Semiconductor device with doped structure
The present disclosure relates to a semiconductor device includes first and second source/drain (S/D) regions doped with lead (Pb) at a first dopant concentration. The semiconductor device also includes a channel region between the first and second S/D regions, where the channel region is doped with Pb at a second dopant concentration that is lower than the first dopant concentration. The semiconductor device further includes first and second S/D contacts in contact with the first and second S/D regions, respectively. The semiconductor device also includes a gate electrode over the channel region.
1. A method for forming a semiconductor device, comprising:
depositing a film on a substrate, the film comprising lead (Pb);
performing a thermal anneal process on the deposited film and the substrate to form a doped source/drain (S/D) region, wherein the doped S/D region comprises Pb;
performing a treatment process on the doped S/D region; and
forming a S/D contact on the doped S/D region.
2. The method of claim 1 , wherein depositing comprises a chemical vapor deposition (CVD) process.
3. The method of claim 1 , wherein performing the thermal anneal process comprises heating the film and the substrate to a temperature between about 300° C. and about 800° C.
4. The method of claim 1 , wherein performing the treatment process comprises a wet cleaning process.
5. The method of claim 1 , further comprising:
depositing an other film on the substrate, the other film comprising Pb;
performing an other thermal anneal process on the deposited other film and the substrate to form a doped channel region, wherein the channel region comprises Pb;
performing an other treatment process on the doped channel region; and
forming a gate electrode on the doped channel region.
6. A method, comprising:
depositing a first film on a substrate, the first film comprising lead (Pb);
performing a first thermal anneal process on the first film and the substrate to form a doped source/drain (S/D) region, wherein the doped S/D region comprises Pb;
performing a first treatment process on the doped S/D region;
forming a spacer adjacent to the doped S/D region;
depositing a second film on a substrate and in contact with the spacer, the second film comprising lead (Pb);
performing a second thermal anneal process on the second film and the substrate to form a doped channel region, wherein the doped channel comprises Pb; and
performing a second treatment process on the doped channel region.
7. The method of claim 6 , further comprising forming a S/D region in the substrate.
8. The method of claim 7 , further comprising performing a patterning process and an etching process on the first film such that the first film is formed only on the S/D region.
9. The method of claim 6 , further comprising forming a S/D contact on the doped S/D region.
10. The method of claim 6 , wherein the first and second treatments are performed at first and second temperatures, respectively, and wherein the first and second temperatures are different.
11. The method of claim 10 , wherein the first temperature is greater than the second temperature.
12. The method of claim 6 , further comprising removing the first film.
13. The method of claim 6 , further comprising removing the second film.
14. The method of claim 6 , wherein the first treatment process comprises a wet cleaning process.
15. The method of claim 6 , wherein the second treatment process comprises a dry plasma etching process.
16. The method of claim 6 , wherein the first and second treatments are performed at first and second temperatures, respectively, and wherein the first and second temperatures are different.
17. A method, comprising:
forming a source region and a drain region on a substrate;
depositing a first film on a substrate, the first film comprising lead (Pb);
patterning the first film to form first and second portions of the first film on the source region and the drain region, respectively;
performing a first thermal anneal process on the first and second portions of the first film to form a doped source region and a doped drain region, wherein the doped source region and the doped drain region comprise Pb;
forming first and second spacers adjacent to the doped source region and the doped drain region, respectively;
depositing a second film on the substrate and between the first and second spacers, the second film comprising lead (Pb); and
performing a second thermal anneal process on the second film to form a doped channel region between the doped source region and the doped drain region, wherein the doped channel region comprises Pb.
18. The method of claim 17 , further comprising performing a treatment process on the doped source region and the doped drain region.
19. The method of claim 17 , further comprising performing a treatment process on the doped channel region.
20. The method of claim 17 , further comprising removing the first and second films.