IP Library Granted Patent US 11,322,189
Granted Patent B2
US 11,322,189 · App. 16/904,080 · Granted May 3, 2022

Magnetic memory device

Inventor: Masatoshi Yoshikawa (Seoul, KR)
Assignee: KIOXIA CORPORATION
G11C11/161H01L43/02H01L43/08H01L43/10
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Quick Facts
Patent No.
US 11,322,189
App. No.
16/904,080
Granted
May 3, 2022
Kind
B2
Abstract

According to one embodiment, a magnetic memory device includes a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer between the first magnetic layer and the second magnetic layer, wherein the first magnetic layer includes a first sub-magnetic layer, a second sub-magnetic layer, and a first intermediate layer between the first sub-magnetic layer and the second sub-magnetic layer, and the first sub-magnetic layer is provided between the nonmagnetic layer and the second sub-magnetic layer and has a magnetization direction antiparallel to a magnetization direction of the second sub-magnetic layer and has a magnetization amount smaller than that of the second sub-magnetic layer.

Claims (43)

1. A magnetic memory device comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer,

wherein:

the first magnetic layer includes a first sub-magnetic layer, a second sub-magnetic layer, a third sub-magnetic layer, a first intermediate layer provided between the first sub-magnetic layer and the second sub-magnetic layer, and a second intermediate layer provided between the second sub-magnetic layer and the third sub-magnetic layer,

the first sub-magnetic layer is provided between the nonmagnetic layer and the second sub-magnetic layer and has a magnetization direction that is antiparallel to a magnetization direction of the second sub-magnetic layer and has a magnetization amount that is smaller than a magnetization amount of the second sub-magnetic layer,

the third sub-magnetic layer has a magnetization direction that is antiparallel to the magnetization direction of the second sub-magnetic layer, and

the second sub-magnetic layer is provided between the first sub-magnetic layer and the third sub-magnetic layer.

2. The device according to claim 1 , wherein the third sub-magnetic layer has a magnetization amount that is smaller than the magnetization amount of the second sub-magnetic layer.

3. The device according to claim 1 , wherein a sum of the magnetization amount of the first sub-magnetic layer and a magnetization amount of the third sub-magnetic layer is equal to the magnetization amount of the second sub-magnetic layer.

4. The device according to claim 1 , further comprising:

a third magnetic layer having a fixed magnetization direction that is antiparallel to the magnetization direction of the second magnetic layer, the third magnetic layer canceling a magnetic field applied from the second magnetic layer to the first magnetic layer.

5. The device according to claim 1 , wherein the first sub-magnetic layer and the second sub-magnetic layer contain at least cobalt (Co).

6. The device according to claim 1 , wherein the first intermediate layer contains at least one element selected from ruthenium (Ru), rhodium (Rh), osmium (Os), and iridium (Ir).

7. A magnetic memory device comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer,

wherein:

the first magnetic layer includes a first sub-magnetic layer, a second sub-magnetic layer, a third sub-magnetic layer, a first intermediate layer provided between the first sub-magnetic layer and the second sub-magnetic layer, and a second intermediate layer provided between the second sub-magnetic layer and the third sub-magnetic layer,

the first sub-magnetic layer is provided between the nonmagnetic layer and the second sub-magnetic layer and has a magnetization direction that is antiparallel to a magnetization direction of the second sub-magnetic layer and has a thickness that is smaller than a thickness of the second sub-magnetic layer,

the third sub-magnetic layer has a magnetization direction that is antiparallel to the magnetization direction of the second sub-magnetic layer, and

the second sub-magnetic layer is provided between the first sub-magnetic layer and the third sub-magnetic layer.

8. The device according to claim 7 , wherein the third sub-magnetic layer has a thickness that is smaller than the thickness of the second sub-magnetic layer.

9. The device according to claim 7 , further comprising:

a third magnetic layer having a fixed magnetization direction that is antiparallel to a magnetization direction of the second magnetic layer, the third magnetic layer canceling a magnetic field applied from the second magnetic layer to the first magnetic layer.

10. The device according to claim 7 , wherein the first sub-magnetic layer and the second sub-magnetic layer contain at least cobalt (Co).

11. The device according to claim 7 , wherein the first intermediate layer contains at least one element selected from ruthenium (Ru), rhodium (Rh), osmium (Os), and iridium (Ir).

12. A magnetic memory device comprising:

a first magnetic layer having a variable magnetization direction;

a second magnetic layer having a fixed magnetization direction; and

a nonmagnetic layer provided between the first magnetic layer and the second magnetic layer,

wherein:

the first magnetic layer includes a first sub-magnetic layer, a second sub-magnetic layer, a third sub-magnetic layer, a first intermediate layer provided between the first sub-magnetic layer and the second sub-magnetic layer, and a second intermediate layer provided between the second sub-magnetic layer and the third sub-magnetic layer,

the first sub-magnetic layer is provided between the nonmagnetic layer and the second sub-magnetic layer and has a magnetization direction that is antiparallel to a magnetization direction of the second sub-magnetic layer and has a saturation magnetization that is smaller than a saturation magnetization of the second sub-magnetic layer,

the third sub-magnetic layer has a magnetization direction that is antiparallel to the magnetization direction of the second sub-magnetic layer, and

the second sub-magnetic layer is provided between the first sub-magnetic layer and the third sub-magnetic layer.

13. The device according to claim 12 , wherein the third sub-magnetic layer has a saturation magnetization that is smaller than the saturation magnetization of the second sub-magnetic layer.

14. The device according to claim 12 , further comprising:

a third magnetic layer having a fixed magnetization direction that is antiparallel to a magnetization direction of the second magnetic layer, the third magnetic layer canceling a magnetic field applied from the second magnetic layer to the first magnetic layer.

15. The device according to claim 12 , wherein the first sub-magnetic layer and the second sub-magnetic layer contain at least cobalt (Co).

16. The device according to claim 12 , wherein the first intermediate layer contains at least one element selected from ruthenium (Ru), rhodium (Rh), osmium (Os), and iridium (Ir).

Assignments (2)
CHANGE OF NAME Recorded Feb 15, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059110/0850 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 17, 2020
From: YOSHIKAWA, MASATOSHI
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 052966/0210 →
Priority Claims (1)
JP JP2018-049873 · Mar 16, 2018 · national
Continuity (2)
Division 16126823 · Sep 10, 2018
Related Publication 20200321040A1 · Oct 8, 2020
Cited By (1)
US 12,243,572