Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
Provided is a mask assembly including a mask frame including an opening; and a mask arranged on the mask frame and including a deposition region and a non-opening region arranged around the deposition region, the deposition region facing the opening to transmit a deposition material. A width of the non-opening region in a lengthwise direction of the mask is about 200 μm to about 500 μm.
1. A mask assembly comprising:
a mask frame including a plurality of openings; and
a mask arranged on the mask frame and including a plurality of deposition regions and a non-opening region surrounding the plurality of deposition regions, the plurality of deposition regions facing the plurality of openings to receive a deposition material,
wherein a portion of the non-opening region disposed between each of the plurality of deposition regions has a width of about 200 μm to about 500 μm in a lengthwise direction of the mask.
2. The mask assembly of claim 1 , wherein the non-opening region of the mask includes a first portion and a second portion having a thickness less than that of the first portion.
3. The mask assembly of claim 2 , wherein the second portion is obtained via half etching in a thickness direction of the mask.
4. The mask assembly of claim 1 , wherein the mask frame further comprises a support stick extending in a direction that intersects the lengthwise direction of the mask.
5. The mask assembly of claim 4 , wherein the non-opening region of the mask overlaps the support stick.
6. The mask assembly of claim 1 , wherein the mask further comprises a welding region welded and fixed to the mask frame.
7. The mask assembly of claim 6 , wherein the welding region is provided on both ends of the mask in the lengthwise direction of the mask.
8. The mask assembly of claim 6 , wherein the welding region comprises a first nugget.
9. The mask assembly of claim 1 , wherein the non-opening region of the mask comprises a second nugget.
10. The mask assembly of claim 1 , wherein:
the mask is provided in plurality and mounted on the mask frame; and
a width of each of the masks is less than a width of each of the openings.
11. A method of manufacturing a display apparatus, the method comprising:
forming a pixel electrode;
forming an emission layer on the pixel electrode by arranging a substrate in a chamber, arranging a deposition source in the chamber configured to supply a deposition material into the chamber, arranging a mask assembly to face the deposition source and configured to receive the deposition material and deposit the deposition material on the substrate, the mask assembly having a mask frame including a plurality of openings, a mask arranged on the mask frame and including a plurality of deposition regions and a non-opening region arranged around the plurality of deposition regions, the plurality of deposition regions facing the plurality of openings and configured to receive the deposition material, wherein a portion of the non-opening region disposed between each of the plurality of deposition regions has a width of about 200 μm to about 500 μm in a lengthwise direction of the mask; and
forming an opposite electrode on the emission layer.