Semiconductor device structure with magnetic element
A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a magnetic element over the semiconductor substrate. The magnetic element has a first edge. The semiconductor device structure also includes an adhesive element between the magnetic element and the semiconductor substrate, and the adhesive element has a second edge. The semiconductor device structure further includes an isolation element extending across the magnetic element. The isolation element partially covers a top surface of the magnetic element and partially covers sidewall surfaces of the magnetic element. The isolation element has a third edge, and the second edge is closer to the third edge than the first edge. In addition, the semiconductor device structure includes a conductive line over the isolation element.
1. A semiconductor device structure, comprising:
a semiconductor substrate;
a magnetic element over the semiconductor substrate, wherein the magnetic element has a first edge;
an adhesive element between the magnetic element and the semiconductor substrate, wherein the adhesive element has a second edge;
an isolation element extending across the magnetic element, wherein the isolation element partially covers a top surface of the magnetic element and partially covers sidewall surfaces of the magnetic element, the isolation element has a third edge, and the second edge is closer to the third edge than the first edge; and
a conductive line over the isolation element.
2. The semiconductor device structure as claimed in claim 1 , wherein the second edge is laterally between the first edge and the third edge.
3. The semiconductor device structure as claimed in claim 1 , wherein the adhesive element extends exceeding an interface between the magnetic element and the isolation element.
4. The semiconductor device structure as claimed in claim 1 , wherein the adhesive element is in direct contact with the isolation element.
5. The semiconductor device structure as claimed in claim 1 , wherein the adhesive element comprises titanium, aluminum, copper, or a combination thereof.
6. The semiconductor device structure as claimed in claim 1 , further comprising a protective layer and an etch stop layer between the magnetic element and the adhesive element.
7. The semiconductor device structure as claimed in claim 1 , wherein the magnetic element comprises multiple sub-layers, and each sub-layers is larger than another sub-layer above it.
8. The semiconductor device structure as claimed in claim 7 , wherein a topmost sub-layer of the sub-layers has a first portion and a second portion, the second portion surrounds the first portion, and the first portion is thicker than the second portion.
9. The semiconductor device structure as claimed in claim 1 , wherein the isolation element, the adhesive layer, and the conductive line together surround a hole.
10. The semiconductor device structure as claimed in claim 1 , wherein the isolation element is wider than the conductive line.
11. A semiconductor device structure, comprising:
a semiconductor substrate;
a magnetic stack over the semiconductor substrate;
an isolation element extending along a top surface and sidewalls of the magnetic stack, wherein the isolation element partially covers the magnetic stack and extends exceeding an edge of the magnetic stack; and
a conductive line over the isolation element.
12. The semiconductor device structure as claimed in claim 11 , further comprising an adhesive layer between the magnetic element and the semiconductor substrate.
13. The semiconductor device structure as claimed in claim 11 , wherein the isolation element covers an entirety of a top surface of the adhesive layer.
14. The semiconductor device structure as claimed in claim 11 , wherein the adhesive layer is separated from the conductive line by a hole.
15. The semiconductor device structure as claimed in claim 11 , wherein the adhesive layer comprises titanium, aluminum, copper, or a combination thereof.
16. A semiconductor device structure, comprising:
a semiconductor substrate;
a magnetic stack over the semiconductor substrate;
an isolation element extending across the magnetic stack, wherein the magnetic stack is wider than the isolation element; and
a conductive line over the isolation element.
17. The semiconductor device structure as claimed in claim 16 , wherein the conductive line partially covers the isolation element.
18. The semiconductor device structure as claimed in claim 16 , further comprising an adhesive layer between the magnetic element and the semiconductor substrate.
19. The semiconductor device structure as claimed in claim 18 , wherein an edge of the adhesive layer is laterally between an edge of the magnetic element and an edge of the isolation element.
20. The semiconductor device structure as claimed in claim 18 , wherein the edge of the adhesive layer is closer to the edge of the isolation element than the edge of the magnetic element.