Semiconductor device and electronic apparatus
The present technology relates to a semiconductor device and an electronic apparatus that are capable of improving the characteristics of a semiconductor device or an electronic apparatus that includes a pixel having a metallic filter and a pixel not having the metallic filter. A semiconductor device includes: a pixel unit in which a first pixel including a metallic filter and a second pixel not including the metallic filter are disposed adjacent to each other; and a reflected light reduction unit that reduces reflected light on a sidewall of the metallic filter at a boundary portion between the first pixel and the second pixel. The present technology can be applied to an image sensor that includes a narrowband pixel including a plasmon filter and a normal pixel including a color filter, for example.
1. A semiconductor device comprising:
a pixel unit in which a first pixel including a metallic filter and a second pixel not including the metallic filter are disposed adjacent to each other; and
a reflected light reduction unit that reduces reflected light on a sidewall of the metallic filter at a boundary portion between the first pixel and the second pixel.
2. The semiconductor device according to claim 1 , wherein
the reflected light reduction unit is disposed at a position closer to a light incident surface of the semiconductor device than the metallic filter, and includes a light absorber that overlaps at least one of the first pixel or the second pixel adjacent to the boundary portion.
3. The semiconductor device according to claim 2 , wherein
the second pixel includes a non-metallic filter, and
the light absorber is disposed at a position closer to the light incident surface of the semiconductor device than the metallic filter and the non-metallic filter.
4. The semiconductor device according to claim 3 , wherein
the non-metallic filter is disposed at a position closer to the light incident surface of the semiconductor device than the metallic filter.
5. The semiconductor device according to claim 2 , wherein
the light absorber includes a black filter.
6. The semiconductor device according to claim 2 , wherein
the light absorber includes an optical filter in which a red filter and a blue filter are stacked.
7. The semiconductor device according to claim 2 , wherein
an angle between a plane and the sidewall is not smaller than a maximum incident angle of light incident on the sidewall, the plane connecting a side of a face of the light absorber that is on the opposite side from a light incident surface of the light absorber and is located on a side of the second pixel, to a side of the sidewall that is on the opposite side from a light incident surface of the metallic filter.
8. The semiconductor device according to claim 1 , wherein
the reflected light reduction unit includes a light absorber that covers at least part of the sidewall.
9. The semiconductor device according to claim 8 , wherein
the light absorber includes a black filter.
10. The semiconductor device according to claim 8 , wherein
the light absorber includes an optical filter in which a red filter and a blue filter are stacked.
11. The semiconductor device according to claim 1 , wherein
the reflected light reduction unit includes a low-reflection film that has a lower reflectance than a metal forming the metallic filter and covers at least part of the sidewall.
12. The semiconductor device according to claim 1 , wherein
the reflected light reduction unit includes the sidewall that is inclined so as to move away from the boundary portion in a direction of the first pixel as a distance from a light incident surface of the metallic filter increases.
13. The semiconductor device according to claim 12 , wherein
an inclination angle of the sidewall with respect to the light incident surface of the metallic filter is not greater than (90°−the maximum incident angle of light incident on the sidewall).
14. The semiconductor device according to claim 1 , wherein
an antireflective film that surrounds at least part of a periphery of the first pixel and reduces reflected light is formed on a light incident surface of the metallic filter.
15. The semiconductor device according to claim 14 , wherein
the antireflective film includes a black filter.
16. The semiconductor device according to claim 1 , wherein
the metallic filter includes a plasmon filter.
17. The semiconductor device according to claim 1 , wherein
the metallic filter includes a Fabry-Perot.
18. An electronic apparatus comprising:
a semiconductor device; and
a signal processing unit that processes a signal output from the semiconductor device,
wherein the semiconductor device includes:
a pixel unit in which a first pixel including a metallic filter and a second pixel not including the metallic filter are disposed adjacent to each other; and
a reflected light reduction unit that reduces reflected light on a sidewall of the metallic filter at a boundary portion between the first pixel and the second pixel.