Seed crystal for single crystal 4H—SiC growth and method for processing the same
View Patent ↗A seed crystal for single crystal 4H-SiC growth of the present invention is a disk-shaped seed crystal for single crystal 4H-SiC growth having a diameter of more than 150 mm and having a thickness within a range of more than or equal to 1 mm and less than or equal to 0.03 times of the diameter, in which one surface on which the single crystal 4H-SiC is grown is a mirror surface and an Ra of the other surface is more than 10 nm, and an absolute value of magnitude of waviness in a state where the seed crystal is freely deformed so that an internal stress distribution is reduced is less than or equal to 12 μm.
1. A disk-shaped seed crystal for single crystal 4H-SiC growth having a diameter of more than 150 mm and having a thickness within a range of more than or equal to 1 mm and less than or equal to 0.03 times of the diameter,
wherein one surface on which the single crystal 4H-SiC is grown is a mirror surface and an Ra of the other surface is more than 10 nm, and
wherein an absolute value of magnitude of waviness, in a state where the seed crystal is freely deformed so that an internal stress distribution is reduced, is less than or equal to 12 μm.
2. The seed crystal for single crystal 4H-SiC growth according to claim 1 ,
wherein the absolute value of the magnitude of the waviness is less than or equal to 8 μm.
3. The seed crystal for single crystal 4H-SiC growth according to claim 1 ,
wherein the one surface on which the single crystal 4H-SiC is grown is a carbon surface.
4. A method for processing a disk-shaped seed crystal for single crystal 4H-SiC growth having a diameter of more than 150 mm and having a thickness within a range of more than or equal to 1 mm and less than or equal to 0.03 times of the diameter, the method comprising:
a first step of cutting out a disk-shaped crystal from a columnar single crystal 4H-SiC ingot having a diameter of more than 150 mm;
a second step of fixing the crystal to a base material to grind one surface on which the single crystal 4H-SiC is grown so as to have a flat mirror surface;
a third step of releasing the fixation of the crystal to the base material so that the one surface and the other surface of the crystal respectively become a concave surface and a convex surface due to the Twyman effect;
a fourth step of fixing the one surface side of the crystal to a plate so that the concave state of the one surface is maintained;
a fifth step of grinding the other surface which has become convex so as to have a flat surface having an Ra of more than 10 nm;
a sixth step of releasing the fixation of the crystal to the plate;
a seventh step of vacuum-adsorbing the other surface side of the crystal onto a flat grinding table equipped with a vacuum adsorption mechanism; and
an eighth step of grinding the one surface which has become concave so as to have a flat mirror surface,
wherein grinding amounts in the first step, the fifth step, and the eighth step are adjusted so that an absolute value of magnitude of waviness of the crystal in a state where the seed crystal is freely deformed so that an internal stress distribution is reduced becomes less than or equal to 12 μm.
5. The method for processing a seed crystal for single crystal 4H-SiC growth according to claim 4 , further comprising:
subsequently polishing and finishing the one surface after the eighth step.
6. The method for processing a seed crystal for single crystal 4H-SiC growth according to claim 4 ,
wherein the one surface on which the single crystal 4H-SiC is grown is a carbon surface.
7. The method for processing a seed crystal for single crystal 4H-SiC growth according to claim 4 ,
wherein the grinding amounts in the first step, the fifth step, and the eighth step are adjusted so that an absolute value of magnitude of waviness of the crystal becomes less than or equal to 8 μm.