IP Library › Granted Patent US 12,170,244
Granted Patent B2
US 12,170,244 · App. 16/914,062 · Granted Dec 17, 2024

High-throughput additively manufactured power delivery vias and traces

Inventors: Adel Elsherbini (Tempe, AZ); Feras Eid (Chandler, AZ); Georgios Dogiamis (Chandler, AZ); Henning Braunisch (Phoenix, AZ); Beomseok Choi (Chandler, AZ); William J. Lambert (Tempe, AZ); Stephen Morein (Chandler, AZ); Ahmed Abou-Alfotouh (Chandler, AZ); Johanna Swan (Scottsdale, AZ)
Assignee: Intel Corporation
H01L23/5226H01L21/76879H01L23/53228H05K1/115H05K3/14
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,170,244
App. No.
16/914,062
Granted
Dec 17, 2024
Kind
B2
Abstract

An integrated circuit (IC) die package substrate comprises a first trace upon, or embedded within, a dielectric material. The first trace comprises a first metal and a first via coupled to the first trace. The first via comprises the first metal and a second trace upon, or embedded within, the dielectric material. A second via is coupled to the second trace, and at least one of the second trace or the second via comprises a second metal with a different microstructure or composition than the first metal.

Claims (48)

1. An integrated circuit (IC) die package substrate comprising:

a first trace upon, or embedded within, a dielectric material, wherein the first trace comprises a first metal;

a first via coupled to the first trace, wherein the first via comprises the first metal;

a second trace upon, or embedded within, the dielectric material; and

a second via coupled to the second trace, wherein at least one of the second trace or the second via comprises a second metal with a different microstructure or composition than the first metal, wherein the second metal has a greater void % area than the first metal and wherein the second metal has a void % area of at least 0.1%.

2. The IC die package substrate of claim 1 , wherein:

the first trace has a first thickness;

the first via has a first diameter; and

at least a first portion of the second trace has a second thickness, greater than the first thickness, or the second via has a second diameter greater than the first diameter.

3. The IC die package substrate of claim 2 , wherein the first metal and the second metal both comprise predominantly Cu, and the second metal has a void % area of at least 0.5%.

4. The IC die package substrate of claim 2 , wherein the first portion of the second trace comprises a stack of both the first thickness of the first metal and a third thickness of the second metal.

5. The IC die package substrate of claim 4 , wherein:

the first trace is over a second portion of the second trace lacking the second metal; and

the second metal is laterally adjacent to the first trace.

6. The IC die package substrate of claim 5 , wherein the first trace is non-parallel to the second trace, the second portion of the second trace has only the first thickness of the first metal, and wherein:

the second trace has a first length, the first portion has a second length and the second portion has a third length, larger than a width of the first trace.

7. The IC die package substrate of claim 2 , wherein:

the first trace is within a lower-level conductor plane embedded within the dielectric material;

the first trace is coupled by the first via to a first one of a first plurality of interconnect features arrayed within an upper-level conductor plane;

the second trace is within an upper-level conductor plane, and at least a portion of the second trace has the second thickness; and

the second trace extends between a second one of the first plurality of interconnect features and a first one of a second plurality of interconnect features within the upper-level conductor plane.

8. The IC die package substrate of claim 2 , wherein the second via has the second diameter, which exceeds 100 microns in width and depth, and comprises the second metal.

9. The IC die package substrate of claim 8 , wherein:

the first trace is within a first lower-level conductor plane embedded within the dielectric material;

the first via is between the first trace and a second trace within a second lower-level conductor plane, below the first lower-level conductor plane; and

the second via extends from an upper-level conductor plane, over the first lower-level conductor plane, to the second lower-level conductor plane.

10. The IC die package substrate of claim 9 , further comprising:

a third via comprising the second metal, wherein the third via extends from the upper-level conductor plane, to a third lower-level conductor plane, below the second lower-level conductor plane.

11. The IC die package substrate of claim 8 , wherein the second via extends from a surface on a first side of the substrate to either a lower-level conductor plane or to a discrete metal slug embedded within the substrate.

12. The IC die package substrate of claim 11 , wherein the second metal comprises a concave surface recess to receive an interconnect pin of a host component within the recess.

13. The IC die package substrate of claim 12 , wherein:

the second via further comprises a surface finish within the recess and in contact with the second metal; and

the surface finish comprises a third metal having a lower bulk modulus than the second metal.

14. An electronic device comprising:

an integrated circuit (IC) die package substrate comprising:

a first trace upon, or embedded within, a dielectric material, wherein the first trace comprises a first metal;

a first via coupled to the first trace, wherein the first via comprises the first metal;

a second trace upon, or embedded within, the dielectric material; and

a second via coupled to the second trace, wherein at least one of the second trace or the second via comprises a second metal with a different microstructure or composition than the first metal and a greater void % area than the first metal, wherein the second metal has a void % area of at least 0.5%;

a first IC die interconnected to a first side of the package substrate, wherein:

the first IC die has a signal I/O plane electrically coupled to the first trace; and

the first IC die has a power plane electrically coupled to the second trace.

15. The electronic device of claim 14 , further comprising a second IC die interconnected to the first side of the package substrate, and wherein the second trace electrically couples together a power plane of each of the first and second IC dies.

16. The electronic device of claim 15 , wherein:

the first IC die comprises a voltage regulation circuitry;

the second IC die comprises microprocessor circuitry; and

the second trace is to convey power output from the voltage regulation circuitry to the power plane of the microprocessor circuitry.

17. The electronic device of claim 14 , further comprising a printed circuit board (PCB) interconnected to a second side of the package substrate, wherein the second via comprises the second metal having a width and a depth exceeding 100 microns, and wherein a socket pin of the PCB is embedded within a recess of the second metal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 14, 2023
From: ELSHERBINI, ADEL; EID, FERAS; DOGIAMIS, GEORGIOS; BRAUNISCH, HENNING; CHOI, BEOMSEOK; LAMBERT, WILLIAM J.; MOREIN, STEPHEN; ABOU-ALFOTOUH, AHMED; SWAN, JOHANNA
To: INTEL CORPORATION
Reel/Frame 064263/0495 →
Continuity (1)
Related Publication 20210407903A1 · Dec 30, 2021