Method of manufacturing a flow measuring device having a rotatable member patterned within a chamber
A method of manufacturing a flow measuring device having a rotatable element includes patterning an adhesive layer disposed on a first surface of a first sheet of a flexible material to remove portions of the adhesive layer in an area to define a location for a rotatable element, patterning the first sheet to define the rotatable element in the first sheet, adhering a pair of membrane layers of a second flexible material, to opposing surfaces of the patterned first sheet, with each of the pair of membrane layers having an electrically conductive layer on a surface thereof, patterning the electrically conductive layer to provide an electrode on each of the pair of membrane layers, and adhering a pair of sealing layers to surfaces of the pair of membrane layers.
1. A method of manufacturing a flow measuring device having a rotatable element, the method comprising:
patterning an adhesive layer disposed on a first surface of a first sheet of a flexible material to remove portions of the adhesive layer in an area to define a location for a rotatable element;
patterning the first sheet to define the rotatable element in the first sheet;
adhering a pair of membrane layers of a second flexible material, to opposing surfaces of the patterned first sheet, with each of the pair of membrane layers having an electrically conductive layer on a surface thereof;
patterning the electrically conductive layer to provide an electrode on each of the pair of membrane layers; and
adhering a pair of sealing layers to surfaces of the pair of membrane layers.
2. The method of claim 1 wherein patterning the first sheet further comprises:
patterning one area of the first sheet to define a chamber and an axle element, the rotatable element disposed about the axle element, with the rotatable element spaced from the interior wall of the chamber by a first gap and spaced from the axle element by a second gap, and having a first set of bridge elements that tether the rotatable element to the body member and a second set of bridge elements that tether the rotatable element to the axle member.
3. The method of claim 2 wherein the flow measuring device is a flow sensor, and patterning the first sheet further comprises:
patterning the first sheet to produce a pair of ports through the body element that provide a pair of passageways into the chamber.
4. The method of claim 3 wherein after adhering at least one of the sealing layers the method further comprises:
removing the first and second set of bridges.
5. The method of claim 4 , wherein the method further comprises:
forming an interrupter element on the wheel.
6. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming a symmetric patterned conductor on the wheel to provide the interrupter element.
7. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming an asymmetric patterned conductor on the wheel to provide the interrupter element.
8. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming a symmetric pattern of holes through the wheel to provide the interrupter element.
9. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming an asymmetric pattern of holes through the wheel to provide the interrupter element.
10. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming a symmetric pattern of conductive dots on the wheel to provide the interrupter element.
11. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming an asymmetric pattern of conductive dots on the wheel to provide the interrupter element.
12. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming a symmetric pattern of conductive stripes on the wheel to provide the interrupter element.
13. The method of claim 5 wherein forming the interrupter element on the wheel further comprises:
forming an asymmetric pattern of conductive stripes on the wheel to provide the interrupter element.
14. The method of claim 1 wherein the rotatable element is a wheel.
15. The method of claim 1 wherein the rotatable element is a wheel, with the wheel comprising a plurality of spaced blades that radially emanate from a central portion of the wheel.
16. The method of claim 1 wherein the flow measuring device is a flow sensor, the rotatable element is a wheel having plural blades, and the method further comprises:
forming an interrupter feature on the wheel.
17. The method of claim 16 wherein the interrupter feature on the rotatable element is symmetric to provide a measure of fluid flow.
18. The method of claim 17 wherein the interrupter feature on the rotatable element is asymmetric to provide a measure of fluid flow and fluid flow direction.
19. The method of claim 1 wherein the flow measuring device is a flow sensor, and the method further comprises:
thinning at least one major surface of the rotatable element; and
forming an interrupter feature on one of the major surfaces of the rotatable element.