Semiconductor device and method for fabricating the same
A method for fabricating semiconductor device includes the steps of first forming a gate structure on a substrate, forming a spacer adjacent to the gate structure, forming a recess adjacent to the spacer, trimming part of the spacer, and then forming an epitaxial layer in the recess. Preferably, the semiconductor device includes a first protrusion adjacent to one side of the epitaxial layer and a second protrusion adjacent to another side of the epitaxial layer, the first protrusion includes a V-shape under the spacer and an angle included by the V-shape is greater than 30 degrees and less than 90 degrees.
1. A semiconductor device, comprising:
a gate structure on a substrate;
a first spacer adjacent to and directly contacting the gate structure and a second spacer adjacent to the first spacer;
a first epitaxial layer adjacent to the second spacer;
a second epitaxial layer on the first epitaxial layer and contacting a bottom surface of the second spacer directly, wherein a bottom surface of the second epitaxial layer comprises a first V-shape, a top surface of the second epitaxial layer comprises a second V-shape, and the top surface of the second epitaxial layer is even with a bottom surface of the first spacer; and
a third epitaxial layer on the second epitaxial layer and contacting a sidewall of the second spacer directly.
2. The semiconductor device of claim 1 , wherein the first epitaxial layer and second epitaxial layer comprise dopants of opposite conductive type.
3. The semiconductor device of claim 1 , wherein the second epitaxial layer and third epitaxial layer comprise dopants of opposite conductive type.
4. The semiconductor device of claim 1 , wherein the first V-shape is directly under the second spacer.