IP Library Granted Patent US 11,692,271
Granted Patent B2
US 11,692,271 · App. 16/948,858 · Granted Jul 4, 2023

Immersion cooling with water-based fluid using nano-structured coating

Inventors: Nenad Miljkovic (Urbana, IL); Thomas Foulkes (Terre Haute, IN); Patrick Birbarah (Lacrosse, WI); Tarek Gebrael (Champaign, IL); Andrew Stillwell (Champaign, IL); Robert Pilawa-Podgurski (Alameda, CA)
Assignee: The Board of Trustees of the University of Illinois
C23C16/56C23C16/401C23C16/463H01L21/02126H01L21/02203H01L21/02271
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Quick Facts
Patent No.
US 11,692,271
App. No.
16/948,858
Granted
Jul 4, 2023
Kind
B2
Abstract

A method includes coating, via chemical vapor deposition, electronics disposed on a printed circuit board (PCB) with an electrical insulation coating of between one micron to 25 microns. The method further include depositing, on the electrical insulation coating, a metallic nano-layer comprising a porous metallic nano-structure. The method further includes, after the coating and the depositing, immersing the PCB in a water-based fluid to cool the electronics while the electronics are powered on.

Claims (14)

1. A method comprising:

coating, via chemical vapor deposition, one or more power electronic components disposed on a printed circuit board (PCB) with an electrical insulation coating of between two to 25 microns in thickness, the electrical insulation coating covering an outside and top portion of the one or more power electronic components relative to the PCB;

depositing, on the electrical insulation coating, a nano-layer comprising a porous metal-based nano-structure; and

after the coating and the depositing, immersing the PCB in a water-based fluid to cool the one or more power electronic components while the one or more power electronic components are powered on and from the outside and top portion of the one or more power electronic components.

2. The method of claim 1 , wherein the electrical insulation coating comprises a Parylene-based compound.

3. The method of claim 1 , wherein the porous metal-based nano-structure comprises one of copper or copper oxide.

4. The method of claim 1 , wherein the water-based fluid comprises one of deionized water or a mixture of water and ethylene glycol.

5. The method of claim 1 , further comprising adding, to the water-based fluid, a non-ionic surfactant.

6. The method of claim 1 , wherein the depositing comprises performing cathodic deposition of the porous metal-based nano-structure, wherein the nano-layer is a super-hydrophilic nucleating coating.

7. The method of claim 1 , wherein the one or more power electronic components include a bottom-cooled power transistor device having at least one thermal pad disposed on a back of the PCB opposite from the bottom-cooled power transistor device, the method further comprising:

forming through-hole vias within the PCB to drive heat from the bottom-cooled power transistor device to the at least one thermal pad; and

wherein the coating and depositing are performed on both sides of the PCB.

8. The method of claim 1 , wherein the immersing the PCB in the water-based fluid comprises one of immersion that relies on passive return of condensed water and immersion performed via injected fluid from a central cooling loop.

9. The method of claim 1 , wherein coating the one or more power electronic components with electrical insulation coating includes coating the PCB with the electrical insulation coating.

Assignments (4)
CONFIRMATORY LICENSE Recorded May 23, 2023
From: UNIVERSITY OF ILLINOIS
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 063727/0282 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 18, 2023
From: MILJKOVIC, NENAD; BIRBARAH, PATRICK; GEBRAEL, TAREK; STILLWELL, ANDREW; PILAWA-PODGURSKI, ROBERT
To: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Reel/Frame 063687/0202 →
REDACTED INVENTION DISCLOSURE FORM Recorded May 18, 2023
From: FOULKES, THOMAS
To: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Reel/Frame 063696/0054 →
CONFIRMATORY LICENSE Recorded Jan 11, 2021
From: UNIVERSITY OF ILLINOIS, URBANA-CHAMPAIGN
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 054946/0368 →
Continuity (2)
Provisional Application 62910365 · Oct 3, 2019
Related Publication 20210102294A1 · Apr 8, 2021
Cited By (5)
US 12,255,122 US 12,342,449 US 12,376,254 US 12,469,754 US 12,628,317