Ceramic heater
A ceramic heater includes a ceramic plate in which inner circumferential side and outer circumferential side resistance heating elements are built in; and a cylindrical shaft joined to a rear surface of the ceramic plate. The long hole extends from a start point of the ceramic plate to a terminal position of the outer circumferential portion of the ceramic plate. The entrance portion of the long hole is a long groove. The long groove is provided to extend from the start point to an extended area. Terminals are provided at positions other than the long groove and in a shaft inside area.
1. A ceramic heater comprising:
a disc-shaped ceramic plate having a wafer mounting surface, the disc-shaped ceramic plate being divided into a small inner circumferential side zone and a circular ring-shaped outer circumferential side zone that surrounds the small inner circumferential side zone;
a cylindrical shaft having a small diameter portion and a large diameter portion, which has a diameter that is larger than the diameter of the small diameter portion, having an end face joined to a rear surface of the ceramic plate, the rear surface being on an opposite side of the wafer mounting surface;
an inner circumferential side resistance heating element which is embedded in the small inner circumferential size zone of the ceramic plate;
an outer circumferential side resistance heating element which is embedded in the circular ring-shaped outer circumferential side zone of the ceramic plate;
attached components including a pair of terminals of the inner circumferential side resistance heating element and a pair of terminals of the outer circumferential side resistance heating element; and
a hole extending from a start point in an inside area of the small diameter portion of the rear surface of the ceramic plate to a predetermined terminal position of the circular ring-shaped outer circumferential side zone of the ceramic plate;
wherein an internal space of the cylindrical shaft has a circular cylinder shaped space having a diameter equal to an inner diameter of the small diameter portion, and a ring-shaped extended space which is on an outer side of the circular cylinder shaped space and surrounded by the large diameter portion,
an entrance portion of the hole is groove,
the groove is provided to extend from the start point to an extended area within the ring-shaped extended space of the rear surface of the ceramic plate,
the attached components are provided at a position other than the groove and within the inside area of the small diameter portion of the rear surface of the ceramic plate;
the groove is used to arrange a curved portion included in a thermocouple guide having a vertical portion extending in a vertical direction with respect to the wafer mounting surface, the curved portion being configured to change a direction from the vertical direction to a horizontal direction; and
an outer diameter of the curved portion of the thermocouple guide is smaller than an outer diameter of the vertical portion.
2. The ceramic heater according to claim 1 ,
wherein the groove is provided along a radial direction of the ceramic plate.
3. The ceramic heater according to claim 1 ,
wherein the groove is provided along a direction deviated from a radial direction of the ceramic plate.
4. The ceramic heater according to claim 1 ,
wherein the hole is a thermocouple insertion hole in which a thermocouple is inserted.
5. The ceramic heater according to claim 1 , further comprising
the thermocouple guide arranged in the groove.
6. The ceramic heater according to claim 5 , further comprising
a thermocouple inserted in the thermocouple guide and the hole.
7. The ceramic heater according to claim 6 ,
wherein a temperature sensing part of the thermocouple is arranged to fall within a width of the outer circumferential side resistance heating element when the ceramic plate is viewed from the rear surface.
8. The ceramic heater according to claim 7 ,
wherein the temperature sensing part of the thermocouple is a convex curved face, and a portion of the terminal face of the hole is a concave curved face, the portion being in contact with the temperature sensing part of the thermocouple.
9. The ceramic heater according to claim 1 ,
wherein the hole is a hole with a substantially quadrilateral cross section, and a boundary portion between a ceiling face and a lateral face of the hole is a R-face with a curvature radius of 0.5 mm or greater.
10. The ceramic heater according to claim 1 ,
wherein the hole has a tapered portion in a middle of a path from the start point to the terminal position, a portion from the start point to one end of the tapered portion is a wide width portion, and a portion from the other end of the tapered portion to the terminal position is a narrow width portion.
11. The ceramic heater according to claim 1 ,
wherein a ceiling face of the hole has an inclined step in a middle of a path from the start point to the terminal position, and a depth of the ceiling face from the start point to the step is greater than a depth from the step to the terminal position.
12. The ceramic heater according to claim 1 ,
wherein a gap between the groove and each of the attached components is 2 mm or greater.
13. The ceramic heater according to claim 1 ,
wherein a wall, on a side of the start point, of the hole is curved from the rear surface of the ceramic plate toward a back of the hole.