IP Library Granted Patent US 11,740,454
Granted Patent B2
US 11,740,454 · App. 16/954,990 · Granted Aug 29, 2023

Etching of water-sensitive optics with water-in-oil emulsions

Inventors: Salmaan H. Baxamusa (Livermore, CA); John Adams (Livermore, CA); Paul Ehrmann (Hughson, CA); Ted Laurence (Livermore, CA); Marlon G. Menor (Ceres, CA); Kathleen I. Schaffers (Livermore, CA)
Assignee: Lawrence Livermore National Security, LLC
G02B27/0006B06B1/02C09K13/00B06B2201/70
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Quick Facts
Patent No.
US 11,740,454
App. No.
16/954,990
Granted
Aug 29, 2023
Kind
B2
Abstract

In one inventive concept, a method for etching an optic includes obtaining a microemulsion, where the microemulsion includes a continuous oil phase, a surfactant system comprising at least one surfactant, and water, submerging at least a portion of the optic in the microemulsion, and agitating by ultrasonication the microemulsion for etching the optic submerged therein.

Claims (26)

1. A method for etching an optic, the method comprising:

obtaining a microemulsion, wherein the microemulsion comprises a continuous oil phase, a surfactant system comprising at least one surfactant, and water;

submerging at least a portion of the optic in the microemulsion; and

agitating by ultrasonication the microemulsion for etching the optic submerged therein.

2. The method as recited in claim 1 , wherein the microemulsion comprises an effective amount of the surfactant system to disperse the water in the continuous oil phase.

3. The method as recited in claim 1 , wherein the microemulsion is a water-in-oil emulsion.

4. The method as recited in claim 1 , wherein the continuous oil phase is present in the microemulsion in a range of about 60 wt % to about 90 wt % relative to a total weight of the microemulsion.

5. The method as recited in claim 1 , wherein the continuous oil phase is present in the microemulsion in a range of about 70 wt % to about 85 wt % relative to a total weight of the microemulsion.

6. The method as recited in claim 1 , wherein the surfactant system is present in the microemulsion in a range of about 10 wt % to about 40 wt % relative to a total weight of the microemulsion.

7. The method as recited in claim 1 , wherein the surfactant system is present in the microemulsion in a range of about 13 wt % to about 29 wt % relative to a total weight of the microemulsion.

8. The method as recited in claim 1 , wherein the water is present in the microemulsion in a range of greater than 0 wt % to about 10 wt % relative to total weight of the microemulsion.

9. The method as recited in claim 1 , wherein the surfactant system comprises the surfactant and a co-surfactant, wherein a ratio by weight of the surfactant to the co-surfactant is 3:2.

10. The method as recited in claim 9 , wherein the co-surfactant is a n-alcohol.

11. The method as recited in claim 1 , wherein the water is deuterated water (D 2 O).

12. The method as recited in claim 1 , wherein the microemulsion is in a single isotropic phase.

13. The method as recited in claim 1 , wherein the continuous oil phase is a nonpolar aprotic solvent.

14. The method as recited in claim 1 , wherein the continuous oil phase comprises a component selected from the group consisting of: toluene and cyclohexane.

15. The method as recited in claim 1 , wherein the at least one surfactant includes a nonionic surfactant.

16. The method as recited in claim 1 , wherein the surfactant system comprises at least one surfactant selected from the group consisting of: polyethylene glycol tert-octylphenyl ether and polyoxyethylene (5) nonylphenylether.

17. The method as recited in claim 1 , wherein the ultrasonication has a frequency in a range of about 20 kHz to about 300 kHz.

18. A system for etching an optic, the system comprising:

a chamber;

a solution in the chamber, wherein the solution is a microemulsion comprising a continuous oil phase, at least one surfactant, and water; and

an ultrasonic device, wherein the ultrasonic device is configured to agitate the solution in the chamber.

19. The system as recited in claim 18 , wherein the ultrasonic device provides a frequency in a range of about 20 kHz to about 300 kHz.

20. The method as recited in claim 1 , wherein a mass ratio of the surfactant system to the water is in a range of about 4:1 to about 14:1.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2020
From: BAXAMUSA, SALMAAN H.; ADAMS, JOHN; EHRMANN, PAUL; LAURENCE, TED; MENOR, MARLON G.; SCHAFFERS, KATHLEEN I.
To: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Reel/Frame 053898/0969 →
CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS) Recorded Jul 27, 2020
From: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 053316/0200 →
Continuity (1)
Related Publication 20210003841A1 · Jan 7, 2021