layer and the fin structure are made of the same material.
2. The method for forming the fin field effect transistor device structure as claimed in claim 1 , further comprising:
trimming the fin structure to narrow the fin structure,
wherein the isolation structure is vertically recessed after trimming the fin structure.
3. The method for forming the fin field effect transistor device structure as claimed in claim 2 , wherein after trimming the fin structure, the fin structure has a curved sidewall adjacent to the top surface of the isolation structure.
4. The method for forming the fin field effect transistor device structure as claimed in claim 1 , wherein after cleaning the sidewalls of the fin structure, the fin structure has a protruding portion adjacent to the top surface of the isolation structure.
5. The method for forming the fin field effect transistor device structure as claimed in claim 1 , further comprising:
forming an amorphous portion of the silicon cap layer over the isolation structure, wherein the amorphous portion of the silicon cap layer is in contact with the silicon cap layer over the fin structure.
6. The method for forming the fin field effect transistor device structure as claimed in claim 5 , wherein while forming an amorphous portion of the silicon cap layer over the isolation structure, the silicon cap layer over the fin structure is crystallized.
7. The method for forming the fin field effect transistor device structure as claimed in claim 5 , further comprising:
re-crystallizing the amorphous portion of the silicon cap layer to a poly-crystalline portion of the silicon cap layer.
8. A method for forming a fin field effect transistor device structure, comprising:
forming a fin structure protruding from a substrate;
forming a liner layer and an isolation structure surrounding the fin structure;
recessing the liner layer and the isolation structure;
growing a cap layer over the fin structure;
forming a first gate dielectric layer covering the cap layer, the liner layer, and the isolation structure, wherein a portion of the cap layer is consumed;
forming a gate structure over the first gate dielectric layer across the fin structure;
growing source/drain epitaxial structures on opposite sides of the gate structure; and
forming a contact structure over the gate structure,
wherein the cap layer and the fin structure are made of the same material.
9. The method for forming the fin field effect transistor device structure as claimed in claim 8 , wherein the cap layer has a first thickness before forming a first gate dielectric layer, the cap layer has a second thickness after forming a first gate dielectric layer, and the first thickness is greater than the second thickness.
10. The method for forming the fin field effect transistor device structure as claimed in claim 8 , wherein the cap layer has a protruding portion covering the liner layer and the isolation structure.
11. The method for forming the fin field effect transistor device structure as claimed in claim 8 , wherein the source/drain epitaxial structures are formed over the cap layer adjacent to the isolation structure.
12. The method for forming the fin field effect transistor device structure as claimed in claim 8 , further comprising:
removing the first gate dielectric layer and recessing the liner layer and the isolation structure; and
forming a second gate dielectric layer covering the fin structure and the isolation structure,
wherein the cap layer protrudes from a sidewall of the fin structure.
13. A method for forming a fin field effect transistor device structure, comprising:
forming a fin structure over a substrate;
forming a liner layer and an isolation structure surrounding a bottom portion of the fin structure;
cleaning the fin structure;
forming a cap layer over the fin structure and the liner layer;
depositing a gate dielectric layer over the cap layer and the isolation structure;
forming a work function layer and a gate electrode layer over the gate dielectric layer across the fin structure; and
forming a contact structure over the gate electrode layer,
wherein a thickness of the cap layer is reduced after depositing the gate dielectric layer, and
wherein the cap layer and the fin structure are made of the same material.
14. The method for forming the fin field effect transistor device structure as claimed in claim 13 ,
wherein a sidewall of the cap layer is aligned with a sidewall of the liner layer after depositing the gate dielectric layer.
15. The method for forming the fin field effect transistor device structure as claimed in claim 13 , wherein the liner layer and the isolation structure is recessed after cleaning the fin structure.
16. The method for forming the fin field effect transistor device structure as claimed in claim 13 , further comprising:
trimming the fin structure before cleaning the fin structure,
wherein the liner layer and the isolation structure is recessed after trimming the fin structure.
17. The method for forming the fin field effect transistor device structure as claimed in claim 16 , wherein the fin structure comprises a protruding portion after cleaning the fin structure, and the cap layer is formed over the protruding portion.
18. The method for forming the fin field effect transistor device structure as claimed in claim 16 , wherein a middle portion of the fin structure is wider than a bottom portion of the fin structure.
19. The method for forming the fin field effect transistor device structure as claimed in claim 13 , further comprising:
removing the gate dielectric layer,
wherein a protruding portion of the fin structure formed after removing the gate dielectric layer is separated from the liner layer.
20. The method for forming the fin field effect transistor device structure as claimed in claim 8 , wherein the cap layer and the fin structure are made of silicon.