Nerve stimulator and manufacturing method thereof
A nerve stimulator and a manufacturing method thereof. The nerve stimulator includes a glass substrate, and a plurality of metal pins provided on the substrate, wherein the metal pins form stimulation portions on one side of the substrate, and the density of the metal pins is greater than 15 Pin/mm 2 . The stimulation portions in the present nerve stimulator have a high density and a good stimulation effect. The processing method thereof is to cut out a high-density metal pin array first by using a metal underlayer, then the manufacturing method overcomes the deficiency in the prior art that it is rather difficult to manufacture a high density of nerve stimulation electrodes by using other substrates such as ceramics and the like.
1. A nerve stimulator, comprising a substrate, a plurality of metal pins on the substrate, wherein the metal pins run through the substrate from a first side of the substrate to a second side of the substrate and protrude from the first side to form stimulation portions, the substrate is made of a glass material, and a pad structure made of a metal material on the glass substrate.
2. The nerve stimulator according to claim 1 , wherein a density of the metal pins is greater than 15 Pin/mm 2 .
3. The nerve stimulator according to claim 1 , wherein a height of the stimulation portions is 1 μm to 100 μm.
4. The nerve stimulator according to claim 1 , wherein the pad structure is provided on the substrate on the second side opposite to the stimulation portions.
5. The nerve stimulator according to claim 1 , wherein a processing chip is connected onto the substrate, and the processing chip and the substrate are connected through flip-chip bonding.