Open Czochralski furnace for single crystal growth
View Patent ↗The present disclosure provides an open Czochralski furnace for single crystal growth. The crystal growth apparatus may include a furnace chamber which includes a furnace body and a furnace cover. The furnace cover may be mounted on a top of the furnace body. The furnace cover may include a first through hole. The first through hole may be configured to place a temperature field. The crystal growth apparatus in the present disclosure can solve a problem that a traditional vacuum furnace needs to firstly pump a high vacuum and secondly recharge a protecting gas, thereby improving the apparatus safety; simplify the structure of the furnace body such that components that need maintenance and repair can be disassembled quickly, thereby reducing manufacturing and maintenance costs; improve the operation accuracy and stability of the apparatus; and reduce the influence of heat convection on the stability of weighing signals in the open furnace.
1. An apparatus for crystal growth, comprising:
a furnace chamber including a furnace body and a furnace cover, wherein
the furnace cover is mounted on a top of the furnace body,
the furnace cover includes a first through hole, and
the first through hole is configured to place a temperature field device,
wherein a cooling structure is mounted on a sidewall of the furnace body and the furnace cover.
2. The apparatus of claim 1 , wherein the cooling structure mounted on the furnace cover includes at least one circle of square copper tube, a cooling medium passing through the square copper tube.
3. The apparatus of claim 1 , wherein
the temperature field device includes a sealing drum, a cover plate mounted on a top of the sealing drum, and a bottom plate mounted on a bottom of the sealing drum, the cover plate including a second through hole; and
the apparatus further comprises:
a furnace frame, the furnace chamber being mounted on the furnace frame;
a pulling rod component that passes through the second through hole and extends into the temperature field device; and
a heater mounted between the furnace chamber and the temperature field device.
4. The apparatus of claim 3 , wherein the apparatus further comprises:
a pulling component configured to drive the pulling rod component to move up and down; and
a rotating component configured to drive the pulling rod component to rotate.
5. The apparatus of claim 4 , wherein the pulling component includes a pillar, a slide, a screw rod, and a first driving device, wherein:
the first driving device is mounted on a top of the pillar;
a slide rail is mounted on the pillar;
the screw rod is mounted in parallel with the slide rail, and one end of the screw rod is connected to the first driving device;
the slide is nested on the screw rod and fit with the screw rod by threads, at least a part of the slide is located within a slide chute, and a rotation of the screw rod drives the slide to move up and down along the slide chute; and
the rotating component is mounted on the slide.
6. The apparatus of claim 5 , wherein the apparatus further comprises:
a weighing component configured to determine a weight of a crystal on the pulling rod component, the weighing component being mounted on the slide.
7. The apparatus of claim 6 , wherein the rotating component at least includes a second driving device and a transmission component, wherein
the second driving device drives the weighing component to rotate through the transmission component.
8. The apparatus of claim 7 , wherein the weighing component includes a weighing chamber and a weighing sensor, wherein:
the weighing sensor is mounted inside the weighing chamber;
one end of the weighing sensor is fixedly connected to the pulling rod component; and
the other end of the weighing sensor is fixedly connected to a cover plate of the weighing chamber.
9. The apparatus of claim 8 , wherein:
the transmission component includes a belt pulley and a belt;
an output spin axis of the second driving device is connected to a spin axis of the belt pulley; and
at least one belt pulley is mounted on the belt and the weighing chamber.
10. The apparatus of claim 9 , wherein the pulling rod component at least includes a middle rod and a guide rod, wherein:
one end of the middle rod is fixedly connected to the weighing chamber;
the middle rod passes through a third through hole mounted on the slide;
the middle rod includes a hollow structure;
the guide rod passes through the middle rod; and
one end of the guide rod is connected to the weighing sensor and the other end of the guide rod is configured to connect a seed rod.
11. The apparatus of claim 1 , wherein the temperature field device includes a bottom plate, a cover plate, a drum, and a filler, wherein:
the bottom plate is mounted on a bottom of the temperature field device and covers an open end of the drum;
the cover plate is mounted on a top of the temperature field device and covers the other open end of the drum; and
the filler is filled in the drum.
12. The apparatus of claim 1 , wherein the temperature field device includes a bottom plate, a first cover plate, a second cover plate, a first drum, a second drum, and a filler; wherein
the bottom plate is mounted on a bottom of the temperature field device and covers an open end of the first drum;
the first cover plate is mounted on a top of the temperature field device and covers the other open end of the first drum;
the second drum is mounted inside the first drum;
the filler is filled in the second drum and/or a space between the second drum and the first drum; and
the first cover plate and the second cover plate include through holes.
13. The apparatus of claim 12 , wherein
the filler includes a granule shaped material, a brick shaped material, and/or a felt shaped material; and
the filler is made of a heat resistant material.
14. The apparatus of claim 13 , wherein the filler includes at least one of a zircon sand, a zirconia particle, an alumina particle, a zirconia felt, a zirconia brick, or an alumina brick.
15. The apparatus of claim 12 , wherein the first drum includes a quartz tube, a corundum tube; or
the first drum is made of a heat resistant material.
16. An apparatus for crystal growth, comprising:
a furnace chamber including a furnace body and a furnace cover, wherein
the furnace cover is mounted on a top of the furnace body,
the furnace cover includes a first through hole, and
the first through hole is configured to place a temperature field device,
wherein the temperature field device includes a sealing drum, a cover plate mounted on a top of the sealing drum, and a bottom plate mounted on a bottom of the sealing drum, the cover plate including a second through hole; and
the apparatus further comprises:
a furnace frame, the furnace chamber being mounted on the furnace frame;
a pulling rod component that passes through the second through hole and extends into the temperature field device; and
a heater mounted between the furnace chamber and the temperature field device.
17. The apparatus of claim 16 , wherein the apparatus further comprises:
a pulling component configured to drive the pulling rod component to move up and down; and
a rotating component configured to drive the pulling rod component to rotate.
18. The apparatus of claim 17 , wherein the pulling component includes a pillar, a slide, a screw rod, and a first driving device, wherein:
the first driving device is mounted on a top of the pillar;
a slide rail is mounted on the pillar;
the screw rod is mounted in parallel with the slide rail, and one end of the screw rod is connected to the first driving device;
the slide is nested on the screw rod and fit with the screw rod by threads, at least a part of the slide is located within a slide chute, and a rotation of the screw rod drives the slide to move up and down along the slide chute; and
the rotating component is mounted on the slide.
19. The apparatus of claim 18 , wherein the apparatus further comprises:
a weighing component configured to determine a weight of a crystal on the pulling rod component, the weighing component being mounted on the slide.
20. An apparatus for crystal growth, comprising:
a furnace chamber including a furnace body and a furnace cover, wherein
the furnace cover is mounted on a top of the furnace body,
the furnace cover includes a first through hole, and
the first through hole is configured to place a temperature field device,
wherein the temperature field device includes a bottom plate, a cover plate, a drum, and a filler, wherein:
the bottom plate is mounted on a bottom of the temperature field device and covers an open end of the drum;
the cover plate is mounted on a top of the temperature field device and covers the other open end of the drum; and
the filler is filled in the drum.