Three-dimensional memory device including a peripheral circuit and a memory stack
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a peripheral circuit on the substrate, a memory stack including interleaved conductive layers and dielectric layers above the peripheral circuit, a first semiconductor layer above the memory stack, a second semiconductor layer above and in contact with the first semiconductor layer, a plurality of channel structures each extending vertically through the memory stack and the first semiconductor layer, and an insulating structure extending vertically through the memory stack, the first semiconductor layer, and the second semiconductor layer.
1. A three-dimensional (3D) memory device, comprising:
a peripheral circuit;
a memory stack comprising interleaved conductive layers and dielectric layers above the peripheral circuit;
a first semiconductor layer above the memory stack;
a second semiconductor layer above and in contact with the first semiconductor layer;
a plurality of channel structures each extending vertically through the memory stack and the first semiconductor layer; and
an insulating structure extending vertically through the memory stack, the first semiconductor layer, and the second semiconductor layer,
wherein the insulating structure extends laterally to separate the plurality of channel structures into a plurality of blocks.
2. The 3D memory device of claim 1 , wherein an upper end of the insulating structure is flush with a top surface of the second semiconductor layer.
3. The 3D memory device of claim 2 , wherein the upper end of the insulating structure is above upper ends of each of the plurality of channel structures.
4. The 3D memory device of claim 1 , wherein the insulating structure is filled with one or more dielectric materials.
5. The 3D memory device of claim 1 , wherein each of the plurality of channel structures extends vertically into the second semiconductor layer.
6. The 3D memory device of claim 1 , wherein the second semiconductor layer comprises single crystalline silicon.
7. The 3D memory device of claim 1 , wherein the first semiconductor layer comprises polysilicon.
8. The 3D memory device of claim 1 , wherein the first semiconductor layer is an N-typed doped semiconductor layer, and the second semiconductor layer is an N-type doped semiconductor layer.
9. The 3D memory device of claim 1 , wherein the first semiconductor layer is an N-typed doped semiconductor layer, and the second semiconductor layer is a P-type doped semiconductor layer.
10. The 3D memory device of claim 1 , further comprising a source contact below and in contact with the first semiconductor layer, such that the first semiconductor layer is electrically connected to the peripheral circuit through at least the source contact.
11. The 3D memory device of claim 1 , further comprising a bonding interface between the peripheral circuit and the memory stack.
12. The 3D memory device of claim 1 , further comprising:
a contact through the second semiconductor layer; and
an interconnect layer above the second semiconductor layer and comprising a contact pad electrically connected to the peripheral circuit through at least the contact.
13. A three-dimensional (3D) memory device, comprising:
a first semiconductor structure comprising a peripheral circuit;
a second semiconductor structure comprising:
a memory stack comprising interleaved conductive layers and dielectric layers;
a doped semiconductor layer;
a plurality of channel structures each extending vertically through the memory stack into the doped semiconductor layer and electrically connected to the peripheral circuit; and
an insulating structure extending vertically through the memory stack and the doped semiconductor layer, each array region being separated by the insulating structure in a third direction into a plurality of blocks, the first direction, the second direction, and the third direction are three orthogonal directions, and the insulating structure extending in the first direction and the second direction entirely through the memory stack and the doped semiconductor layer to separate the plurality of channel structures into the plurality of blocks; and
a bonding interface between the first semiconductor structure and the second semiconductor structure.
14. The 3D memory device of claim 13 , wherein the doped semiconductor layer comprises a first N-type doped semiconductor layer comprising polysilicon and a second N-type doped semiconductor layer comprising single crystalline silicon.
15. The 3D memory device of claim 13 , wherein the doped semiconductor layer comprises a first N-type doped semiconductor layer comprising polysilicon and a P-type doped semiconductor layer comprising single crystalline silicon.
16. The 3D memory device of claim 14 , wherein each of the plurality of channel structures extends vertically through the first N-type doped semiconductor layer.
17. The 3D memory device of claim 13 , wherein an upper end of the insulating structure is flush with a top surface of the doped semiconductor layer.
18. The 3D memory device of claim 13 , wherein the insulating structure is filled with one or more dielectric materials.
19. The 3D memory device of claim 13 , wherein the second semiconductor structure further comprises a source contact vertically between the bonding interface and the doped semiconductor layer, the source contact being in contact with the doped semiconductor layer, such that the doped semiconductor layer is electrically connected to the peripheral circuit through at least the source contact.
20. The 3D memory device of claim 17 , wherein the upper end of the insulating structure is above upper ends of each of the plurality of channel structures.