Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
A mask assembly including a mask frame including an opening; and a mask arranged on the mask frame and including a deposition region and a non-opening region arranged around the deposition region, the deposition region facing the opening to transmit a deposition material. A width of the non-opening region in a lengthwise direction of the mask is about 200 μm to about 500 μm.
1. An apparatus for manufacturing a display apparatus, the apparatus comprising:
a chamber in which a substrate is arranged;
a deposition source arranged in the chamber and that supplies a deposition material into the chamber; and
a mask assembly arranged to face the deposition source and that receives the deposition material and deposits the deposition material on the substrate, wherein
the mask assembly comprises:
a mask frame comprising a support stick and a plurality of openings formed by the support stick; and
a mask arranged on the mask frame and comprising a plurality of deposition regions and a non-opening region arranged around the plurality of deposition regions, the plurality of deposition regions facing the plurality of openings of the mask frame to receive the deposition material,
wherein a portion of the non-opening region is disposed between adjacent deposition regions, overlaps the support stick extending in a direction that intersects a lengthwise direction of the mask, wherein the portion of the non-opening region has a width of about 200 μm to about 500 μm in the lengthwise direction of the mask.
2. The apparatus of claim 1 , wherein the non-opening region of the mask comprises a first portion and a second portion having a thickness less than that of the first portion.
3. The apparatus of claim 2 , wherein the second portion is obtained via half etching in a thickness direction of the mask.
4. The apparatus of claim 1 , wherein
the mask further comprises a welding region in which the mask is welded and fixed to the mask frame, and
the welding region is provided on ends of the mask in the lengthwise direction of the mask.
5. The apparatus of claim 4 , wherein
the welding region of the mask comprises a first nugget, and
the portion of the non-opening region of the mask comprises a second nugget disposed between adjacent deposition regions in the lengthwise direction.
6. The apparatus of claim 1 , wherein the non-opening region of the mask comprises:
an upper surface that is substantially flat, and
a lower surface that is protruding and recessed.