Acoustic wave device and acoustic wave module
An acoustic wave device includes a substrate, a functional element provided on the substrate, a cover layer provided on or above the substrate to cover the functional element, and a protection layer that covers the cover layer. The cover layer includes a curved portion that is curved to protrude outward. A hollow space is defined between the curved portion and the substrate, and the functional element is provided in the hollow space. The acoustic wave device also includes a conductive portion that is provided between the curved portion and the protection layer and extends along a surface of the curved portion.
1. An acoustic wave device, comprising:
a substrate;
a functional element provided on the substrate;
a cover layer provided on or above the substrate to cover the functional element; and
a protection layer that covers the cover layer; wherein
the cover layer includes a curved portion that is curved to protrude outward and a flat or substantially flat portion extending along the substrate;
a hollow space is defined between the curved portion and the substrate;
the functional element is provided in the hollow space;
a conductive portion is provided between the curved portion and the protection layer and extends along a surface of the curved portion;
the curved portion includes:
a lower curved portion whose height above the flat or substantially flat portion is less than about H/2, where H denotes a height of the curved portion at a point farther than any other point of the curved portion from the flat or substantially flat portion; and
an upper curved portion whose height above the flat or substantially flat portion is greater than about H/2;
the conductive portion includes a lower conductive portion provided between the lower curved portion and the protection layer and an upper conductive portion provided between the upper curved portion and the protection layer; and
the lower conductive portion has an areal density lower than an areal density of the upper conductive portion.
2. The acoustic wave device according to claim 1 , further comprising:
a wiring that is provided on the substrate and is connected to the functional element; wherein
the conductive portion does not overlap the wiring when viewed in a direction normal or substantially normal to the substrate.
3. The acoustic wave device according to claim 2 , wherein the wiring is exposed at through-holes provided in the cover layer and the protection layer.
4. The acoustic wave device according to claim 1 , wherein the conductive portion has a mesh pattern, a pattern including a plurality of dots, a pattern including a plurality of strips, or a pattern including a plurality of dot-shaped holes.
5. The acoustic wave device according to claim 1 , wherein the conductive portion is ungrounded.
6. The acoustic wave device according to claim 1 , wherein the functional element is an interdigital transducer (IDT) electrode.
7. The acoustic wave device according to claim 1 , wherein the functional element includes a pair of interdigital transducer (IDT) electrodes that define a surface acoustic wave resonator.
8. The acoustic wave device according to claim 1 , wherein the cover layer is a resin film or an inorganic membrane.
9. An acoustic wave module, comprising:
the acoustic wave device according to claim 1 ; and
a second acoustic wave device, wherein
the acoustic wave device and the second acoustic wave device overlap in the direction normal or substantially normal to the substrate.
10. The acoustic wave module according to claim 9 , wherein the functional element of the acoustic wave device and a functional element of the second acoustic wave device overlap in the direction normal or substantially normal to the substrate.
11. The acoustic wave device according to claim 1 , wherein the conductive portion has a solid pattern.
12. The acoustic wave device according to claim 1 , wherein the conductive portion is grounded.
13. The acoustic wave device according to claim 1 , wherein the conductive portion overlaps the functional element when viewed in the direction normal or substantially normal to the substrate.
14. An acoustic wave module comprising:
a first acoustic wave device; and
a second acoustic wave device; wherein
each of the first and second acoustic wave devices includes:
a substrate;
a functional element provided on the substrate;
a cover layer provided on or above the substrate to cover the functional element; and
a protection layer that covers the cover layer;
the cover layer of each of the first and second acoustic wave devices includes a curved portion that is curved to protrude outward and a flat or substantially flat portion extending along the substrate;
a hollow space is defined between the curved portion and the substrate in each of the first and second acoustic wave devices;
the functional element is provided in the hollow space of each of the first and second acoustic wave devices;
the first acoustic wave device overlaps the second acoustic wave device in a direction normal or substantially normal to the substrate;
a conductive portion is provided between the protection layer and at least one of the curved portion of the first acoustic wave device and the curved portion of the second acoustic wave device and extends along a surface of the curved portion;
the curved portion which the conductive portion extends along the surface of includes:
a lower curved portion whose height above the flat or substantially flat portion is less than about H/2, where H denotes a height of the curved portion at a point farther than any other point of the curved portion from the flat or substantially flat portion; and
an upper curved portion whose height above the flat or substantially flat portion is greater than about H/2;
the conductive portion includes a lower conductive portion provided between the lower curved portion and the protection layer and an upper conductive portion provided between the upper curved portion and the protection layer; and
the lower conductive portion has an areal density lower than an areal density of the upper conductive portion.